id
stringlengths
9
16
submitter
stringlengths
1
64
authors
stringlengths
4
14.5k
title
stringlengths
1
278
comments
stringlengths
1
762
journal-ref
stringlengths
1
557
doi
stringlengths
11
153
report-no
stringlengths
2
479
categories
stringlengths
5
104
license
stringclasses
9 values
abstract
stringlengths
6
3.8k
versions
listlengths
1
103
update_date
timestamp[s]
authors_parsed
listlengths
1
942
categories_descriptions
listlengths
1
13
0802.2832
Pascal Weil
Zvi Lotker, Boaz Patt-Shamir, Dror Rawitz
Rent, Lease or Buy: Randomized Algorithms for Multislope Ski Rental
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
In the Multislope Ski Rental problem, the user needs a certain resource for some unknown period of time. To use the resource, the user must subscribe to one of several options, each of which consists of a one-time setup cost (``buying price''), and cost proportional to the duration of the usage (``rental rate''). The larger the price, the smaller the rent. The actual usage time is determined by an adversary, and the goal of an algorithm is to minimize the cost by choosing the best option at any point in time. Multislope Ski Rental is a natural generalization of the classical Ski Rental problem (where the only options are pure rent and pure buy), which is one of the fundamental problems of online computation. The Multislope Ski Rental problem is an abstraction of many problems where online decisions cannot be modeled by just two options, e.g., power management in systems which can be shut down in parts. In this paper we study randomized algorithms for Multislope Ski Rental. Our results include the best possible online randomized strategy for any additive instance, where the cost of switching from one option to another is the difference in their buying prices; and an algorithm that produces an $e$-competitive randomized strategy for any (non-additive) instance.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:13:19 GMT" } ]
2008-02-21T00:00:00
[ [ "Lotker", "Zvi", "" ], [ "Patt-Shamir", "Boaz", "" ], [ "Rawitz", "Dror", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2833
Pascal Weil
Laurent Bienvenu (LIF), Andrej Muchnik, Alexander Shen (LIF, LIFR-MI2P), Nikolay Vereshchagin
Limit complexities revisited
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC
null
The main goal of this paper is to put some known results in a common perspective and to simplify their proofs. We start with a simple proof of a result from (Vereshchagin, 2002) saying that $\limsup_n\KS(x|n)$ (here $\KS(x|n)$ is conditional (plain) Kolmogorov complexity of $x$ when $n$ is known) equals $\KS^{\mathbf{0'}(x)$, the plain Kolmogorov complexity with $\mathbf{0'$-oracle. Then we use the same argument to prove similar results for prefix complexity (and also improve results of (Muchnik, 1987) about limit frequencies), a priori probability on binary tree and measure of effectively open sets. As a by-product, we get a criterion of $\mathbf{0'}$ Martin-L\"of randomness (called also 2-randomness) proved in (Miller, 2004): a sequence $\omega$ is 2-random if and only if there exists $c$ such that any prefix $x$ of $\omega$ is a prefix of some string $y$ such that $\KS(y)\ge |y|-c$. (In the 1960ies this property was suggested in (Kolmogorov, 1968) as one of possible randomness definitions; its equivalence to 2-randomness was shown in (Miller, 2004) while proving another 2-randomness criterion (see also (Nies et al. 2005)): $\omega$ is 2-random if and only if $\KS(x)\ge |x|-c$ for some $c$ and infinitely many prefixes $x$ of $\omega$. Finally, we show that the low-basis theorem can be used to get alternative proofs for these results and to improve the result about effectively open sets; this stronger version implies the 2-randomness criterion mentioned in the previous sentence.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:13:31 GMT" } ]
2008-02-21T00:00:00
[ [ "Bienvenu", "Laurent", "", "LIF" ], [ "Muchnik", "Andrej", "", "LIF,\n LIFR-MI2P" ], [ "Shen", "Alexander", "", "LIF,\n LIFR-MI2P" ], [ "Vereshchagin", "Nikolay", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" } ]
0802.2834
Pascal Weil
Andreas Bj\"orklund, Thore Husfeldt, Petteri Kaski (HIIT), Mikko Koivisto (HIIT)
Trimmed Moebius Inversion and Graphs of Bounded Degree
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS math.CO
null
We study ways to expedite Yates's algorithm for computing the zeta and Moebius transforms of a function defined on the subset lattice. We develop a trimmed variant of Moebius inversion that proceeds point by point, finishing the calculation at a subset before considering its supersets. For an $n$-element universe $U$ and a family $\scr F$ of its subsets, trimmed Moebius inversion allows us to compute the number of packings, coverings, and partitions of $U$ with $k$ sets from $\scr F$ in time within a polynomial factor (in $n$) of the number of supersets of the members of $\scr F$. Relying on an intersection theorem of Chung et al. (1986) to bound the sizes of set families, we apply these ideas to well-studied combinatorial optimisation problems on graphs of maximum degree $\Delta$. In particular, we show how to compute the Domatic Number in time within a polynomial factor of $(2^{\Delta+1-2)^{n/(\Delta+1)$ and the Chromatic Number in time within a polynomial factor of $(2^{\Delta+1-\Delta-1)^{n/(\Delta+1)$. For any constant $\Delta$, these bounds are $O\bigl((2-\epsilon)^n\bigr)$ for $\epsilon>0$ independent of the number of vertices $n$.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:15:00 GMT" } ]
2008-02-21T00:00:00
[ [ "Björklund", "Andreas", "", "HIIT" ], [ "Husfeldt", "Thore", "", "HIIT" ], [ "Kaski", "Petteri", "", "HIIT" ], [ "Koivisto", "Mikko", "", "HIIT" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" } ]
0802.2836
Pascal Weil
Vincenzo Bonifaci, Peter Korteweg, Alberto Marchetti-Spaccamela, Leen Stougie (CWI)
Minimizing Flow Time in the Wireless Gathering Problem
null
ACM Transactions on Algorithms 7(3): 33:1-33:20 (2011)
10.1145/1978782.1978788
null
cs.DS cs.NI
null
We address the problem of efficient data gathering in a wireless network through multi-hop communication. We focus on the objective of minimizing the maximum flow time of a data packet. We prove that no polynomial time algorithm for this problem can have approximation ratio less than $\Omega(m^{1/3)$ when $m$ packets have to be transmitted, unless $P = NP$. We then use resource augmentation to assess the performance of a FIFO-like strategy. We prove that this strategy is 5-speed optimal, i.e., its cost remains within the optimal cost if we allow the algorithm to transmit data at a speed 5 times higher than that of the optimal solution we compare to.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:18:24 GMT" } ]
2019-07-01T00:00:00
[ [ "Bonifaci", "Vincenzo", "", "CWI" ], [ "Korteweg", "Peter", "", "CWI" ], [ "Marchetti-Spaccamela", "Alberto", "", "CWI" ], [ "Stougie", "Leen", "", "CWI" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Computer Science", "code": "cs.NI", "description": "Covers all aspects of computer communication networks, including network architecture and design, network protocols, and internetwork standards (like TCP/IP). Also includes topics, such as web caching, that are directly relevant to Internet architecture and performance. Roughly includes all of ACM Subject Class C.2 except C.2.4, which is more likely to have Distributed, Parallel, and Cluster Computing as the primary subject area.", "span": "(Networking and Internet Architecture)" } ]
0802.2838
Pascal Weil
Chandan Saha
Factoring Polynomials over Finite Fields using Balance Test
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS cs.DM
null
We study the problem of factoring univariate polynomials over finite fields. Under the assumption of the Extended Riemann Hypothesis (ERH), (Gao, 2001) designed a polynomial time algorithm that fails to factor only if the input polynomial satisfies a strong symmetry property, namely square balance. In this paper, we propose an extension of Gao's algorithm that fails only under an even stronger symmetry property. We also show that our property can be used to improve the time complexity of best deterministic algorithms on most input polynomials. The property also yields a new randomized polynomial time algorithm.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:18:52 GMT" } ]
2008-02-21T00:00:00
[ [ "Saha", "Chandan", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Computer Science", "code": "cs.DM", "description": "Covers combinatorics, graph theory, applications of probability. Roughly includes material in ACM Subject Classes G.2 and G.3.", "span": "(Discrete Mathematics)" } ]
0802.2839
Pascal Weil
Patricia Bouyer (LSV), Nicolas Markey (LSV), Jo\"el Ouaknine, Philippe Schnoebelen (LSV), James Worrell
On Termination for Faulty Channel Machines
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
10.4230/LIPIcs.STACS.2008.1339
null
cs.IT cs.CC math.IT
null
A channel machine consists of a finite controller together with several fifo channels; the controller can read messages from the head of a channel and write messages to the tail of a channel. In this paper, we focus on channel machines with insertion errors, i.e., machines in whose channels messages can spontaneously appear. Such devices have been previously introduced in the study of Metric Temporal Logic. We consider the termination problem: are all the computations of a given insertion channel machine finite? We show that this problem has non-elementary, yet primitive recursive complexity.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:18:52 GMT" } ]
2016-07-07T00:00:00
[ [ "Bouyer", "Patricia", "", "LSV" ], [ "Markey", "Nicolas", "", "LSV" ], [ "Ouaknine", "Joël", "", "LSV" ], [ "Schnoebelen", "Philippe", "", "LSV" ], [ "Worrell", "James", "" ] ]
[ { "class": "Computer Science", "code": "cs.IT", "description": "Covers theoretical and experimental aspects of information theory and coding. Includes material in ACM Subject Class E.4 and intersects with H.1.1.", "span": "(Information Theory)" }, { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" }, { "class": "Mathematics", "code": "math.IT", "description": "math.IT is an alias for cs.IT. Covers theoretical and experimental aspects of information theory and coding.", "span": "(Information Theory)" } ]
0802.2841
Pascal Weil
Patrick Briest, Martin Hoefer, Piotr Krysta
Stackelberg Network Pricing Games
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS cs.GT
null
We study a multi-player one-round game termed Stackelberg Network Pricing Game, in which a leader can set prices for a subset of $m$ priceable edges in a graph. The other edges have a fixed cost. Based on the leader's decision one or more followers optimize a polynomial-time solvable combinatorial minimization problem and choose a minimum cost solution satisfying their requirements based on the fixed costs and the leader's prices. The leader receives as revenue the total amount of prices paid by the followers for priceable edges in their solutions, and the problem is to find revenue maximizing prices. Our model extends several known pricing problems, including single-minded and unit-demand pricing, as well as Stackelberg pricing for certain follower problems like shortest path or minimum spanning tree. Our first main result is a tight analysis of a single-price algorithm for the single follower game, which provides a $(1+\epsilon) \log m$-approximation for any $\epsilon >0$. This can be extended to provide a $(1+\epsilon)(\log k + \log m)$-approximation for the general problem and $k$ followers. The latter result is essentially best possible, as the problem is shown to be hard to approximate within $\mathcal{O(\log^\epsilon k + \log^\epsilon m)$. If followers have demands, the single-price algorithm provides a $(1+\epsilon)m^2$-approximation, and the problem is hard to approximate within $\mathcal{O(m^\epsilon)$ for some $\epsilon >0$. Our second main result is a polynomial time algorithm for revenue maximization in the special case of Stackelberg bipartite vertex cover, which is based on non-trivial max-flow and LP-duality techniques. Our results can be extended to provide constant-factor approximations for any constant number of followers.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:19:33 GMT" } ]
2008-02-21T00:00:00
[ [ "Briest", "Patrick", "" ], [ "Hoefer", "Martin", "" ], [ "Krysta", "Piotr", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Computer Science", "code": "cs.GT", "description": "Covers all theoretical and applied aspects at the intersection of computer science and game theory, including work in mechanism design, learning in games (which may overlap with Learning), foundations of agent modeling in games (which may overlap with Multiagent systems), coordination, specification and formal methods for non-cooperative computational environments. The area also deals with applications of game theory to areas such as electronic commerce.", "span": "(Computer Science and Game Theory)" } ]
0802.2842
Pascal Weil
Filip Murlak
Weak index versus Borel rank
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.IT math.IT
null
We investigate weak recognizability of deterministic languages of infinite trees. We prove that for deterministic languages the Borel hierarchy and the weak index hierarchy coincide. Furthermore, we propose a procedure computing for a deterministic automaton an equivalent minimal index weak automaton with a quadratic number of states. The algorithm works within the time of solving the emptiness problem.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:19:47 GMT" } ]
2008-02-21T00:00:00
[ [ "Murlak", "Filip", "" ] ]
[ { "class": "Computer Science", "code": "cs.IT", "description": "Covers theoretical and experimental aspects of information theory and coding. Includes material in ACM Subject Class E.4 and intersects with H.1.1.", "span": "(Information Theory)" }, { "class": "Mathematics", "code": "math.IT", "description": "math.IT is an alias for cs.IT. Covers theoretical and experimental aspects of information theory and coding.", "span": "(Information Theory)" } ]
0802.2843
Pascal Weil
Joshua Brody, Amit Chakrabarti
Sublinear Communication Protocols for Multi-Party Pointer Jumping and a Related Lower Bound
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC cs.DS
null
We study the one-way number-on-the-forehead (NOF) communication complexity of the $k$-layer pointer jumping problem with $n$ vertices per layer. This classic problem, which has connections to many aspects of complexity theory, has seen a recent burst of research activity, seemingly preparing the ground for an $\Omega(n)$ lower bound, for constant $k$. Our first result is a surprising sublinear -- i.e., $o(n)$ -- upper bound for the problem that holds for $k \ge 3$, dashing hopes for such a lower bound. A closer look at the protocol achieving the upper bound shows that all but one of the players involved are collapsing, i.e., their messages depend only on the composition of the layers ahead of them. We consider protocols for the pointer jumping problem where all players are collapsing. Our second result shows that a strong $n - O(\log n)$ lower bound does hold in this case. Our third result is another upper bound showing that nontrivial protocols for (a non-Boolean version of) pointer jumping are possible even when all players are collapsing. Our lower bound result uses a novel proof technique, different from those of earlier lower bounds that had an information-theoretic flavor. We hope this is useful in further study of the problem.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:20:14 GMT" } ]
2008-02-21T00:00:00
[ [ "Brody", "Joshua", "" ], [ "Chakrabarti", "Amit", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" }, { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2844
Pascal Weil
Marni Mishna, Mike Zabrocki
Analytic aspects of the shuffle product
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.IT math.CO math.IT
null
There exist very lucid explanations of the combinatorial origins of rational and algebraic functions, in particular with respect to regular and context free languages. In the search to understand how to extend these natural correspondences, we find that the shuffle product models many key aspects of D-finite generating functions, a class which contains algebraic. We consider several different takes on the shuffle product, shuffle closure, and shuffle grammars, and give explicit generating function consequences. In the process, we define a grammar class that models D-finite generating functions.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:20:35 GMT" } ]
2008-02-21T00:00:00
[ [ "Mishna", "Marni", "" ], [ "Zabrocki", "Mike", "" ] ]
[ { "class": "Computer Science", "code": "cs.IT", "description": "Covers theoretical and experimental aspects of information theory and coding. Includes material in ACM Subject Class E.4 and intersects with H.1.1.", "span": "(Information Theory)" }, { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" }, { "class": "Mathematics", "code": "math.IT", "description": "math.IT is an alias for cs.IT. Covers theoretical and experimental aspects of information theory and coding.", "span": "(Information Theory)" } ]
0802.2845
Pascal Weil
Eric Colin De Verdi\`ere (LIENS), Alexander Schrijver (CWI)
Shortest Vertex-Disjoint Two-Face Paths in Planar Graphs
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS math.CO
null
Let $G$ be a directed planar graph of complexity $n$, each arc having a nonnegative length. Let $s$ and $t$ be two distinct faces of $G$; let $s_1,...,s_k$ be vertices incident with $s$; let $t_1,...,t_k$ be vertices incident with $t$. We give an algorithm to compute $k$ pairwise vertex-disjoint paths connecting the pairs $(s_i,t_i)$ in $G$, with minimal total length, in $O(kn\log n)$ time.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:20:48 GMT" } ]
2008-02-21T00:00:00
[ [ "De Verdière", "Eric Colin", "", "LIENS" ], [ "Schrijver", "Alexander", "", "CWI" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" } ]
0802.2846
Pascal Weil
Atlas F. Cook IV, Carola Wenk
Geodesic Fr\'echet Distance Inside a Simple Polygon
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS cs.CG
null
We unveil an alluring alternative to parametric search that applies to both the non-geodesic and geodesic Fr\'echet optimization problems. This randomized approach is based on a variant of red-blue intersections and is appealing due to its elegance and practical efficiency when compared to parametric search. We present the first algorithm for the geodesic Fr\'echet distance between two polygonal curves $A$ and $B$ inside a simple bounding polygon $P$. The geodesic Fr\'echet decision problem is solved almost as fast as its non-geodesic sibling and requires $O(N^{2\log k)$ time and $O(k+N)$ space after $O(k)$ preprocessing, where $N$ is the larger of the complexities of $A$ and $B$ and $k$ is the complexity of $P$. The geodesic Fr\'echet optimization problem is solved by a randomized approach in $O(k+N^{2\log kN\log N)$ expected time and $O(k+N^{2)$ space. This runtime is only a logarithmic factor larger than the standard non-geodesic Fr\'echet algorithm (Alt and Godau 1995). Results are also presented for the geodesic Fr\'echet distance in a polygonal domain with obstacles and the geodesic Hausdorff distance for sets of points or sets of line segments inside a simple polygon $P$.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:21:19 GMT" } ]
2008-05-21T00:00:00
[ [ "Cook", "Atlas F.", "IV" ], [ "Wenk", "Carola", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Computer Science", "code": "cs.CG", "description": "Roughly includes material in ACM Subject Classes I.3.5 and F.2.2.", "span": "(Computational Geometry)" } ]
0802.2847
Pascal Weil
Ulrich Meyer
On Dynamic Breadth-First Search in External-Memory
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
We provide the first non-trivial result on dynamic breadth-first search (BFS) in external-memory: For general sparse undirected graphs of initially $n$ nodes and O(n) edges and monotone update sequences of either $\Theta(n)$ edge insertions or $\Theta(n)$ edge deletions, we prove an amortized high-probability bound of $O(n/B^{2/3}+\sort(n)\cdot \log B)$ I/Os per update. In contrast, the currently best approach for static BFS on sparse undirected graphs requires $\Omega(n/B^{1/2}+\sort(n))$ I/Os.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:21:21 GMT" } ]
2008-02-21T00:00:00
[ [ "Meyer", "Ulrich", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2850
Pascal Weil
Samir Datta, Raghav Kulkarni, Sambuddha Roy (IBM IRL)
Deterministically Isolating a Perfect Matching in Bipartite Planar Graphs
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS math.CO
null
We present a deterministic way of assigning small (log bit) weights to the edges of a bipartite planar graph so that the minimum weight perfect matching becomes unique. The isolation lemma as described in (Mulmuley et al. 1987) achieves the same for general graphs using a randomized weighting scheme, whereas we can do it deterministically when restricted to bipartite planar graphs. As a consequence, we reduce both decision and construction versions of the matching problem to testing whether a matrix is singular, under the promise that its determinant is 0 or 1, thus obtaining a highly parallel SPL algorithm for bipartite planar graphs. This improves the earlier known bounds of non-uniform SPL by (Allender et al. 1999) and $NC^2$ by (Miller and Naor 1995, Mahajan and Varadarajan 2000). It also rekindles the hope of obtaining a deterministic parallel algorithm for constructing a perfect matching in non-bipartite planar graphs, which has been open for a long time. Our techniques are elementary and simple.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:21:52 GMT" } ]
2008-02-21T00:00:00
[ [ "Datta", "Samir", "", "IBM IRL" ], [ "Kulkarni", "Raghav", "", "IBM IRL" ], [ "Roy", "Sambuddha", "", "IBM IRL" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" } ]
0802.2851
Pascal Weil
Pinyan Lu, Changyuan Yu
An Improved Randomized Truthful Mechanism for Scheduling Unrelated Machines
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
We study the scheduling problem on unrelated machines in the mechanism design setting. This problem was proposed and studied in the seminal paper (Nisan and Ronen 1999), where they gave a 1.75-approximation randomized truthful mechanism for the case of two machines. We improve this result by a 1.6737-approximation randomized truthful mechanism. We also generalize our result to a $0.8368m$-approximation mechanism for task scheduling with $m$ machines, which improve the previous best upper bound of $0.875m(Mu'alem and Schapira 2007).
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:22:30 GMT" } ]
2008-02-21T00:00:00
[ [ "Lu", "Pinyan", "" ], [ "Yu", "Changyuan", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2852
Pascal Weil
Martin Dietzfelbinger, Jonathan E. Rowe, Ingo Wegener, Philipp Woelfel
Tight Bounds for Blind Search on the Integers
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
We analyze a simple random process in which a token is moved in the interval $A=\{0,...,n\$: Fix a probability distribution $\mu$ over $\{1,...,n\$. Initially, the token is placed in a random position in $A$. In round $t$, a random value $d$ is chosen according to $\mu$. If the token is in position $a\geq d$, then it is moved to position $a-d$. Otherwise it stays put. Let $T$ be the number of rounds until the token reaches position 0. We show tight bounds for the expectation of $T$ for the optimal distribution $\mu$. More precisely, we show that $\min_\mu\{E_\mu(T)\=\Theta((\log n)^2)$. For the proof, a novel potential function argument is introduced. The research is motivated by the problem of approximating the minimum of a continuous function over $[0,1]$ with a ``blind'' optimization strategy.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:22:33 GMT" } ]
2008-02-21T00:00:00
[ [ "Dietzfelbinger", "Martin", "" ], [ "Rowe", "Jonathan E.", "" ], [ "Wegener", "Ingo", "" ], [ "Woelfel", "Philipp", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2853
Pascal Weil
Jean-Fran\c{c}ois Dufourd (LSIIT)
Discrete Jordan Curve Theorem: A proof formalized in Coq with hypermaps
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.LO cs.DM
null
This paper presents a formalized proof of a discrete form of the Jordan Curve Theorem. It is based on a hypermap model of planar subdivisions, formal specifications and proofs assisted by the Coq system. Fundamental properties are proven by structural or noetherian induction: Genus Theorem, Euler's Formula, constructive planarity criteria. A notion of ring of faces is inductively defined and a Jordan Curve Theorem is stated and proven for any planar hypermap.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:23:01 GMT" } ]
2008-02-21T00:00:00
[ [ "Dufourd", "Jean-François", "", "LSIIT" ] ]
[ { "class": "Computer Science", "code": "cs.LO", "description": "Covers all aspects of logic in computer science, including finite model theory, logics of programs, modal logic, and program verification. Programming language semantics should have Programming Languages as the primary subject area. Roughly includes material in ACM Subject Classes D.2.4, F.3.1, F.4.0, F.4.1, and F.4.2; some material in F.4.3 (formal languages) may also be appropriate here, although Computational Complexity is typically the more appropriate subject area.", "span": "(Logic in Computer Science)" }, { "class": "Computer Science", "code": "cs.DM", "description": "Covers combinatorics, graph theory, applications of probability. Roughly includes material in ACM Subject Classes G.2 and G.3.", "span": "(Discrete Mathematics)" } ]
0802.2854
Pascal Weil
Thomas Erlebach, Torben Hagerup, Klaus Jansen, Moritz Minzlaff, Alexander Wolff
Trimming of Graphs, with Application to Point Labeling
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DM cs.DS math.CO
null
For $t,g>0$, a vertex-weighted graph of total weight $W$ is $(t,g)$-trimmable if it contains a vertex-induced subgraph of total weight at least $(1-1/t)W$ and with no simple path of more than $g$ edges. A family of graphs is trimmable if for each constant $t>0$, there is a constant $g=g(t)$ such that every vertex-weighted graph in the family is $(t,g)$-trimmable. We show that every family of graphs of bounded domino treewidth is trimmable. This implies that every family of graphs of bounded degree is trimmable if the graphs in the family have bounded treewidth or are planar. Based on this result, we derive a polynomial-time approximation scheme for the problem of labeling weighted points with nonoverlapping sliding labels of unit height and given lengths so as to maximize the total weight of the labeled points. This settles one of the last major open questions in the theory of map labeling.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:23:38 GMT" } ]
2008-02-21T00:00:00
[ [ "Erlebach", "Thomas", "" ], [ "Hagerup", "Torben", "" ], [ "Jansen", "Klaus", "" ], [ "Minzlaff", "Moritz", "" ], [ "Wolff", "Alexander", "" ] ]
[ { "class": "Computer Science", "code": "cs.DM", "description": "Covers combinatorics, graph theory, applications of probability. Roughly includes material in ACM Subject Classes G.2 and G.3.", "span": "(Discrete Mathematics)" }, { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" } ]
0802.2855
Pascal Weil
Thomas Erlebach, Michael Hoffmann, Danny Krizanc, Mat\'us Mihal'\'ak, Rajeev Raman
Computing Minimum Spanning Trees with Uncertainty
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
We consider the minimum spanning tree problem in a setting where information about the edge weights of the given graph is uncertain. Initially, for each edge $e$ of the graph only a set $A_e$, called an uncertainty area, that contains the actual edge weight $w_e$ is known. The algorithm can `update' $e$ to obtain the edge weight $w_e \in A_e$. The task is to output the edge set of a minimum spanning tree after a minimum number of updates. An algorithm is $k$-update competitive if it makes at most $k$ times as many updates as the optimum. We present a 2-update competitive algorithm if all areas $A_e$ are open or trivial, which is the best possible among deterministic algorithms. The condition on the areas $A_e$ is to exclude degenerate inputs for which no constant update competitive algorithm can exist. Next, we consider a setting where the vertices of the graph correspond to points in Euclidean space and the weight of an edge is equal to the distance of its endpoints. The location of each point is initially given as an uncertainty area, and an update reveals the exact location of the point. We give a general relation between the edge uncertainty and the vertex uncertainty versions of a problem and use it to derive a 4-update competitive algorithm for the minimum spanning tree problem in the vertex uncertainty model. Again, we show that this is best possible among deterministic algorithms.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:24:10 GMT" } ]
2008-02-21T00:00:00
[ [ "Erlebach", "Thomas", "" ], [ "Hoffmann", "Michael", "" ], [ "Krizanc", "Danny", "" ], [ "Mihal'ák", "Matús", "" ], [ "Raman", "Rajeev", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2856
Pascal Weil
Javier Esparza, Stefan Kiefer, Michael Luttenberger
Convergence Thresholds of Newton's Method for Monotone Polynomial Equations
version 2 deposited February 29, after the end of the STACS conference. Two minor mistakes corrected
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS cs.IT cs.NA math.IT
null
Monotone systems of polynomial equations (MSPEs) are systems of fixed-point equations $X_1 = f_1(X_1, ..., X_n),$ $..., X_n = f_n(X_1, ..., X_n)$ where each $f_i$ is a polynomial with positive real coefficients. The question of computing the least non-negative solution of a given MSPE $\vec X = \vec f(\vec X)$ arises naturally in the analysis of stochastic models such as stochastic context-free grammars, probabilistic pushdown automata, and back-button processes. Etessami and Yannakakis have recently adapted Newton's iterative method to MSPEs. In a previous paper we have proved the existence of a threshold $k_{\vec f}$ for strongly connected MSPEs, such that after $k_{\vec f}$ iterations of Newton's method each new iteration computes at least 1 new bit of the solution. However, the proof was purely existential. In this paper we give an upper bound for $k_{\vec f}$ as a function of the minimal component of the least fixed-point $\mu\vec f$ of $\vec f(\vec X)$. Using this result we show that $k_{\vec f}$ is at most single exponential resp. linear for strongly connected MSPEs derived from probabilistic pushdown automata resp. from back-button processes. Further, we prove the existence of a threshold for arbitrary MSPEs after which each new iteration computes at least $1/w2^h$ new bits of the solution, where $w$ and $h$ are the width and height of the DAG of strongly connected components.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:24:39 GMT" }, { "version": "v2", "created": "Fri, 29 Feb 2008 07:31:48 GMT" } ]
2008-02-29T00:00:00
[ [ "Esparza", "Javier", "" ], [ "Kiefer", "Stefan", "" ], [ "Luttenberger", "Michael", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" }, { "class": "Computer Science", "code": "cs.IT", "description": "Covers theoretical and experimental aspects of information theory and coding. Includes material in ACM Subject Class E.4 and intersects with H.1.1.", "span": "(Information Theory)" }, { "class": "Computer Science", "code": "cs.NA", "description": "cs.NA is an alias for math.NA. Roughly includes material in ACM Subject Class G.1.", "span": "(Numerical Analysis)" }, { "class": "Mathematics", "code": "math.IT", "description": "math.IT is an alias for cs.IT. Covers theoretical and experimental aspects of information theory and coding.", "span": "(Information Theory)" } ]
0802.2857
Pascal Weil
Shachar Lovett
Lower bounds for adaptive linearity tests
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC cs.DS
null
Linearity tests are randomized algorithms which have oracle access to the truth table of some function f, and are supposed to distinguish between linear functions and functions which are far from linear. Linearity tests were first introduced by (Blum, Luby and Rubenfeld, 1993), and were later used in the PCP theorem, among other applications. The quality of a linearity test is described by its correctness c - the probability it accepts linear functions, its soundness s - the probability it accepts functions far from linear, and its query complexity q - the number of queries it makes. Linearity tests were studied in order to decrease the soundness of linearity tests, while keeping the query complexity small (for one reason, to improve PCP constructions). Samorodnitsky and Trevisan (Samorodnitsky and Trevisan 2000) constructed the Complete Graph Test, and prove that no Hyper Graph Test can perform better than the Complete Graph Test. Later in (Samorodnitsky and Trevisan 2006) they prove, among other results, that no non-adaptive linearity test can perform better than the Complete Graph Test. Their proof uses the algebraic machinery of the Gowers Norm. A result by (Ben-Sasson, Harsha and Raskhodnikova 2005) allows to generalize this lower bound also to adaptive linearity tests. We also prove the same optimal lower bound for adaptive linearity test, but our proof technique is arguably simpler and more direct than the one used in (Samorodnitsky and Trevisan 2006). We also study, like (Samorodnitsky and Trevisan 2006), the behavior of linearity tests on quadratic functions. However, instead of analyzing the Gowers Norm of certain functions, we provide a more direct combinatorial proof, studying the behavior of linearity tests on random quadratic functions...
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:26:40 GMT" } ]
2008-02-21T00:00:00
[ [ "Lovett", "Shachar", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" }, { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2860
Pascal Weil
Angsheng Li, Mingji Xia
A Theory for Valiant's Matchcircuits (Extended Abstract)
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC
null
The computational function of a matchgate is represented by its character matrix. In this article, we show that all nonsingular character matrices are closed under matrix inverse operation, so that for every $k$, the nonsingular character matrices of $k$-bit matchgates form a group, extending the recent work of Cai and Choudhary (2006) of the same result for the case of $k=2$, and that the single and the two-bit matchgates are universal for matchcircuits, answering a question of Valiant (2002).
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:31:38 GMT" } ]
2008-02-21T00:00:00
[ [ "Li", "Angsheng", "" ], [ "Xia", "Mingji", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" } ]
0802.2861
Pascal Weil
S\"oren Laue
Geometric Set Cover and Hitting Sets for Polytopes in $R^3$
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CG
null
Suppose we are given a finite set of points $P$ in $\R^3$ and a collection of polytopes $\mathcal{T}$ that are all translates of the same polytope $T$. We consider two problems in this paper. The first is the set cover problem where we want to select a minimal number of polytopes from the collection $\mathcal{T}$ such that their union covers all input points $P$. The second problem that we consider is finding a hitting set for the set of polytopes $\mathcal{T}$, that is, we want to select a minimal number of points from the input points $P$ such that every given polytope is hit by at least one point. We give the first constant-factor approximation algorithms for both problems. We achieve this by providing an epsilon-net for translates of a polytope in $R^3$ of size $\bigO(\frac{1{\epsilon)$.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:32:26 GMT" } ]
2008-02-21T00:00:00
[ [ "Laue", "Sören", "" ] ]
[ { "class": "Computer Science", "code": "cs.CG", "description": "Roughly includes material in ACM Subject Classes I.3.5 and F.2.2.", "span": "(Computational Geometry)" } ]
0802.2862
Pascal Weil
Dietrich Kuske
Compatibility of Shelah and Stupp's and Muchnik's iteration with fragments of monadic second order logic
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.LO
null
We investigate the relation between the theory of the iterations in the sense of Shelah-Stupp and of Muchnik, resp., and the theory of the base structure for several logics. These logics are obtained from the restriction of set quantification in monadic second order logic to certain subsets like, e.g., finite sets, chains, and finite unions of chains. We show that these theories of the Shelah-Stupp iteration can be reduced to corresponding theories of the base structure. This fails for Muchnik's iteration.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:33:04 GMT" } ]
2008-02-21T00:00:00
[ [ "Kuske", "Dietrich", "" ] ]
[ { "class": "Computer Science", "code": "cs.LO", "description": "Covers all aspects of logic in computer science, including finite model theory, logics of programs, modal logic, and program verification. Programming language semantics should have Programming Languages as the primary subject area. Roughly includes material in ACM Subject Classes D.2.4, F.3.1, F.4.0, F.4.1, and F.4.2; some material in F.4.3 (formal languages) may also be appropriate here, although Computational Complexity is typically the more appropriate subject area.", "span": "(Logic in Computer Science)" } ]
0802.2863
Pascal Weil
Arist Kojevnikov, Sergey I. Nikolenko
New Combinatorial Complete One-Way Functions
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC cs.CR
null
In 2003, Leonid A. Levin presented the idea of a combinatorial complete one-way function and a sketch of the proof that Tiling represents such a function. In this paper, we present two new one-way functions based on semi-Thue string rewriting systems and a version of the Post Correspondence Problem and prove their completeness. Besides, we present an alternative proof of Levin's result. We also discuss the properties a combinatorial problem should have in order to hold a complete one-way function.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:33:39 GMT" } ]
2008-02-21T00:00:00
[ [ "Kojevnikov", "Arist", "" ], [ "Nikolenko", "Sergey I.", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" }, { "class": "Computer Science", "code": "cs.CR", "description": "Covers all areas of cryptography and security including authentication, public key cryptosytems, proof-carrying code, etc. Roughly includes material in ACM Subject Classes D.4.6 and E.3.", "span": "(Cryptography and Security)" } ]
0802.2864
Pascal Weil
Iyad A. Kanj, Ljubomir Perkovic
On Geometric Spanners of Euclidean and Unit Disk Graphs
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
We consider the problem of constructing bounded-degree planar geometric spanners of Euclidean and unit-disk graphs. It is well known that the Delaunay subgraph is a planar geometric spanner with stretch factor $C_{del\approx 2.42$; however, its degree may not be bounded. Our first result is a very simple linear time algorithm for constructing a subgraph of the Delaunay graph with stretch factor $\rho =1+2\pi(k\cos{\frac{\pi{k)^{-1$ and degree bounded by $k$, for any integer parameter $k\geq 14$. This result immediately implies an algorithm for constructing a planar geometric spanner of a Euclidean graph with stretch factor $\rho \cdot C_{del$ and degree bounded by $k$, for any integer parameter $k\geq 14$. Moreover, the resulting spanner contains a Euclidean Minimum Spanning Tree (EMST) as a subgraph. Our second contribution lies in developing the structural results necessary to transfer our analysis and algorithm from Euclidean graphs to unit disk graphs, the usual model for wireless ad-hoc networks. We obtain a very simple distributed, {\em strictly-localized algorithm that, given a unit disk graph embedded in the plane, constructs a geometric spanner with the above stretch factor and degree bound, and also containing an EMST as a subgraph. The obtained results dramatically improve the previous results in all aspects, as shown in the paper.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:36:52 GMT" } ]
2008-02-21T00:00:00
[ [ "Kanj", "Iyad A.", "" ], [ "Perkovic", "Ljubomir", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2865
Pascal Weil
Chao Chen, Daniel Freedman
Quantifying Homology Classes
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CG cs.DM
null
We develop a method for measuring homology classes. This involves three problems. First, we define the size of a homology class, using ideas from relative homology. Second, we define an optimal basis of a homology group to be the basis whose elements' size have the minimal sum. We provide a greedy algorithm to compute the optimal basis and measure classes in it. The algorithm runs in $O(\beta^4 n^3 \log^2 n)$ time, where $n$ is the size of the simplicial complex and $\beta$ is the Betti number of the homology group. Third, we discuss different ways of localizing homology classes and prove some hardness results.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:37:07 GMT" } ]
2008-02-21T00:00:00
[ [ "Chen", "Chao", "" ], [ "Freedman", "Daniel", "" ] ]
[ { "class": "Computer Science", "code": "cs.CG", "description": "Roughly includes material in ACM Subject Classes I.3.5 and F.2.2.", "span": "(Computational Geometry)" }, { "class": "Computer Science", "code": "cs.DM", "description": "Covers combinatorics, graph theory, applications of probability. Roughly includes material in ACM Subject Classes G.2 and G.3.", "span": "(Discrete Mathematics)" } ]
0802.2866
Pascal Weil
Lukasz Kaiser, Sasha Rubin, Vince B\'ar\'any
Cardinality and counting quantifiers on omega-automatic structures
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.LO
null
We investigate structures that can be represented by omega-automata, so called omega-automatic structures, and prove that relations defined over such structures in first-order logic expanded by the first-order quantifiers `there exist at most $\aleph_0$ many', 'there exist finitely many' and 'there exist $k$ modulo $m$ many' are omega-regular. The proof identifies certain algebraic properties of omega-semigroups. As a consequence an omega-regular equivalence relation of countable index has an omega-regular set of representatives. This implies Blumensath's conjecture that a countable structure with an $\omega$-automatic presentation can be represented using automata on finite words. This also complements a very recent result of Hj\"orth, Khoussainov, Montalban and Nies showing that there is an omega-automatic structure which has no injective presentation.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:37:32 GMT" } ]
2008-02-21T00:00:00
[ [ "Kaiser", "Lukasz", "" ], [ "Rubin", "Sasha", "" ], [ "Bárány", "Vince", "" ] ]
[ { "class": "Computer Science", "code": "cs.LO", "description": "Covers all aspects of logic in computer science, including finite model theory, logics of programs, modal logic, and program verification. Programming language semantics should have Programming Languages as the primary subject area. Roughly includes material in ACM Subject Classes D.2.4, F.3.1, F.4.0, F.4.1, and F.4.2; some material in F.4.3 (formal languages) may also be appropriate here, although Computational Complexity is typically the more appropriate subject area.", "span": "(Logic in Computer Science)" } ]
0802.2867
Pascal Weil
Viet Tung Hoang, Wing-Kin Sung
Fixed Parameter Polynomial Time Algorithms for Maximum Agreement and Compatible Supertrees
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.DS
null
Consider a set of labels $L$ and a set of trees ${\mathcal T} = \{{\mathcal T}^{(1), {\mathcal T}^{(2), ..., {\mathcal T}^{(k) \$ where each tree ${\mathcal T}^{(i)$ is distinctly leaf-labeled by some subset of $L$. One fundamental problem is to find the biggest tree (denoted as supertree) to represent $\mathcal T}$ which minimizes the disagreements with the trees in ${\mathcal T}$ under certain criteria. This problem finds applications in phylogenetics, database, and data mining. In this paper, we focus on two particular supertree problems, namely, the maximum agreement supertree problem (MASP) and the maximum compatible supertree problem (MCSP). These two problems are known to be NP-hard for $k \geq 3$. This paper gives the first polynomial time algorithms for both MASP and MCSP when both $k$ and the maximum degree $D$ of the trees are constant.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:38:47 GMT" } ]
2008-02-21T00:00:00
[ [ "Hoang", "Viet Tung", "" ], [ "Sung", "Wing-Kin", "" ] ]
[ { "class": "Computer Science", "code": "cs.DS", "description": "Covers data structures and analysis of algorithms. Roughly includes material in ACM Subject Classes E.1, E.2, F.2.1, and F.2.2.", "span": "(Data Structures and Algorithms)" } ]
0802.2868
Pascal Weil
Christian Glasser, Heinz Schmitz, Victor Selivanov
Efficient Algorithms for Membership in Boolean Hierarchies of Regular Languages
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC
null
The purpose of this paper is to provide efficient algorithms that decide membership for classes of several Boolean hierarchies for which efficiency (or even decidability) were previously not known. We develop new forbidden-chain characterizations for the single levels of these hierarchies and obtain the following results: - The classes of the Boolean hierarchy over level $\Sigma_1$ of the dot-depth hierarchy are decidable in $NL$ (previously only the decidability was known). The same remains true if predicates mod $d$ for fixed $d$ are allowed. - If modular predicates for arbitrary $d$ are allowed, then the classes of the Boolean hierarchy over level $\Sigma_1$ are decidable. - For the restricted case of a two-letter alphabet, the classes of the Boolean hierarchy over level $\Sigma_2$ of the Straubing-Th\'erien hierarchy are decidable in $NL$. This is the first decidability result for this hierarchy. - The membership problems for all mentioned Boolean-hierarchy classes are logspace many-one hard for $NL$. - The membership problems for quasi-aperiodic languages and for $d$-quasi-aperiodic languages are logspace many-one complete for $PSPACE$.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:40:02 GMT" } ]
2008-02-21T00:00:00
[ [ "Glasser", "Christian", "" ], [ "Schmitz", "Heinz", "" ], [ "Selivanov", "Victor", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" } ]
0802.2869
Pascal Weil
Wouter Gelade, Frank Neven
Succinctness of the Complement and Intersection of Regular Expressions
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.CC
null
We study the succinctness of the complement and intersection of regular expressions. In particular, we show that when constructing a regular expression defining the complement of a given regular expression, a double exponential size increase cannot be avoided. Similarly, when constructing a regular expression defining the intersection of a fixed and an arbitrary number of regular expressions, an exponential and double exponential size increase, respectively, can in worst-case not be avoided. All mentioned lower bounds improve the existing ones by one exponential and are tight in the sense that the target expression can be constructed in the corresponding time class, i.e., exponential or double exponential time. As a by-product, we generalize a theorem by Ehrenfeucht and Zeiger stating that there is a class of DFAs which are exponentially more succinct than regular expressions, to a fixed four-letter alphabet. When the given regular expressions are one-unambiguous, as for instance required by the XML Schema specification, the complement can be computed in polynomial time whereas the bounds concerning intersection continue to hold. For the subclass of single-occurrence regular expressions, we prove a tight exponential lower bound for intersection.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:40:53 GMT" } ]
2008-02-21T00:00:00
[ [ "Gelade", "Wouter", "" ], [ "Neven", "Frank", "" ] ]
[ { "class": "Computer Science", "code": "cs.CC", "description": "Covers models of computation, complexity classes, structural complexity, complexity tradeoffs, upper and lower bounds. Roughly includes material in ACM Subject Classes F.1 (computation by abstract devices), F.2.3 (tradeoffs among complexity measures), and F.4.3 (formal languages), although some material in formal languages may be more appropriate for Logic in Computer Science. Some material in F.2.1 and F.2.2, may also be appropriate here, but is more likely to have Data Structures and Algorithms as the primary subject area.", "span": "(Computational Complexity)" } ]
0802.2871
Pascal Weil
Diana Fischer, Erich Gr\"adel, Lukasz Kaiser
Model Checking Games for the Quantitative mu-Calculus
null
Dans Proceedings of the 25th Annual Symposium on the Theoretical Aspects of Computer Science - STACS 2008, Bordeaux : France (2008)
null
null
cs.LO cs.GT
null
We investigate quantitative extensions of modal logic and the modal mu-calculus, and study the question whether the tight connection between logic and games can be lifted from the qualitative logics to their quantitative counterparts. It turns out that, if the quantitative mu-calculus is defined in an appropriate way respecting the duality properties between the logical operators, then its model checking problem can indeed be characterised by a quantitative variant of parity games. However, these quantitative games have quite different properties than their classical counterparts, in particular they are, in general, not positionally determined. The correspondence between the logic and the games goes both ways: the value of a formula on a quantitative transition system coincides with the value of the associated quantitative game, and conversely, the values of quantitative parity games are definable in the quantitative mu-calculus.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 14:57:24 GMT" } ]
2008-02-21T00:00:00
[ [ "Fischer", "Diana", "" ], [ "Grädel", "Erich", "" ], [ "Kaiser", "Lukasz", "" ] ]
[ { "class": "Computer Science", "code": "cs.LO", "description": "Covers all aspects of logic in computer science, including finite model theory, logics of programs, modal logic, and program verification. Programming language semantics should have Programming Languages as the primary subject area. Roughly includes material in ACM Subject Classes D.2.4, F.3.1, F.4.0, F.4.1, and F.4.2; some material in F.4.3 (formal languages) may also be appropriate here, although Computational Complexity is typically the more appropriate subject area.", "span": "(Logic in Computer Science)" }, { "class": "Computer Science", "code": "cs.GT", "description": "Covers all theoretical and applied aspects at the intersection of computer science and game theory, including work in mechanism design, learning in games (which may overlap with Learning), foundations of agent modeling in games (which may overlap with Multiagent systems), coordination, specification and formal methods for non-cooperative computational environments. The area also deals with applications of game theory to areas such as electronic commerce.", "span": "(Computer Science and Game Theory)" } ]
0802.2932
Grenville Croll
Brian Sentence
A New Approach to Spreadsheet Analytics Management in Financial Markets
9 Pages, 9 Colour Figures
Proc. European Spreadsheet Risks Int. Grp. (EuSpRIG) 2006 65-72 ISBN:1-905617-08-9
null
null
cs.SE cs.CY
http://arxiv.org/licenses/nonexclusive-distrib/1.0/
Spreadsheets in financial markets are frequently used as database, calculator and reporting application combined. This paper describes an alternative approach in which spreadsheet design and database technology have been brought together in order to alleviate management and regulatory concerns over the operational risks of spreadsheet usage. In particular, the paper focuses on the rapid creation and centralised deployment of statistical analytics within a software system now in use by major investment banks, and presents a novel technique for the manipulation in spreadsheets of high volumes of intraday market data.
[ { "version": "v1", "created": "Wed, 20 Feb 2008 20:17:52 GMT" } ]
2008-03-10T00:00:00
[ [ "Sentence", "Brian", "" ] ]
[ { "class": "Computer Science", "code": "cs.SE", "description": "Covers design tools, software metrics, testing and debugging, programming environments, etc. Roughly includes material in all of ACM Subject Classes D.2, except that D.2.4 (program verification) should probably have Logics in Computer Science as the primary subject area.", "span": "(Software Engineering)" }, { "class": "Computer Science", "code": "cs.CY", "description": "Covers impact of computers on society, computer ethics, information technology and public policy, legal aspects of computing, computers and education. Roughly includes material in ACM Subject Classes K.0, K.2, K.3, K.4, K.5, and K.7.", "span": "(Computers and Society)" } ]
0802.2975
Daeyoung Park
Daeyoung Park and Giuseppe Caire
Hard Fairness Versus Proportional Fairness in Wireless Communications: The Multiple-Cell Case
26 pages, 8 figures, submitted to IEEE Transactions on Communications
null
null
null
cs.IT math.IT
http://arxiv.org/licenses/nonexclusive-distrib/1.0/
We consider the uplink of a cellular communication system with $K$ users per cell and infinite base stations equally spaced on a line. The system is conventional, i.e., it does not make use of joint cell-site processing. A hard fairness (HF) system serves all users with the same rate in any channel state. In contrast, a system based on proportional fairness serves the users with variable instantaneous rates depending on their channel state. We compare these two options in terms of the system spectral efficiency \textsf{C} (bit/s/Hz) versus $E_b/N_0$. Proportional fair scheduling (PFS) performs generally better than the more restrictive HF system in the regime of low to moderate SNR, but for high SNR an optimized HF system achieves throughput comparable to that of PFS system for finite $K$. The hard-fairness system is interference limited. We characterize this limit and validate a commonly used simplified model that treats outer cell interference power as proportional to the in-cell total power and we analytically characterize the proportionality constant. In contrast, the spectral efficiency of PFS can grow unbounded for $K \to \infty$ thanks to the multiuser diversity effect. We also show that partial frequency/time reuse can mitigate the throughput penalty of the HF system, especially at high SNR.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 04:26:44 GMT" } ]
2008-02-22T00:00:00
[ [ "Park", "Daeyoung", "" ], [ "Caire", "Giuseppe", "" ] ]
[ { "class": "Computer Science", "code": "cs.IT", "description": "Covers theoretical and experimental aspects of information theory and coding. Includes material in ACM Subject Class E.4 and intersects with H.1.1.", "span": "(Information Theory)" }, { "class": "Mathematics", "code": "math.IT", "description": "math.IT is an alias for cs.IT. Covers theoretical and experimental aspects of information theory and coding.", "span": "(Information Theory)" } ]
0802.2980
Ewa Krot-Sieniawska
Ewa Krot-Sieniawska
Characterization of Cobweb Posets as KoDAGs
6 pages, 1 figure
null
null
null
math.CO cs.DM
http://arxiv.org/licenses/nonexclusive-distrib/1.0/
The characterization of the large family of cobweb posets as DAGs and oDAGs is given. The dim 2 poset such that its Hasse diagram coincide with digraf of arbitrary cobweb poset is constructed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 05:32:10 GMT" } ]
2008-02-23T00:00:00
[ [ "Krot-Sieniawska", "Ewa", "" ] ]
[ { "class": "Mathematics", "code": "math.CO", "description": "Discrete mathematics, graph theory, enumeration, combinatorial optimization, Ramsey theory, combinatorial game theory", "span": "(Combinatorics)" }, { "class": "Computer Science", "code": "cs.DM", "description": "Covers combinatorics, graph theory, applications of probability. Roughly includes material in ACM Subject Classes G.2 and G.3.", "span": "(Discrete Mathematics)" } ]
0802.3013
Denys Dutykh Mr.
Frederic Dias (1), Denys Dutykh (1), Jean-Michel Ghidaglia (1) ((1) CMLA, ENS de Cachan)
Simulation of Free Surface Compressible Flows Via a Two Fluid Model
8 pages, 10 figures; OMAE2008, 27th International Conference on Offshore Mechanics and Arctic Engineering. Other authors papers and animations related to this work can be downloaded from: http://www.cmla.ens-cachan.fr/fileadmin/Membres/dutykh/ The paper was slightly modified according to referees comments
OMAE2008-57060, pp. 43-50; 8 pages
10.1115/OMAE2008-57060
null
physics.comp-ph cs.NA math.NA physics.ao-ph physics.flu-dyn
http://arxiv.org/licenses/nonexclusive-distrib/1.0/
The purpose of this communication is to discuss the simulation of a free surface compressible flow between two fluids, typically air and water. We use a two fluid model with the same velocity, pressure and temperature for both phases. In such a numerical model, the free surface becomes a thin three dimensional zone. The present method has at least three advantages: (i) the free-surface treatment is completely implicit; (ii) it can naturally handle wave breaking and other topological changes in the flow; (iii) one can easily vary the Equation of States (EOS) of each fluid (in principle, one can even consider tabulated EOS). Moreover, our model is unconditionally hyperbolic for reasonable EOS.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 10:44:49 GMT" }, { "version": "v2", "created": "Fri, 14 Mar 2008 10:03:43 GMT" } ]
2020-02-20T00:00:00
[ [ "Dias", "Frederic", "" ], [ "Dutykh", "Denys", "" ], [ "Ghidaglia", "Jean-Michel", "" ] ]
[ { "class": "Physics", "code": "physics.comp-ph", "description": "All aspects of computational science applied to physics.", "span": "(Computational Physics)" }, { "class": "Computer Science", "code": "cs.NA", "description": "cs.NA is an alias for math.NA. Roughly includes material in ACM Subject Class G.1.", "span": "(Numerical Analysis)" }, { "class": "Mathematics", "code": "math.NA", "description": "Numerical algorithms for problems in analysis and algebra, scientific computation", "span": "(Numerical Analysis)" }, { "class": "Physics", "code": "physics.ao-ph", "description": "Atmospheric and oceanic physics and physical chemistry, biogeophysics, and climate science", "span": "(Atmospheric and Oceanic Physics)" }, { "class": "Physics", "code": "physics.flu-dyn", "description": "Turbulence, instabilities, incompressible/compressible flows, reacting flows. Aero/hydrodynamics, fluid-structure interactions, acoustics. Biological fluid dynamics, micro/nanofluidics, interfacial phenomena. Complex fluids, suspensions and granular flows, porous media flows. Geophysical flows, thermoconvective and stratified flows. Mathematical and computational methods for fluid dynamics, fluid flow models, experimental techniques.", "span": "(Fluid Dynamics)" } ]
0802.3037
EDA Publishing Association
Hsiharng Yang, Chung-Yao Yang, Mau-Shiun Yeh
Fabrication of Miniaturized Variable-focus Lens Using Liquid Filling Technique
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper describes a simple method for fabricating a variable-focus lens by using PDMS (polydimethylsiloxane) and filling with liquid for the variable-focus lens. The lens diameter of 2-mm was designed in this experiment and expected to reach the focal length in the range of 3 ~ 12 mm. The theoretical value between the liquid volume and the lens contact angle at different focal lengths were simulated and measured. The pumped-in volumes ranged from 200 to 1400 $\mu$l, the contact angles ranged from 14.25 degrees to 49.02 degrees. Changing the deformation of PDMS film using different micro-fluidic volume produces the variable focal length from 4 10 mm in this experiment. The proposed method successfully fabricated a variable-focus lens. Bonding PDMS only once using no expensive instrument such as oxygen plasma was accomplished. The final objective is to insert the variable focus lens into portable optical imagery products.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:09:29 GMT" } ]
2008-02-22T00:00:00
[ [ "Yang", "Hsiharng", "" ], [ "Yang", "Chung-Yao", "" ], [ "Yeh", "Mau-Shiun", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3038
EDA Publishing Association
Fei Duan, Jiwei Jiao, Yucai Wang, Ying Zhang, Binwei Mi, Jinpeng Li, Jian Zhu, Yuelin Wang
A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A novel x-axis tuning fork MEMS gyroscope with "8 vertical springs-proofmass" structure for Coriolis effect detection is presented. Compared with the common single-plane springs, the 8 vertical springs, symmetrically located at the top and bottom sides, more stably suspend the large thick proofmass featuring large capacitance variation and low mechanical noise. A bulk-micromachining technology is applied to obtain the large proofmass and twins-like dual beams. During the fabrication process, the dimensions of the 8 vertical springs are precisely confined by thermal oxide protected limit trenches (LTs) sidewalls and the extreme slowly etched (111)-planes; therefore a small mismatch of less than 30 Hz is achieved before tuning. Initial test shows a sensitivity of 0.15mV/(deg/s) and rate resolution around 0.1deg/s under atmosphere pressure.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:10:45 GMT" } ]
2008-02-22T00:00:00
[ [ "Duan", "Fei", "" ], [ "Jiao", "Jiwei", "" ], [ "Wang", "Yucai", "" ], [ "Zhang", "Ying", "" ], [ "Mi", "Binwei", "" ], [ "Li", "Jinpeng", "" ], [ "Zhu", "Jian", "" ], [ "Wang", "Yuelin", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3040
EDA Publishing Association
D. Grogg, Nicoleta Diana Badila-Ciressan, Adrian Mihai Ionescu
Fabrication of MEMS Resonators in Thin SOI
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as resonator substrates for future co-integration with CMOS circuitry on a single chip. As the transduction capacitance scales with the resonator thickness, it is important to fabricate deep sub-micron trenches in order to achieve a good capacitive coupling. Through the combination of conventional UV-lithography and focused ion beam (FIB) milling the process needs only two lithography steps, enabling therefore a way for fast prototyping of MEM-resonators. Different FIB parameters and etching parameters are compared in this paper and their effect on the process are reported.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:12:11 GMT" } ]
2008-02-22T00:00:00
[ [ "Grogg", "D.", "" ], [ "Badila-Ciressan", "Nicoleta Diana", "" ], [ "Ionescu", "Adrian Mihai", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3041
EDA Publishing Association
Veronika Tim\'ar-Horv\'ath, L\'aszl\'o Juh\'asz, Andr\'as Vass-V\'arnai, Gergely Perlaky
Usage of Porous Al2O3 Layers for RH Sensing
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric property changes of thin films upon water vapour uptake which depends on the surrounding media's relative humidity content. Because of the immense surface-to-volume ratio and the abundant void fraction, very high sensitivities can be obtained with porous ceramics. One of the ceramics to be used is porous Al2O3, obtained by electrochemical oxidation of aluminium under anodic bias. The average pore sizes are between 6...9 nm. In our paper we intend to demonstrate images representing the influence of the technological parameters on the porous structure and the device sensitivity.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:12:21 GMT" } ]
2008-02-22T00:00:00
[ [ "Timár-Horváth", "Veronika", "" ], [ "Juhász", "László", "" ], [ "Vass-Várnai", "András", "" ], [ "Perlaky", "Gergely", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3042
EDA Publishing Association
M. Worgull, K.K. Kabanemi, J.-P. Marcotte, J.-F. H\'etu, M. Heckele
Modeling of large area hot embossing
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Today, hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated so far using the processes. However, with increasing requirements regarding the embossing surface and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by a process simulation and experimentally. The present publication shall report about the first results of the simulation - the modeling and simulation of large area replication based on an eight inch microstructured mold.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:12:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Worgull", "M.", "" ], [ "Kabanemi", "K. K.", "" ], [ "Marcotte", "J. -P.", "" ], [ "Hétu", "J. -F.", "" ], [ "Heckele", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3043
EDA Publishing Association
Jyh-Cheng Yu, Huang-Yao Lin
Liquid Density Sensing Using Resonant Flexural Plate Wave Device with Sol-Gel PZT Thin Films
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents the design, fabrication and preliminary experimental results of a flexure plate wave (FPW) resonator using sol-gel derived lead zirconate titanates (PZT) thin films. The resonator adopts a two-port structure with reflecting grates on the composite membrane of PZT and SiNx. The design of the reflecting grate is derived from a SAW resonator model using COM theory to produce a sharp resonant peak. The comparison between the mass and the viscosity effects from the theoretical expression illustrates the applications and the constraints of the proposed device in liquid sensing. Multiple coatings of sol-gel derived PZT films are adopted because of the cost advantage and the high electromechanical coupling effect over other piezoelectric films. The fabrication issues of the proposed material structure are addressed. Theoretical estimations of the mass and the viscosity effects are compared with the experimental results. The resonant frequency has a good linear correlation with the density of low viscosity liquids, which demonstrate the feasibility of the proposed device.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:13:48 GMT" } ]
2008-02-22T00:00:00
[ [ "Yu", "Jyh-Cheng", "" ], [ "Lin", "Huang-Yao", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3044
EDA Publishing Association
M. Marzencki (TIMA), Y. Ammar (TIMA), S. Basrour (TIMA)
Design, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz. This component is made with Aluminum Nitride thin film deposited with a CMOS compatible process. Moreover we analyze two possible solutions for the signal rectification: a discrete doubler-rectifier and a full custom power management circuit. The ASIC developed for this application takes advantage of diodes with very low threshold voltage and therefore allows the conversion of extremely low input voltages corresponding to very weak input accelerations. The volume of the proposed generator is inferior to 1mm3 and the generated powers are in the range of 1$\mu$W. This system is intended to supply power to autonomous wireless sensor nodes.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:15:54 GMT" } ]
2008-02-22T00:00:00
[ [ "Marzencki", "M.", "", "TIMA" ], [ "Ammar", "Y.", "", "TIMA" ], [ "Basrour", "S.", "", "TIMA" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3046
EDA Publishing Association
C. Jean-Mistral (LETI), S. Basrour (TIMA), J.J. Chaillout (LETI), A. Bonvilain (TIMA)
A complete study of electroactive polymers for energy scavenging: modelling and experiments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Recent progresses in ultra low power microelectronics propelled the development of several microsensors and particularly the self powered microsystems (SPMS). One of their limitations is their size and their autonomy due to short lifetime of the batteries available on the market. To ensure their ecological energetic autonomy, a promising alternative is to scavenge the ambient energy such as the mechanical one. Nowadays, few microgenerators operate at low frequency. They are often rigid structures that can perturb the application or the environment; none of them are perfectly flexible. Thus, our objective is to create a flexible, non-intrusive scavenger using electroactive polymers. The goal of this work is to design a generator which can provide typically 100 ?W to supply a low consumption system. We report in this paper an analytical model which predicts the energy produced by a simple electroactive membrane, and some promising experimental results.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:16:52 GMT" } ]
2008-02-22T00:00:00
[ [ "Jean-Mistral", "C.", "", "LETI" ], [ "Basrour", "S.", "", "TIMA" ], [ "Chaillout", "J. J.", "", "LETI" ], [ "Bonvilain", "A.", "", "TIMA" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3047
EDA Publishing Association
C. Saha, T. O'Donnell, J. Godsell, L. Carlioz, N. Wang, P. Mccloskey, S. Beeby, J. Tudor, Russel Torah
Step-up converter for electromagnetic vibrational energy scavenger
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper introduces a voltage multiplier (VM) circuit which can step up a minimum voltage of 150 mV (peak). The operation and characteristics of this converter circuit are described. The voltage multiplier circuit is also tested with micro and macro scale electromagnetic vibrational generators and the effect of the VM on the optimum load conditions of the electromagnetic generator is presented. The measured results show that 85% efficiency can be achieved from this VM circuit at a power level of 18 ?W.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:16:59 GMT" } ]
2008-02-22T00:00:00
[ [ "Saha", "C.", "" ], [ "O'Donnell", "T.", "" ], [ "Godsell", "J.", "" ], [ "Carlioz", "L.", "" ], [ "Wang", "N.", "" ], [ "Mccloskey", "P.", "" ], [ "Beeby", "S.", "" ], [ "Tudor", "J.", "" ], [ "Torah", "Russel", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3048
EDA Publishing Association
G. Qiufen, G. Yuansheng, S. Feng, L. Fuqiang
Gas Damping Coefficient Research for MEMS Comb Linear Vibration Gyroscope
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Silicon-MEMS gyroscope is an important part of MEMS (Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these disturb, the air pressure largely influences the performance of MEMS gyroscope. Different air pressure causes different gas damping coefficient for the MEMS comb linear vibration gyroscope and different gas damping coefficient influences the quality factor of the gyroscope directive. The quality factor influences the dynamic working bandwidth of the MEMS comb linear vibration gyroscope, so it is influences the output characteristic of the MEMS comb linear vibration gyroscope. The paper shows the relationship between the air pressure and the output amplified and phase of the detecting axis through analyzing the air pressure influence on the MEMS comb linear vibration gyroscope. It discusses the influence on the frequency distribute and quality factor of the MEMS comb linear vibration gyroscope for different air pressure.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:17:28 GMT" } ]
2008-02-22T00:00:00
[ [ "Qiufen", "G.", "" ], [ "Yuansheng", "G.", "" ], [ "Feng", "S.", "" ], [ "Fuqiang", "L.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3049
EDA Publishing Association
G. Nagy, Z. Szucs, S. Hodossy, M. Rencz, A. Poppe
Comparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humidity-dependent monolithic capacitor developed at Budapest University of Technology and Economics. The second case presents the possible read-out solutions for a SOI-MEMS accelerometer. Both of the architectures were built and tested in a discrete implementation to qualify the methods before the integrated realization. The paper presents a detailed comparison of the two methods
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:18:05 GMT" } ]
2008-02-22T00:00:00
[ [ "Nagy", "G.", "" ], [ "Szucs", "Z.", "" ], [ "Hodossy", "S.", "" ], [ "Rencz", "M.", "" ], [ "Poppe", "A.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3050
EDA Publishing Association
J.-C. Crebier (G2ELab), Y. Lembeye (G2ELab), H. Raisigel (G2ELab), O. Deleage (G2ELab), J. Delamare (G2ELab), O. Cugat (G2ELab)
High Efficiency 3-Phase Cmos Rectifier with Step Up and Regulated
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents several design issues related to the monolithic integration of a 3-phase AC to DC low voltage, low power rectifier for 3-phase micro source electrical conditioning. Reduced input voltage operation (down to 1V), high efficiency, and output voltage regulations are implemented, based on commercially available CMOS technology. Global design and system issues are detailed. The management of start-up sequences under self supplied conditions as well as output voltage regulations are specifically addressed. Simulation results, practical implementation and validation are presented. They are based on the association of three micro elements : a 3-phase micro-generator, a stand alone 3-phase AC to DC integrated rectifier, and an output voltage conditioner based on a commercially available IC.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:18:23 GMT" } ]
2008-02-22T00:00:00
[ [ "Crebier", "J. -C.", "", "G2ELab" ], [ "Lembeye", "Y.", "", "G2ELab" ], [ "Raisigel", "H.", "", "G2ELab" ], [ "Deleage", "O.", "", "G2ELab" ], [ "Delamare", "J.", "", "G2ELab" ], [ "Cugat", "O.", "", "G2ELab" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3051
EDA Publishing Association
C. Durand (ST-Crolles, Leti, Iemn), F. Casset (LETI), P. Ancey (ST-Crolles), F. Judong (ST-Crolles), A. Talbot (ST-Crolles), R. Quenouillere (LETI), D. Renaud (LETI), S. Borel (LETI), B. Florin (LETI), L. Buchaillot (IEMN)
Silicon on Nothing Mems Electromechanical Resonator
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:18:54 GMT" } ]
2008-02-22T00:00:00
[ [ "Durand", "C.", "", "ST-Crolles, Leti, Iemn" ], [ "Casset", "F.", "", "LETI" ], [ "Ancey", "P.", "", "ST-Crolles" ], [ "Judong", "F.", "", "ST-Crolles" ], [ "Talbot", "A.", "", "ST-Crolles" ], [ "Quenouillere", "R.", "", "LETI" ], [ "Renaud", "D.", "", "LETI" ], [ "Borel", "S.", "", "LETI" ], [ "Florin", "B.", "", "LETI" ], [ "Buchaillot", "L.", "", "IEMN" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3052
EDA Publishing Association
J. Moulin (IEF), M. Woytasik (IEF), E. Martincic (IEF), E. Dufour-Gergam (IEF)
Copper Planar Microcoils Applied to Magnetic Actuation
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Recent advances in microtechnology allow realization of planar microcoils. These components are integrated in MEMS as magnetic sensor or actuator. In the latter case, it is necessary to maximize the effective magnetic field which is proportional to the current passing through the copper track and depends on the distance to the generation microcoil. The aim of this work was to determine the optimal microcoil design configuration for magnetic field generation. The results were applied to magnetic actuation, taking into account technological constraints. In particular, we have considered different realistic configurations that involve a magnetically actuated device coupled to a microcoil. Calculations by a semi-analytical method using Matlab software were validated by experimental measurements. The copper planar microcoils are fabricated by U.V. micromoulding on different substrates: flexible polymer (Kapton) and silicate on silicon. They are constituted by a spiral-like continuous track. Their total surface is about 1 mm2.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:19:39 GMT" } ]
2008-02-22T00:00:00
[ [ "Moulin", "J.", "", "IEF" ], [ "Woytasik", "M.", "", "IEF" ], [ "Martincic", "E.", "", "IEF" ], [ "Dufour-Gergam", "E.", "", "IEF" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3053
EDA Publishing Association
D. Szente-Varga, D. Horvath, M. Rencz
Ni-MH battery modelling for ambient intelligence applications
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Mobile devices, like sensor networks and MEMS actuators use mobile power supplies to ensure energy for their operation. These are mostly batteries. The lifetime of the devices depends on the power consumption and on the quality and capacitance of the battery. Though the integrated circuits and their power consumption improve continually, their clock frequency also increases with the time, and the resultant power consumption seems not to vary, or slightly increase. On the other hand, the properties of batteries are developing much slower, necessitating the optimization of their usage on system level.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:19:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Szente-Varga", "D.", "" ], [ "Horvath", "D.", "" ], [ "Rencz", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3054
EDA Publishing Association
M. Shamshirsaz, M. Bahrami, M.B. Asgari, M. Tayefeh
Analysis of polysilicon micro beams buckling with temperature-dependent properties
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of suspended polysilicon micro beams, the thermo-mechanical properties of polysilicon have been considered constant over a wide rang of temperature (20- 900 degrees C). In reality, the thermo-mechanical properties of polysilicon depend on temperature and change significantly at high temperatures. This paper describes the development and validation of theoretical and Finite Element Model (FEM) including the temperature dependencies of polysilicon properties such as thermal expansion coefficient and Young's modulus. In the theoretical models, two parts of elastic deflection model and thermal elastic model of micro beams buckling have been established and simulated. Also, temperature dependent buckling of polysilicon micro beam under high temperature has been modeled by Finite Element Analysis (FEA). Analytical results and numerical results using FEA are compared with experimental data available in literature. Their reasonable agreement validates analytical model and FEM. This validation indicates the importance of including temperature dependencies of polysilicon thermo-mechanical properties such as Coefficient of Thermal Expansion (CTE) in the previous models.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:20:52 GMT" } ]
2008-02-22T00:00:00
[ [ "Shamshirsaz", "M.", "" ], [ "Bahrami", "M.", "" ], [ "Asgari", "M. B.", "" ], [ "Tayefeh", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3055
EDA Publishing Association
S. Michael, S. Kurth, J. Klattenhoff, H. Geissler, S. Hering
Parameter Identification of Pressure Sensors by Static and Dynamic Measurements
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static measurements - an applied pressure results in a membrane deformation measured interferometrically and the corresponding output voltage. On the other hand optical measurements of the modal responses of the sensor membranes are performed. This information is used in an inverse identification algorithm to identify geometrical and material parameters based on a FE model. The number of parameters to be identified is thereby generally limited only by the number of measurable modal frequencies. A quantitative evaluation of the identification results permits furthermore the classification of processing errors like etching errors. Algorithms and identification results for membrane thickness, intrinsic stress and output voltage will be discussed in this contribution on the basis of the parameter identification of relative pressure sensors.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:21:29 GMT" } ]
2008-02-22T00:00:00
[ [ "Michael", "S.", "" ], [ "Kurth", "S.", "" ], [ "Klattenhoff", "J.", "" ], [ "Geissler", "H.", "" ], [ "Hering", "S.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3056
EDA Publishing Association
T.-H. Lin, H. Yang, Ruey Fang Shyu, C.-K. Chao
New Horizontal Frustum Optical Waveguide Fabrication Using UV Proximity Printing
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents a novel method to fabricate the horizontal frustum structure as a planar optical waveguide by using the proximity printing technique. A horizontal frustum optical waveguide with a both lateral and vertical taper structure was produced. The orthogonal and inclined masks with the diffraction effect were employed in lithography process. This method can precisely control each horizontal frustum optical waveguide geometric profile in the fabrication process. The horizontal frustum optical waveguide and its array with the same inclined angle were generated. The beam propagation simulation software (BPM_CAD) was used to modeling the optical performance. The simulation results reveal that the mode profile matched into horizontal frustum optical waveguide and fiber from the laser diode. The optical loss of horizontal hemi-frustum structure of optical waveguides was less than 0.2dB. The horizontal hemifrustum waveguide will be used for fiber coupling on boards for further optical communication systems.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:21:31 GMT" } ]
2008-02-22T00:00:00
[ [ "Lin", "T. -H.", "" ], [ "Yang", "H.", "" ], [ "Shyu", "Ruey Fang", "" ], [ "Chao", "C. -K.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3057
EDA Publishing Association
J. Iannacci, J. Tian, R. Gaddi, A. Gnudi, M. Bartek
A Fully Parameterized Fem Model for Electromagnetic Optimization of an RF Mems Wafer Level Package
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this work, we present a fully parameterized capped transmission line model for electromagnetic optimization of a wafer level package (WLP) for RF MEMS applications using the Ansoft HFSS-TM electromagnetic simulator. All the degrees of freedom (DoF's) in the package fabrication can be modified within the model in order to optimize for losses and mismatch (capacitive and inductive couplings) introduced by the cap affecting the MEMS RF behaviour. Ansoft HFSS-TM was also validated for the simulation of capped RF MEMS devices by comparison against experimental data. A test run of capped 50 transmission lines and shorts was fabricated and tested.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:21:58 GMT" } ]
2008-02-22T00:00:00
[ [ "Iannacci", "J.", "" ], [ "Tian", "J.", "" ], [ "Gaddi", "R.", "" ], [ "Gnudi", "A.", "" ], [ "Bartek", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3059
EDA Publishing Association
Y. Ju, T. Kobayashi, H. Soyama
Development of a Nanostructual Microwave Probe Based on GaAs
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
With the development of nanotechnology, the measurement of electrical properties in local area of materials and devices has become a great need. Although a lot kind of scanning probe microscope have been developed for satisfying the requirement of nanotechnology, a microscope technique which can determine electrical properties in local area of materials and devices is not yet developed. Recently, microwave microscope has been an interest to many researchers, due to its potential in the evaluation of electrical properties of materials and devices. The advance of microwave is that the response of materials is directly relative to the electromagnetic properties of materials. However, because of the problem of the structure of probes, nanometer-scale resolution has not been successful. To achieve the goal, a new structure microwave probe is required. In this paper, we report a nanostructural microwave probe. To restrain the attenuation of microwave in the probe, GaAs was used as the substrate of the probe. To obtain the desired structure, wet etching was used to fabricate the probe. Different with the dry etching, a side-etching will occur under the etching mask. Utilizing this property, a micro tip can be fabricated by etching a wafer, of which a small mask was introduced on the surface in advance.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:22:28 GMT" } ]
2008-02-22T00:00:00
[ [ "Ju", "Y.", "" ], [ "Kobayashi", "T.", "" ], [ "Soyama", "H.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3060
EDA Publishing Association
T. Sterken, Geert Altena, P. Fiorini, R. Puers
Characterisation of an Electrostatic Vibration Harvester
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:23:04 GMT" } ]
2008-02-22T00:00:00
[ [ "Sterken", "T.", "" ], [ "Altena", "Geert", "" ], [ "Fiorini", "P.", "" ], [ "Puers", "R.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3061
EDA Publishing Association
J. Wang (LGIPM), Y. Gong, G. Abba (LGIPM), Kui Chen, J. Shi, G. Cai
Surface Generation Analysis in Micro End-Milling Considering the Influences of Grain
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Micro end-milling method is a universal micro manufacturing method, which can be used to fabricating complex 3D structures and parts with many materials. But compared with their micrometer order size, their surface roughness quality is not satisfied. In this paper, the different metal phase grains influences are researched, and the micro end-milling process is described while the material is anisotropic. In this paper, the physical characteristics of different grains, especially friction coefficient and elastic module, are very critical to determine the chip formation process and surface generation. The chip is often discontinues because of the grain boundary effect. Through the micro end-milling experiment, the bottom surface results correlate very well with the theory analysis.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:23:07 GMT" } ]
2008-02-22T00:00:00
[ [ "Wang", "J.", "", "LGIPM" ], [ "Gong", "Y.", "", "LGIPM" ], [ "Abba", "G.", "", "LGIPM" ], [ "Chen", "Kui", "" ], [ "Shi", "J.", "" ], [ "Cai", "G.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3062
EDA Publishing Association
P. Bruschi, V. Nurra
An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip surface. The adapter is sealed to the chip surface by means of a thermal procedure. By this approach it is possible to selectively convey the fluid flow to reduced chip areas, avoiding contact with the pads. Fabrication and testing of a very compact flow sensor is described.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:23:39 GMT" } ]
2008-02-22T00:00:00
[ [ "Bruschi", "P.", "" ], [ "Nurra", "V.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3063
EDA Publishing Association
A.M. Paracha (ESYCOM-Esiee), Ph. Basset (ESYCOM-Esiee), F. Marty (ESYCOM-Esiee), A. Vaisman Chasin (ESYCOM-Esiee), P. Poulichet (ESYCOM-Esiee), T. Bourouina (ESYCOM-Esiee)
A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements have shown that with a theoretically lossless electronics and a starting voltage of 5 V, power density of 58 $\mu$W/cm3 is achievable at the resonance frequency of 290 Hz. It can be further improved by reducing the parasitic capacitance, which can be achieved by silicon etching, but a considerable mass is lost. In [2], it is shown that 19% of mass reduction improves power density from 12.95 $\mu$W/cm3 to 59 $\mu$W/cm3. Hence an enhancement in fabrication process is proposed, which is termed as Backside DRIE. It helps in increasing power density without loosing an important quantity of mass. Simulations have shown that 2.5% of mass removal improves power density up to 76.71 $\mu$W/cm3. Initial simulation results and problems of associated electronics are also discussed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:24:47 GMT" } ]
2008-02-22T00:00:00
[ [ "Paracha", "A. M.", "", "ESYCOM-Esiee" ], [ "Basset", "Ph.", "", "ESYCOM-Esiee" ], [ "Marty", "F.", "", "ESYCOM-Esiee" ], [ "Chasin", "A. Vaisman", "", "ESYCOM-Esiee" ], [ "Poulichet", "P.", "", "ESYCOM-Esiee" ], [ "Bourouina", "T.", "", "ESYCOM-Esiee" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3064
EDA Publishing Association
S.H. Ng, R.T. Tjeung, Z.F. Wang, A.C.W. Lu, I. Rodriguez, N. De Rooij
Formation of Embedded Microstructures by Thermal Activated Solvent Bonding
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
We present a thermal activated solvent bonding technique for the formation of embedded microstrucutres in polymer. It is based on the temperature dependent solubility of polymer in a liquid that is not a solvent at room temperature. With thermal activation, the liquid is transformed into a solvent of the polymer, creating a bonding capability through segmental or chain interdiffusion at the bonding interface. The technique has advantages over the more commonly used thermal bonding due to its much lower operation temperature (30 degrees C lower than the material's Tg), lower load, as well as shorter time. Lap shear test indicated bonding shear strength of up to 2.9 MPa. Leak test based on the bubble emission technique showed that the bonded microfluidic device can withstand at least 6 bars (87 psi) of internal pressure (gauge) in the microchannel. This technique can be applied to other systems of polymer and solvent.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:25:10 GMT" } ]
2008-02-22T00:00:00
[ [ "Ng", "S. H.", "" ], [ "Tjeung", "R. T.", "" ], [ "Wang", "Z. F.", "" ], [ "Lu", "A. C. W.", "" ], [ "Rodriguez", "I.", "" ], [ "De Rooij", "N.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3065
EDA Publishing Association
J. Jakovenko, M. Husak, T. Lalinskytfh, M. Drzik, G. Vanko
Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
For modern Gas sensors, high sensitivity and low power are expected. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC. High thermal isolation of these devices solves consumption problem and can be made by designing of free standing micromechanical hot plates. Mechanical stability and a fast thermal response are especially significant parameters that can not be neglected. These characteristics can be achieved with new concept of GaAs thermal converter.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:25:46 GMT" } ]
2008-02-22T00:00:00
[ [ "Jakovenko", "J.", "" ], [ "Husak", "M.", "" ], [ "Lalinskytfh", "T.", "" ], [ "Drzik", "M.", "" ], [ "Vanko", "G.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3066
EDA Publishing Association
W. Smetana, M. Unger
Set-up and characterization of a humidity sensor realized in LTCC-technology
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A new type of integrated temperature and humidity sensor applying LTCC-technology has been developed and characterized. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. Sensor design is based on FEA (Finite Element Analyses) where the critical design parameters have been analyzed with regard to the performance characteristic of the device. The set-up of sensor element will be shown and the functional capability will be demonstrated by experimental results.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:26:19 GMT" } ]
2008-02-22T00:00:00
[ [ "Smetana", "W.", "" ], [ "Unger", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3067
EDA Publishing Association
Z. Wang, V. Leonov, P. Fiorini, C. Van Hoof
Micromachined Polycrystalline Sige-Based Thermopiles for Micropower Generation on Human Body
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents a polycrystalline silicon germanium (poly-SiGe) thermopile specially designed for thermoelectric generators used on human body. Both the design of the single thermocouple and the arrangement of the thermocouple array have been described. A rim structure has been introduced in order to increase the temperature difference across the thermocouple junctions. The modeling of the thermocouple and the thermopile has been performed analytically and numerically. An output power of about 1 $\mu$W at an output voltage of more than 1 V is expected from the current design of thermopiles in a watch-size generator. The key material properties of the poly-SiGe have been measured. The thermopile has been fabricated and tested. Experimental results clearly demonstrate the advantage of the rim structure in increasing output voltage. In presence of forced convection, the output voltage of a non-released thermopile can increase from about 53 mV/K/cm2 to about 130 mV/K/cm2 after the rim structure is formed. A larger output voltage from the thermopile is expected upon process completion.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:26:33 GMT" } ]
2008-02-22T00:00:00
[ [ "Wang", "Z.", "" ], [ "Leonov", "V.", "" ], [ "Fiorini", "P.", "" ], [ "Van Hoof", "C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3068
EDA Publishing Association
B. Chen, J. Wei, Francis Tay, Y.T. Wong, C. Iliescu
Silicon microneedles array with biodegradable tips for transdermal drug delivery
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main problems related to silicon microneedles : broking of the top part of the needles inside the skin, a simple solution can be fabrication of microneedles array with biodegradable tips. The silicon microneedles array was fabricated by using reactive ion etching while the biodegradable tips were performed using and anodization process that generates selectively porous silicon only on the top part of the skin. The paper presents also the results of in vitro release of calcein using microneedles array with biodegradable tips
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:27:43 GMT" } ]
2008-02-22T00:00:00
[ [ "Chen", "B.", "" ], [ "Wei", "J.", "" ], [ "Tay", "Francis", "" ], [ "Wong", "Y. T.", "" ], [ "Iliescu", "C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3069
EDA Publishing Association
M.C. Wu, J.S. Chang, C.-K. Yang
2-D Analysis of Enhancement of Analytes Adsorption Due to Flow Stirring by Electrothermal Force in The Microcantilever Sensor
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction between analytes and ligands: the mass transport process and the chemical reaction process. The mass transport process is related to convection and diffusion. Total or partial limit of mass transport would retard the diffusion from the bulk fluid to the interface of reaction. This effect decreases the possibility of adsorption of analyte and ligand because the chemical reaction is faster than the diffusion. In order to solve this problem, we apply an ac electric field to induce a vortex field by the electrothermal effect, which helps in increasing the rate of diffusion. By using the finite element analysis software, COMSOL Multiphysics, we optimized several parameters of the microelectrode structures and the position of the reacting surface, i.e. the microcantilever, by a simplified 2-D model and a 3-D model. It is successful in accelerating the reacting rate of the molecule which is limited by mass transport. The factor of the efficiency is about 1.429 when the operating voltage is 15 Vrms peak-to-peak. In addition, the surface concentration of the complex on the microcantilever has been simulated.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:28:32 GMT" } ]
2008-02-22T00:00:00
[ [ "Wu", "M. C.", "" ], [ "Chang", "J. S.", "" ], [ "Yang", "C. -K.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3070
EDA Publishing Association
H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, M.C. Kou
Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:28:46 GMT" } ]
2008-02-22T00:00:00
[ [ "Ma", "H. K.", "" ], [ "Hou", "B. R.", "" ], [ "Wu", "H. Y.", "" ], [ "Lin", "C. Y.", "" ], [ "Gao", "J. J.", "" ], [ "Kou", "M. C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3071
EDA Publishing Association
W.P. Lan, J.S. Chang, K.C. Wu, Y.C. Shih
Simulation of valveless micropump and mode analysis
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, Lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this work, a 3-D simulation is performed to study for the solid-fluid coupling effect driven by piezoelectric materials and utilizes asymmetric obstacles to control the flow direction. The result of simulation is also verified. For a micropump, it is crucial to find the optimal working frequency which produce maximum net flow rate. The PZT plate vibrates under the first mode, which is symmetric. Adjusting the working frequency, the maximum flow rate can be obtained. For the micrpump we studied, the optimal working frequency is 3.2K Hz. At higher working frequency, say 20K Hz, the fluid-solid membrane may come out a intermediate mode, which is different from the first mode and the second mode. It is observed that the center of the mode drifts. Meanwhile, the result shows that a phase shift lagging when the excitation force exists in the vibration response. Finally, at even higher working frequency, say 30K Hz, a second vibration mode is observed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:29:12 GMT" } ]
2008-02-22T00:00:00
[ [ "Lan", "W. P.", "" ], [ "Chang", "J. S.", "" ], [ "Wu", "K. C.", "" ], [ "Shih", "Y. C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3072
EDA Publishing Association
Yu-Hsiang Wang, C.-C. Hsiao, Chia-Yen Lee, R.-H. Ma, Po-Cheng Chou
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in which the Pt micro heater and electrodes are deposited directly on the substrate and the NiO thin film is deposited above on the micro heater to serve as sensing layer. Pt electrodes are formed below the sensing layer to measure the electrical conductivity changes caused by formaldehyde oxidation at the oxide surface. Furthermore, the upper sensing layer and NiO/Al2O3 co-sputtering significantly increases the sensitivity of the gas sensor, improves its detection limit capability. The microfabricated formaldehyde gas sensor presented in this study is suitable not only for industrial process monitoring, but also for the detection of formaldehyde concentrations in buildings in order to safeguard human health.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:30:07 GMT" } ]
2008-02-22T00:00:00
[ [ "Wang", "Yu-Hsiang", "" ], [ "Hsiao", "C. -C.", "" ], [ "Lee", "Chia-Yen", "" ], [ "Ma", "R. -H.", "" ], [ "Chou", "Po-Cheng", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3073
EDA Publishing Association
L. Grasser (IEF), H. Mathias (IEF), F. Parrain (IEF), X. Le Roux (IEF), J.-P. Gilles (IEF)
Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:32:22 GMT" } ]
2008-02-22T00:00:00
[ [ "Grasser", "L.", "", "IEF" ], [ "Mathias", "H.", "", "IEF" ], [ "Parrain", "F.", "", "IEF" ], [ "Roux", "X. Le", "", "IEF" ], [ "Gilles", "J. -P.", "", "IEF" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3074
EDA Publishing Association
G.-J. Wang, K.-H. Ho, C.-C. Hsueh
Biodegradable Polylactic Acid (PLA) Microstructures for Scaffold Applications
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this research, we present a simple and cost effective soft lithographic process to fabricate PLA scaffolds for tissue engineering. In which, the negative photoresist JSR THB-120N was spun on a glass subtract followed by conventional UV lithographic processes to fabricate the master to cast the PDMS elastomeric mold. A thin poly(vinyl alcohol) (PVA) layer was used as a mode release such that the PLA scaffold can be easily peeled off. The PLA precursor solution was then cast onto the PDMS mold to form the PLA microstructures. After evaporating the solvent, the PLA microstructures can be easily peeled off from the PDMS mold. Experimental results show that the desired microvessels scaffold can be successfully transferred to the biodegradable polymer PLA.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:32:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Wang", "G. -J.", "" ], [ "Ho", "K. -H.", "" ], [ "Hsueh", "C. -C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3075
EDA Publishing Association
H. Camon (LAAS), C. Ganibal (LAAS), N. Rapahoz, M. Trzmiel, C. Pisella, C. Martinez (LETI), K. Gilbert (LETI), S. Valette (LETI)
Solving functional reliability issue for an optical electrostatic switch
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electro-statically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:33:15 GMT" } ]
2008-02-22T00:00:00
[ [ "Camon", "H.", "", "LAAS" ], [ "Ganibal", "C.", "", "LAAS" ], [ "Rapahoz", "N.", "", "LETI" ], [ "Trzmiel", "M.", "", "LETI" ], [ "Pisella", "C.", "", "LETI" ], [ "Martinez", "C.", "", "LETI" ], [ "Gilbert", "K.", "", "LETI" ], [ "Valette", "S.", "", "LETI" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3076
EDA Publishing Association
A. Soma, G. De Pasquale
Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures ; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:34:15 GMT" } ]
2008-02-22T00:00:00
[ [ "Soma", "A.", "" ], [ "De Pasquale", "G.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3077
EDA Publishing Association
M. El Ghorba, N. Andr\'e, S. Sobieski, J.-P. Raskin
Out-of-Plane Cmos Compatible Magnetometers
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:34:43 GMT" } ]
2008-02-22T00:00:00
[ [ "Ghorba", "M. El", "" ], [ "André", "N.", "" ], [ "Sobieski", "S.", "" ], [ "Raskin", "J. -P.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3078
EDA Publishing Association
S. Soulimane (LETI), F. Casset (LETI), F. Chapuis (LETI), P.-L. Charvet (LETI), M. a\"id (LETI)
Tuneable Capacitor based on dual picks profile of the sacrificial layer
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with only one mask level. This realization is based on a special profile of the sacrificial layer designed by two picks. The mechanism of the sacrificial layer realisation is dependent on resist thickness, resist formulation (viscosity, type of polymer and/or solvent, additives...), design of the patterned layer (size or width) and the conditions under which this layer is prepared: thermal treatment, etch back processes... In this communication we demonstrate influence of the later parameters and discuss how a dual pick profile was achieved.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:35:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Soulimane", "S.", "", "LETI" ], [ "Casset", "F.", "", "LETI" ], [ "Chapuis", "F.", "", "LETI" ], [ "Charvet", "P. -L.", "", "LETI" ], [ "aïd", "M.", "", "LETI" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3079
EDA Publishing Association
J.-C. Liou, F.-G. Tseng
Reduced 30% scanning time 3D multiplexer integrated circuit applied to large array format 20KHZ frequency inkjet print heads
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Enhancement of the number and array density of nozzles within an inkjet head chip is one of the keys to raise the printing speed and printing resolutions. However, traditional 2D architecture of driving circuits can not meet the requirement for high scanning speed and low data accessing points when nozzle numbers greater than 1000. This paper proposes a novel architecture of high-selection-speed three-dimensional data registration for inkjet applications. With the configuration of three-dimensional data registration, the number of data accessing points as well as the scanning lines can be greatly reduced for large array inkjet printheads with nozzles numbering more than 1000. This IC (Integrated Circuit) architecture involves three-dimensional multiplexing with the provision of a gating transistor for each ink firing resistor, where ink firing resistors are triggered only by the selection of their associated gating transistors. Three signals: selection (S), address (A), and power supply (P), are employed together to activate a nozzle for droplet ejection. The smart printhead controller has been designed by a 0.35 um CMOS process with a total circuit area, 2500 x 500 microm2, which is 80% of the cirucuit area by 2D configuration for 1000 nozzles. Experiment results demonstrate the functionality of the fabricated IC in operation, signal transmission and a potential to control more than 1000 nozzles with only 31 data access points and reduced 30% scanning time.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:36:16 GMT" } ]
2008-02-22T00:00:00
[ [ "Liou", "J. -C.", "" ], [ "Tseng", "F. -G.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3080
EDA Publishing Association
J.-S. Chen, S.-H. Chen, K.-C. Wu
Analysis of Asymmetric Piezoelectric Composite Beam
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper deals with the vibration analysis of an asymmetric composite beam composed of glass a piezoelectric material. The Bernoulli's beam theory is adopted for mechanical deformations, and the electric potential field of the piezoelectric material is assumed such that the divergence-free requirement of the electrical displacements is satisfied. The accuracy of the analytic model is assessed by comparing the resonance frequencies obtained by the analytic model with those obtained by the finite element method. The model developed can be used as a tool for designing piezoelectric actuators such as micro-pumps.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:36:27 GMT" } ]
2008-02-22T00:00:00
[ [ "Chen", "J. -S.", "" ], [ "Chen", "S. -H.", "" ], [ "Wu", "K. -C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3081
EDA Publishing Association
Z. Jian, Y. Yuanwei, Z. Yong, Chen Chen, J. Shixing
A High-Q Microwave MEMS Resonator
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays and grounded planes. The three dimensional (3D) high resistivity silicon substrate filled cavity resonator is fed by current probes using CPW line. This monolithic resonator results in low cost, high performance and easy integration with planar cicuits. The measured quality factor is beyond 180 and the resonance frequency is 21GHz.It shows a good agreement with the simulation results. The chip size is only 4.7mm x 4.6mm x 0.5mm. Finally, as an example of applications, a filter using two SIW resonators is designed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:38:12 GMT" } ]
2008-02-22T00:00:00
[ [ "Jian", "Z.", "" ], [ "Yuanwei", "Y.", "" ], [ "Yong", "Z.", "" ], [ "Chen", "Chen", "" ], [ "Shixing", "J.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3082
EDA Publishing Association
E. Jung, D. Manessis, A. Neumann, L. Bottcher, T. Braun, J. Bauer, H. Reichl, B. Iafelice, F. Destro, R. Gambari
Lamination And Microstructuring Technology for a Bio-Cell Multiwell array
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Microtechnology becomes a versatile tool for biological and biomedical applications. Microwells have been established long but remained non-intelligent up to now. Merging new fabrication techniques and handling concepts with microelectronics enables to realize intelligent microwells suitable for future improved cancer treatment. The described technology depicts the basis for the fabrication of a elecronically enhanced microwell. Thin aluminium sheets are structured by laser micro machining and laminated successively to obtain registration tolerances of the respective layers of 5..10\^A$\mu$m. The microwells lasermachined into the laminate are with 50..80\^A$\mu$m diameter, allowing to hold individual cells within the well. The individual process steps are described and results on the microstructuring are given.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:38:47 GMT" } ]
2008-02-22T00:00:00
[ [ "Jung", "E.", "" ], [ "Manessis", "D.", "" ], [ "Neumann", "A.", "" ], [ "Bottcher", "L.", "" ], [ "Braun", "T.", "" ], [ "Bauer", "J.", "" ], [ "Reichl", "H.", "" ], [ "Iafelice", "B.", "" ], [ "Destro", "F.", "" ], [ "Gambari", "R.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3083
EDA Publishing Association
Ming-Tzer Lin, K.-S. Shiu, Chi-Jia Tong
Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate knowledge on the mechanical behaviors of thin film materials used for MEMS is important for successful design and development of MEMS. Here a novel electroplating spring-bridge micro-tensile specimen integrates pin-pin align holes, misalignment compensate spring, load sensor beam and freestanding thin film is demonstrated and fabricated. The specimen is fit into a specially designed micro-mechanical apparatus to carry out a series of monotonic tensile testing on sub-micron freestanding thin films. Certain thin films applicable as structure or motion gears in MEMS were tested including sputtered gold, copper and tantalum nitride thin films. Metal specimens were fabricated by sputtering; for tantalum nitride film samples, nitrogen gas was introduced into the chamber during sputtering tantalum films on the silicon wafer. The sample fabrication method involves three steps of lithography and two steps of electroplating copper to hold a dog bone freestanding thin film. Using standard wet etching or lift off techniques, a series of microtensile specimens were patterned in metal thin films, holes, and seed layer for spring and frame structure on the underlying silicon oxide coated silicon substrate. Two steps of electroplating processing to distinct spring and frame portion of the test chip. Finally, chemical etched away the silicon oxide to separated electroplated specimen and silicon substrate.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:39:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Lin", "Ming-Tzer", "" ], [ "Shiu", "K. -S.", "" ], [ "Tong", "Chi-Jia", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3085
EDA Publishing Association
T. Akashi, Y. Yoshimura
Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
10.1088/0960-1317/18/10/105004
null
cs.OH
null
Deep reactive ion etching (DRIE) of borosilicate glass and profile control of an etched groove are reported. DRIE was carried out using an anodically bonded silicon wafer as an etching mask. We controlled the groove profile, namely improving its sidewall angle, by removing excessively thick polymer film produced by carbonfluoride etching gases during DRIE. Two fabrication processes were experimentally compared for effective removal of the film : DRIE with the addition of argon to the etching gases and a novel combined process in which DRIE and subsequent ultrasonic cleaning in DI water were alternately carried out. Both processes improved the sidewall angle, and it reached 85o independent of the mask-opening width. The results showed the processes can remove excessive polymer film on sidewalls. Accordingly, the processes are an effective way to control the groove profile of borosilicate glass.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:40:15 GMT" } ]
2009-11-13T00:00:00
[ [ "Akashi", "T.", "" ], [ "Yoshimura", "Y.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3086
EDA Publishing Association
A.A. Hamzah, Y. Husaini, Y. Husaini, B.Y. Majlis, I. Ahmad
Selection of High Strength Encapsulant for MEMS Devices Undergoing High Pressure Packaging
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Deflection behavior of several encapsulant materials under uniform pressure was studied to determine the best encapsulant for MEMS device. Encapsulation is needed to protect movable parts of MEMS devices during high pressure transfer molded packaging process. The selected encapsulant material has to have surface deflection of less than 5 ?m under 100 atm vertical loading. Deflection was simulated using CoventorWare ver.2005 software and verified with calculation results obtained using shell bending theory. Screening design was used to construct a systematic approach for selecting the best encapsulant material and thickness under uniform pressure up to 100 atm. Materials considered for this study were polyimide, parylene C and carbon based epoxy resin. It was observed that carbon based epoxy resin has deflection of less than 5 ?m for all thickness and pressure variations. Parylene C is acceptable and polyimide is unsuitable as high strength encapsulant. Carbon based epoxy resin is considered the best encapsulation material for MEMS under high pressure packaging process due to its high strength.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:40:31 GMT" } ]
2008-02-22T00:00:00
[ [ "Hamzah", "A. A.", "" ], [ "Husaini", "Y.", "" ], [ "Husaini", "Y.", "" ], [ "Majlis", "B. Y.", "" ], [ "Ahmad", "I.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3087
EDA Publishing Association
G.-J. Wang, W.-Z. Chen, K.J. Chang
A Two-Step Etching Method to Fabricate Nanopores in Silicon
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A cost effectively method to fabricate nanopores in silicon by only using the conventional wet-etching technique is developed in this research. The main concept of the proposed method is a two-step etching process, including a premier double-sided wet etching and a succeeding track-etching. A special fixture is designed to hold the pre-etched silicon wafer inside it such that the track-etching can be effectively carried out. An electrochemical system is employed to detect and record the ion diffusion current once the pre-etched cavities are etched into a through nanopore. Experimental results indicate that the proposed method can cost effectively fabricate nanopores in silicon.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:40:46 GMT" } ]
2008-02-22T00:00:00
[ [ "Wang", "G. -J.", "" ], [ "Chen", "W. -Z.", "" ], [ "Chang", "K. J.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3088
EDA Publishing Association
M. Bedani, F. Carozza, R. Gaddi, A. Gnudi, B. Margesin, F. Giacomozzi
A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RF-MEMS technology from ITC-irst is currently underway.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:42:02 GMT" } ]
2008-02-22T00:00:00
[ [ "Bedani", "M.", "" ], [ "Carozza", "F.", "" ], [ "Gaddi", "R.", "" ], [ "Gnudi", "A.", "" ], [ "Margesin", "B.", "" ], [ "Giacomozzi", "F.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3089
EDA Publishing Association
P. Schneider, S. Reitz, A. Wilde, G. Elst, P. Schwarz
Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Functional aspects as well as the influence of integration technology on the system behavior have to be considered in the 3D integration design process of micro systems. Therefore, information from different physical domains has to be provided to designers. Due to the variety of structures and effects of different physical domains, efficient modeling approaches and simulation algorithms have to be combined. The paper describes a modular approach which covers detailed analysis with PDE solvers and model generation for system level simulation.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:42:03 GMT" } ]
2008-02-22T00:00:00
[ [ "Schneider", "P.", "" ], [ "Reitz", "S.", "" ], [ "Wilde", "A.", "" ], [ "Elst", "G.", "" ], [ "Schwarz", "P.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3090
EDA Publishing Association
A. Chaehoi, M. Begbie, D. Cornez, K. Kirk
Modeling of a piezoelectric micro-scanner
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:42:31 GMT" } ]
2008-02-22T00:00:00
[ [ "Chaehoi", "A.", "" ], [ "Begbie", "M.", "" ], [ "Cornez", "D.", "" ], [ "Kirk", "K.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3091
EDA Publishing Association
Z. Szucs, M. Rencz
A novel method for fatigue testing of MEMS devices containing movable elements
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating a signal that is a function of the input voltage and capacitive ratio. The proposed circuit can be used to actuate and to sense position of an electrostatic MEMS actuator without extra sensing elements. This approach is compatible with the requirements of most analog feedback systems and the circuit topology of pulsed digital oscillators (PDO).
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:42:32 GMT" } ]
2008-02-22T00:00:00
[ [ "Szucs", "Z.", "" ], [ "Rencz", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3092
EDA Publishing Association
R. Levy (ONERA - Mfe), A. Dupret (ONERA - Mfe), H. Mathias (ONERA - Mfe), J.-P. Gilles (ONERA - Mfe), F. Parrain (ONERA - Mfe), B. Eisenbeis (IEF), S. Megherbi (IEF)
Noise and thermal stability of vibrating micro-gyrometers preamplifiers
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The preamplifier is a critical component of gyrometer's electronics. Indeed the resolution of the sensor is limited by its signal to noise ratio, and the gyrometer's thermal stability is limited by its gain drift. In this paper, five different kinds of preamplifiers are presented and compared. Finally, the design of an integrated preamplifier is shown in order to increase the gain stability while reducing its noise and size.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:42:54 GMT" } ]
2008-02-22T00:00:00
[ [ "Levy", "R.", "", "ONERA - Mfe" ], [ "Dupret", "A.", "", "ONERA - Mfe" ], [ "Mathias", "H.", "", "ONERA -\n Mfe" ], [ "Gilles", "J. -P.", "", "ONERA - Mfe" ], [ "Parrain", "F.", "", "ONERA - Mfe" ], [ "Eisenbeis", "B.", "", "IEF" ], [ "Megherbi", "S.", "", "IEF" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3093
EDA Publishing Association
N. Abel\'e, D. Grogg, C. Hibert, F. Casset (LETI), P. Ancey (LETI), A. Ionescu
0-level Vacuum Packaging RT Process for MEMS Resonators
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant Suspended-Gate MOSFET [1] fabrication processes. This paper presents a study on the influence of releasing hole dimensions on the releasing time and hole clogging. It discusses mass production compatibility in terms of packaging stress during back-end plastic injection process. The packaging is done at room temperature making it fully compatible with IC-processed wafers and avoiding any subsequent degradation of the active devices.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:43:06 GMT" } ]
2008-02-22T00:00:00
[ [ "Abelé", "N.", "", "LETI" ], [ "Grogg", "D.", "", "LETI" ], [ "Hibert", "C.", "", "LETI" ], [ "Casset", "F.", "", "LETI" ], [ "Ancey", "P.", "", "LETI" ], [ "Ionescu", "A.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3094
EDA Publishing Association
O. Soeraasen, J.E. Ramstad
From MEMS Devices to Smart Integrated Systems
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts in an ordinary CMOS process. This procedure has been used to design an oscillator consisting of a resonating cantilever beam and a CMOS Pierce feedback amplifier. The resonating frequency is changed if the beam is bent by external forces. The paper describes central features of this procedure and highlights the design considerations for the CMOS-MEMS oscillator. The circuit is used as an example of a "VLSI designer" way of making future integrated micromechanical and microelectronic systems on-chip. The possibility for expansion to larger systems is reviewed.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:43:45 GMT" } ]
2008-02-22T00:00:00
[ [ "Soeraasen", "O.", "" ], [ "Ramstad", "J. E.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3095
EDA Publishing Association
N. Marenco, S. Warnat, W. Reinert
Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Micromechanical devices like accelerometers or rotation sensors form an increasing segment beneath the devices supplying the consumer market. A hybrid integration approach to build smart sensor clusters for the precise detection of movements in all spatial dimensions requires a large toolbox of interconnect technologies, each with its own constraints regarding the total process integration. Specific challenges described in this paper are post-CMOS feedthroughs, front-to-front die contact arrays, vacuum-compliant lateral interconnect and fine-pitch solder balling to finally form a Chip-Scale System-in-Package (CSSiP).
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:43:46 GMT" } ]
2008-02-22T00:00:00
[ [ "Marenco", "N.", "" ], [ "Warnat", "S.", "" ], [ "Reinert", "W.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3097
EDA Publishing Association
A. Ballestra, E. Brusa, M.G. Munteanu, A. Soma
Experimental Characterization of the static behaviour of microcatntilevers electrostatically actuated
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently used in RF-MEMS design operation or even in material testing at microscale. The analysis investigates preliminarily the static behaviour of a set of microcantilevers bending in-plane. This investigation is aimed to distinguish the geometrical linear behaviour, exhibited under small displacement assumption, from the geometrical nonlinearity, caused by large deflection. The applied electromechanical force, which nonlinearly depends on displacement, charge and voltage, is predicted by a coupled-field approach, based on numerical methods and herewith experimentally validated, by means of a Fogale Zoomsurf 3D. Model performance is evaluated on pull-in prediction and on the curve displacement vs. voltage. In fact, FEM nonlinear solution performed by a coupled-field approach, available on commercial codes, and by a FEM non-incremental approach are compared with linear solution, for different values of the design parameters.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:44:13 GMT" } ]
2008-02-22T00:00:00
[ [ "Ballestra", "A.", "" ], [ "Brusa", "E.", "" ], [ "Munteanu", "M. G.", "" ], [ "Soma", "A.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3099
EDA Publishing Association
E. Pajot-Augy (NOPA)
Nanobiosensors based on individual olfactory receptors
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In the SPOT-NOSED European project, nanoscale sensing elements bearing olfactory receptors and grafted onto functionalized gold substrates are used as odorant detectors to develop a new concept of nanobioelectronic nose, through sensitive impedancemetric measurement of single receptor conformational change upon ligand binding, with a better specificity and lower detection threshold than traditional physical sensors.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:44:35 GMT" } ]
2008-02-22T00:00:00
[ [ "Pajot-Augy", "E.", "", "NOPA" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3100
EDA Publishing Association
E. Halvorsen, S. Husa
Bridge configurations in piezoresistive two-axis accelerometers
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In piezoresisitive two-axis accelerometers with two proof masses suspended by cantilever beams, there are generally many ways to configure the Wheatstone bridges. The configurations are different both with respect to functionality and performance. The main distinction is between bridges that contain resistors belonging to both proof masses, and the one bridge that doesn't. We compare the different bridge configurations by analytical calculations of bridge non-linearity, robustness towards manufacturing variations and electronic noise. We consider accelerometers where the ratio between the sensitivity to acceleration normal and parallel to the chip plane vary over a wide range. For numerical examples we use representative values for p-type silicon. The performance of the configuration with one bridge connected to each proof mass is superior to those that combine resistors belonging to different proof masses.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:44:38 GMT" } ]
2008-02-22T00:00:00
[ [ "Halvorsen", "E.", "" ], [ "Husa", "S.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3101
EDA Publishing Association
N. Dumas, Z. Xu, K. Georgopopoulos, J. Bunyan, A. Richardson
Online Sensor Testing through Superposition of Encoded Stimulus
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Online monitoring remains an important requirement for a range of microsystems. The solution based on the injection of an actuating test stimulus into the bias structure of active devices holds great potential. This paper presents an improved solution that aims to remove the measurand-induced signal from the sensor output. It involves encoding the test stimulus and using a covariance algorithm to reject the signal that does not contain the code. The trade-off between the sine wave rejection ratio of the technique and the test time response is studied and, in the case of a MEMS accelerometer, it is demonstrated that the rejection is higher than 14dB for a test time of about 0.7s. Furthermore, the accuracy of the test signal can be evaluated to guarantee the integrity of the online test output.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:45:05 GMT" } ]
2008-02-22T00:00:00
[ [ "Dumas", "N.", "" ], [ "Xu", "Z.", "" ], [ "Georgopopoulos", "K.", "" ], [ "Bunyan", "J.", "" ], [ "Richardson", "A.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3102
EDA Publishing Association
M. Narducci, E. Figueras, I. Gracia, L. Fonseca, J. Santander, C. Can\'e
Modeling of T-Shaped Microcantilever Resonators
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both the spring constant (k) and mass (m) of the resonator. The aim of this work was to model a cantilever structure to determine the optimal dimensions in which the resonance frequency would be a function dominated by mass changes and not stiffness changes. In order to validate the model a set of microcantilevers were fabricated and characterized.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:45:15 GMT" } ]
2008-02-22T00:00:00
[ [ "Narducci", "M.", "" ], [ "Figueras", "E.", "" ], [ "Gracia", "I.", "" ], [ "Fonseca", "L.", "" ], [ "Santander", "J.", "" ], [ "Cané", "C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3103
EDA Publishing Association
H. Kirchberger, P. Lindler, M. Wimpliger
Novel Bonding technologies for wafer-level transparent packaging of MOEMS
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
Depending on the type of Micro-Electro-Mechanical System (MEMS), packaging costs are contributing up to 80% of the total device cost. Each MEMS device category, its function and operational environment will individually dictate the packaging requirement. Due to the lack of standardized testing procedures, the reliability of those MEMS packages sometimes can only be proven by taking into consideration its functionality over lifetime. Innovation with regards to cost reduction and standardization in the field of packaging is therefore of utmost importance to the speed of commercialisation of MEMS devices. Nowadays heavily driven by consumer applications the MEMS device market is forecasted to enjoy a compound annual growth rate (CAGR) above 13%, which is when compared to the IC device market, an outstanding growth rate. Nevertheless this forecasted value can drift upwards or downwards depending on the rate of innovation in the field of packaging. MEMS devices typically require a specific fabrication process where the device wafer is bonded to a second wafer which effectively encapsulates the MEMS structure. This method leaves the device free to move within a vacuum or an inert gas atmosphere.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:45:48 GMT" } ]
2008-02-22T00:00:00
[ [ "Kirchberger", "H.", "" ], [ "Lindler", "P.", "" ], [ "Wimpliger", "M.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3104
EDA Publishing Association
M.C. Hsieh, D.K. Jair, Y.K. Fang, C.S. Lin
Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In this paper, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic were used for electrical-characteristics and maximum mechanical strength, respectively. The copper wires were capped with electroless Ni plating to prevent the copper from oxidizing. A Si3N4/ SiO2 X-beam was designed to increase the mechanical strength of the inductor in air gap. The enhancement of maximum mechanical strength of a spiral inductor with X-beams is more than 4500 times. Among these structures, the measured maximum quality factor (Q) of the suspending inductor and frequency at maximum Q are improved from 5.2 and 1.6GHz of conventional spiral inductor to 7.3 and 2.1 GHz, respectively.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:45:51 GMT" } ]
2008-02-22T00:00:00
[ [ "Hsieh", "M. C.", "" ], [ "Jair", "D. K.", "" ], [ "Fang", "Y. K.", "" ], [ "Lin", "C. S.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3105
EDA Publishing Association
H. Chang, J. Xu, J. Xie, Ch. Zhang, Z. Yan, W. Yuan
One MEMS Design Tool with Maximal Six Design Flows
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
This paper presents one MEMS design tool with total six design flows, which makes it possible that the MEMS designers are able to choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are lumped-element model based system level, finite element analysis based device level and process level, which covers nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that the enough flexibility in the design flow can really increase the design efficiency.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:46:21 GMT" } ]
2008-02-22T00:00:00
[ [ "Chang", "H.", "" ], [ "Xu", "J.", "" ], [ "Xie", "J.", "" ], [ "Zhang", "Ch.", "" ], [ "Yan", "Z.", "" ], [ "Yuan", "W.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]
0802.3106
EDA Publishing Association
X. C. Shan, Y. C. Liu, H. J. Lu, Z. F. Wang, Y. C. Lam
Studies of Polymer Deformation and Recovery in Hot Embossing
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
null
null
cs.OH
null
In large area micro hot embossing, the process temperature plays a critical role to both the local fidelity of microstructure formation and global uniformity. The significance of low temperature hot embossing is to improve global flatness of embossed devices. This paper reports on experimental studies of polymer deformation and relaxation in micro embossing when the process temperatures are below or near its glass transition temperature (Tg). In this investigation, an indentation system and a micro embosser were used to investigate the relationship of microstructure formation versus process temperature and load pressure. The depth of indentation was controlled and the load force at a certain indentation depth was measured. Experiments were carried out using 1 mm thick PMMA films with the process temperature ranging from Tg-55 degrees C to Tg +20 degrees C. The embossed structures included a single micro cavity and groups of micro cavity arrays. It was found that at temperature of Tg-55 degrees C, elastic deformation dominated the formation of microstructures and significant relaxation happened after embossing. From Tg-20 degrees C to Tg, plastic deformation dominated polymer deformation, and permanent cavities could be formed on PMMA substrates without obvious relaxation. However, the formation of protrusive structures as micro pillars was not complete since there was little polymer flow. With an increase in process temperature, microstructure could be formed under lower loading pressure. Considering the fidelity of a single microstructure and global flatness of embossed substrates, micro hot embossing at a low process temperature, but with good fidelity, should be preferred.
[ { "version": "v1", "created": "Thu, 21 Feb 2008 13:46:30 GMT" } ]
2008-02-22T00:00:00
[ [ "Shan", "X. C.", "" ], [ "Liu", "Y. C.", "" ], [ "Lu", "H. J.", "" ], [ "Wang", "Z. F.", "" ], [ "Lam", "Y. C.", "" ] ]
[ { "class": "Computer Science", "code": "cs.OH", "description": "This is the classification to use for documents that do not fit anywhere else.", "span": "(Other Computer Science)" } ]