waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.824 | 0.926 | -31.9 | 183.199997 | 5 | 0.000008 | 0.19 | 1.51476 | 1.38037 | 1.851 | 2.517 | 1.48345 | 1.48703 | 0.000017 | 58.34 | 67.660004 | 0.000003 | 3.11 | 2.86 | 2.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.64 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.775 | 0.963 | -1.3 | 118.199997 | 10 | 0.000003 | 16.76 | 1.54219 | 1.12378 | 1.406 | 2.667 | 1.92263 | 1.9259 | 0.000027 | 65.639999 | 83.059998 | 0.000001 | 0.66 | 0.43 | 0.4 | 1,260 | 1,625 | FDTD | 2.98 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.792 | 0.871 | -22.700001 | 177.600006 | 5 | 0.000001 | 1.43 | 1.72803 | 1.07856 | 2.178 | 3.577 | 1.82466 | 1.82604 | 0.000007 | 54.779999 | 91.620003 | 0.000005 | 6.64 | 6.46 | 6.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.76 |
Polymethyl Methacrylate (PMMA) | Air | 1.427 | 0.8 | -12.1 | 191 | 10 | 0.000013 | 0.2 | 1.68883 | 1.17384 | 1.827 | 2.97 | 1.99746 | 2.00235 | 0.000024 | 55.98 | 74.760002 | 0.000005 | 3.55 | 3.4 | 3.41 | 1,260 | 1,625 | FDTD | 1.31 |
Polydimethylsiloxane (PDMS) | Air | 0.61 | 0.238 | 6.8 | 180 | 5 | 0.000244 | 0.18 | 1.60352 | 1.16612 | 2.76 | 3.896 | 1.73638 | 1.74214 | 0.000033 | 78.839996 | 59.360001 | 0.000002 | 2.19 | 2.07 | 2.04 | 1,260 | 1,625 | FDTD | 1.81 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.21 | 0.916 | -21.6 | 192.800003 | 5 | 0.000007 | 0.2 | 1.78282 | 1.43374 | 1.388 | 2.645 | 1.72725 | 1.73323 | 0.000028 | 86.720001 | 26.219999 | 0.000003 | 8.08 | 7.6 | 7.63 | 1,260 | 1,625 | FDTD | 3.12 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.614 | 0.441 | -8 | 162.800003 | 1 | 0.000003 | 18.459999 | 1.45231 | 1.44794 | 1.886 | 2.802 | 1.84969 | 1.85663 | 0.000041 | 83.059998 | 55.540001 | 0.000004 | 2.08 | 1.8 | 1.67 | 1,260 | 1,625 | FDTD | 2.3 |
SU-8 | Air | 0.78 | 0.901 | -24.700001 | 158.300003 | 10 | 0.000007 | 0.27 | 1.55795 | 1.04746 | 1.256 | 2.063 | 1.9752 | 1.98358 | 0.000046 | 55.290001 | 83.599998 | 0.000001 | 6.1 | 5.62 | 5.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.33 |
SU-8 | Silicon Dioxide (SiO₂) | 1.9 | 0.531 | -40.400002 | 121.699997 | 10 | 0.000008 | 0.23 | 1.96909 | 1.3572 | 1.845 | 2.416 | 1.78853 | 1.79183 | 0.00002 | 59.529999 | 53.459999 | 0.000001 | 3.07 | 2.75 | 2.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.15 |
SU-8 | Air | 1.041 | 0.778 | -12.5 | 110.099998 | 1 | 0.00001 | 0.21 | 1.86288 | 1.14099 | 2.27 | 3.127 | 1.7696 | 1.77705 | 0.000061 | 71.260002 | 87.800003 | 0.000002 | 8.37 | 8.12 | 7.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.43 |
Polydimethylsiloxane (PDMS) | Air | 0.74 | 0.693 | -41.099998 | 162.300003 | 10 | 0.000222 | 0.17 | 1.95962 | 1.13693 | 2.863 | 3.536 | 1.6382 | 1.64561 | 0.000036 | 79.550003 | 45.880001 | 0.000004 | 5.5 | 5.1 | 5.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.07 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.544 | 0.982 | 14.4 | 179.199997 | 5 | 0.000254 | 0.17 | 1.4897 | 1.07001 | 0.607 | 1.552 | 1.88452 | 1.89365 | 0.000055 | 56.450001 | 55.509998 | 0.000005 | 7.41 | 7.04 | 6.95 | 1,260 | 1,625 | FDTD | 0.38 |
Silicon Dioxide (SiO₂) | Air | 1.828 | 0.216 | -28.1 | 180.199997 | 5 | 0.000001 | 1.33 | 1.80333 | 1.03862 | 0.546 | 0.867 | 1.74575 | 1.75503 | 0.000045 | 68.099998 | 28.34 | 0.000001 | 3.81 | 3.48 | 3.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.62 |
SU-8 | Air | 1.57 | 0.486 | 10.2 | 171.199997 | 10 | 0.000006 | 0.22 | 1.8553 | 1.4596 | 0.629 | 1.52 | 1.64514 | 1.65132 | 0.000038 | 73.5 | 34.099998 | 0.000001 | 8.15 | 7.73 | 7.75 | 1,260 | 1,625 | FDTD | 0.95 |
Polydimethylsiloxane (PDMS) | Air | 1.841 | 0.293 | 6.1 | 153.899994 | 1 | 0.000213 | 0.16 | 1.86242 | 1.37554 | 1.908 | 2.214 | 1.90014 | 1.90737 | 0.000049 | 72.300003 | 15.8 | 0.000004 | 5.66 | 5.35 | 5.3 | 1,260 | 1,625 | FDTD | 2.55 |
Polydimethylsiloxane (PDMS) | Air | 1.574 | 0.951 | -22.5 | 198.5 | 5 | 0.000222 | 0.19 | 1.50599 | 1.42804 | 1.845 | 2.185 | 1.40728 | 1.41253 | 0.000024 | 80.540001 | 46.369999 | 0.000003 | 6.64 | 6.36 | 6.26 | 1,260 | 1,625 | FDTD | 1.55 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.478 | 0.399 | -3.9 | 101.5 | 1 | 0.000145 | 0.15 | 1.5663 | 1.20326 | 1.852 | 2.222 | 1.54735 | 1.5512 | 0.000037 | 61.900002 | 57.07 | 0.000004 | 6.9 | 6.73 | 6.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.99 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.644 | 0.884 | 6.2 | 114.800003 | 1 | 0.000003 | 19.299999 | 1.71584 | 1.28695 | 1.31 | 1.477 | 1.7735 | 1.7747 | 0.000011 | 80.07 | 72.75 | 0.000003 | 0.75 | 0.47 | 0.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.35 |
Silicon Dioxide (SiO₂) | Air | 1.04 | 0.521 | -35.799999 | 137.699997 | 5 | 0.000001 | 1.43 | 1.6487 | 1.28323 | 0.468 | 1.161 | 1.7438 | 1.7508 | 0.00004 | 70.43 | 47.790001 | 0.000004 | 9.92 | 9.63 | 9.73 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.1 |
Silicon Dioxide (SiO₂) | Air | 0.728 | 0.389 | -2.1 | 151.600006 | 5 | 0.000001 | 1.3 | 1.52843 | 1.12207 | 0.347 | 1.026 | 1.77776 | 1.77959 | 0.000012 | 58.380001 | 80.660004 | 0.000001 | 6.88 | 6.44 | 6.57 | 1,260 | 1,625 | FDTD | 2.9 |
SU-8 | Silicon Dioxide (SiO₂) | 1.68 | 0.821 | -49.200001 | 128.399994 | 10 | 0.000008 | 0.27 | 1.92247 | 1.28469 | 2.712 | 4.188 | 1.52673 | 1.533 | 0.000035 | 77.440002 | 29.91 | 0.000003 | 7 | 6.68 | 6.85 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.75 |
Polymethyl Methacrylate (PMMA) | Air | 0.85 | 0.223 | -17.700001 | 187.600006 | 1 | 0.000009 | 0.22 | 1.66563 | 1.23622 | 0.958 | 1.083 | 1.56394 | 1.56824 | 0.000021 | 85.25 | 26.76 | 0.000003 | 3.75 | 3.37 | 3.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.09 |
SU-8 | Silicon Dioxide (SiO₂) | 0.968 | 0.225 | -38.599998 | 146.199997 | 10 | 0.000011 | 0.21 | 1.91763 | 1.48141 | 1.662 | 2.535 | 1.61068 | 1.61708 | 0.000035 | 51.110001 | 19.35 | 0.000004 | 8.5 | 8.33 | 8.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.4 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.827 | 0.345 | 10.2 | 192.800003 | 1 | 0.000267 | 0.15 | 1.92454 | 1.09571 | 2.833 | 3.076 | 1.89247 | 1.89761 | 0.000028 | 51.380001 | 13.74 | 0 | 9.87 | 9.42 | 9.47 | 1,260 | 1,625 | FDTD | 3.58 |
SU-8 | Silicon Dioxide (SiO₂) | 1.023 | 0.916 | -36.400002 | 113.599998 | 1 | 0.000007 | 0.3 | 1.83562 | 1.22449 | 2.596 | 3.295 | 1.55819 | 1.56782 | 0.000064 | 65.93 | 14.35 | 0.000003 | 7.58 | 7.42 | 7.24 | 1,260 | 1,625 | FDTD | 2.35 |
Polymethyl Methacrylate (PMMA) | Air | 1.923 | 0.521 | -42.900002 | 87.300003 | 10 | 0.000014 | 0.21 | 1.54334 | 1.43037 | 0.416 | 1.869 | 1.60813 | 1.61196 | 0.000029 | 78.419998 | 23.700001 | 0.000003 | 6.9 | 6.54 | 6.51 | 1,260 | 1,625 | FDTD | 1.68 |
Polydimethylsiloxane (PDMS) | Air | 1.345 | 0.238 | -10.9 | 92.5 | 5 | 0.000169 | 0.16 | 1.88088 | 1.10835 | 1.294 | 2.275 | 1.7377 | 1.73961 | 0.000018 | 64.650002 | 41.400002 | 0.000004 | 6.3 | 5.85 | 5.85 | 1,260 | 1,625 | FDTD | 2.82 |
SU-8 | Silicon Dioxide (SiO₂) | 1.557 | 0.459 | -42.299999 | 144 | 5 | 0.000008 | 0.27 | 1.98797 | 1.49396 | 1.537 | 2.895 | 1.42797 | 1.43335 | 0.000029 | 80.129997 | 27.940001 | 0 | 3.09 | 2.64 | 2.97 | 1,260 | 1,625 | FDTD | 1.28 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.55 | 0.83 | -7.9 | 111.5 | 1 | 0.00024 | 0.2 | 1.82993 | 1.24897 | 1.199 | 1.927 | 1.78489 | 1.78643 | 0.000013 | 61.400002 | 21.76 | 0.000003 | 1.96 | 1.75 | 1.59 | 1,260 | 1,625 | FDTD | 2.13 |
Polydimethylsiloxane (PDMS) | Air | 0.946 | 0.807 | -20.700001 | 83.199997 | 5 | 0.000168 | 0.17 | 1.75018 | 1.31001 | 2.739 | 3.354 | 1.83579 | 1.84397 | 0.000079 | 70.779999 | 49.209999 | 0.000003 | 8.96 | 8.86 | 8.52 | 1,260 | 1,625 | FDTD | 1.89 |
SU-8 | Silicon Dioxide (SiO₂) | 1.031 | 0.902 | -10.4 | 160 | 1 | 0.000008 | 0.29 | 1.61952 | 1.49941 | 2.762 | 2.877 | 1.92386 | 1.92721 | 0.00002 | 64.239998 | 16.35 | 0.000001 | 5.64 | 5.27 | 5.44 | 1,260 | 1,625 | FDTD | 3.95 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.977 | 0.227 | 0.7 | 117.800003 | 5 | 0.000003 | 16.860001 | 1.7029 | 1.37354 | 0.419 | 1.452 | 1.69388 | 1.69563 | 0.000015 | 88.150002 | 74.849998 | 0 | 2.7 | 2.23 | 2.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.24 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.143 | 0.351 | -12.2 | 151.800003 | 1 | 0.000001 | 1.37 | 1.71272 | 1.1019 | 2.176 | 2.319 | 1.42842 | 1.43422 | 0.000035 | 64.730003 | 40.900002 | 0.000002 | 8.54 | 8.06 | 8.08 | 1,260 | 1,625 | FDTD | 0.89 |
SU-8 | Silicon Dioxide (SiO₂) | 1.492 | 0.257 | -22.5 | 136.800003 | 10 | 0.000011 | 0.24 | 1.73265 | 1.23443 | 2.477 | 3.459 | 1.65263 | 1.65783 | 0.000033 | 70.870003 | 90.139999 | 0.000001 | 7.08 | 6.88 | 6.98 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.1 |
Polymethyl Methacrylate (PMMA) | Air | 1.376 | 0.967 | -2 | 154.199997 | 5 | 0.000014 | 0.2 | 1.52948 | 1.18016 | 0.512 | 1.169 | 1.98631 | 1.99518 | 0.000057 | 79.970001 | 90.779999 | 0.000003 | 9.49 | 9.08 | 9.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.17 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.976 | 0.701 | -46.900002 | 111.5 | 5 | 0.000282 | 0.15 | 1.63555 | 1.2421 | 0.287 | 1.374 | 1.91973 | 1.92761 | 0.00005 | 84.699997 | 32.310001 | 0.000002 | 6.73 | 6.53 | 6.28 | 1,260 | 1,625 | FDTD | 1.96 |
Polymethyl Methacrylate (PMMA) | Air | 1.133 | 0.861 | -28.9 | 137.300003 | 1 | 0.000012 | 0.22 | 1.97718 | 1.27412 | 2.607 | 3.693 | 1.46738 | 1.4741 | 0.00004 | 73.68 | 79.25 | 0.000004 | 2.32 | 1.87 | 2.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.12 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.772 | 0.864 | 5 | 131.300003 | 5 | 0.000011 | 0.21 | 1.64764 | 1.14384 | 2.173 | 3.3 | 1.42069 | 1.42738 | 0.000053 | 89.830002 | 80.599998 | 0.000002 | 4.28 | 4.02 | 3.88 | 1,260 | 1,625 | FDTD | 3.98 |
SU-8 | Silicon Dioxide (SiO₂) | 1.525 | 0.957 | 17.5 | 82.599998 | 10 | 0.00001 | 0.21 | 1.41965 | 1.33603 | 2.962 | 3.303 | 1.72769 | 1.73338 | 0.000087 | 53.919998 | 24.32 | 0.000003 | 7.96 | 7.75 | 7.63 | 1,260 | 1,625 | FDTD | 2.56 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.762 | 0.548 | 5.1 | 180.5 | 1 | 0.000205 | 0.19 | 1.42824 | 1.48351 | 0.993 | 1.576 | 1.43042 | 1.43584 | 0.000031 | 80.080002 | 95.349998 | 0.000001 | 2.74 | 2.25 | 2.47 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.62 |
Silicon Dioxide (SiO₂) | Air | 1.994 | 0.865 | 18 | 182.899994 | 5 | 0.000001 | 1.49 | 1.61695 | 1.25567 | 1.049 | 2.476 | 1.76653 | 1.77448 | 0.000048 | 52.59 | 59.41 | 0.000002 | 4.09 | 3.68 | 3.67 | 1,260 | 1,625 | FDTD | 1.73 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.033 | 0.992 | -40 | 175.199997 | 10 | 0.00012 | 0.16 | 1.44028 | 1.42555 | 2.603 | 3.671 | 1.90696 | 1.90931 | 0.000011 | 89.510002 | 16.110001 | 0.000004 | 7.87 | 7.55 | 7.63 | 1,260 | 1,625 | FDTD | 1.99 |
Silicon Dioxide (SiO₂) | Air | 0.654 | 0.619 | -28.1 | 152 | 1 | 0.000001 | 1.34 | 1.67181 | 1.43407 | 2.199 | 3.67 | 1.87167 | 1.87482 | 0.000017 | 61.419998 | 93.75 | 0.000002 | 6.95 | 6.78 | 6.53 | 1,260 | 1,625 | FDTD | 3.91 |
Polydimethylsiloxane (PDMS) | Air | 1.018 | 0.823 | -12.4 | 123.599998 | 10 | 0.000172 | 0.16 | 1.7737 | 1.38216 | 1.569 | 2.089 | 1.93469 | 1.94301 | 0.000061 | 62.82 | 17.879999 | 0.000002 | 4.2 | 4.1 | 3.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.23 |
Polydimethylsiloxane (PDMS) | Air | 1.135 | 0.3 | -23.6 | 180 | 5 | 0.000288 | 0.15 | 1.96847 | 1.12711 | 2.143 | 2.85 | 1.55398 | 1.55654 | 0.000013 | 66.440002 | 49.220001 | 0.000001 | 9.59 | 9.23 | 9.25 | 1,260 | 1,625 | FDTD | 0.12 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.691 | 0.35 | 1.8 | 103.599998 | 1 | 0.000003 | 17.889999 | 1.4679 | 1.18603 | 0.175 | 0.931 | 1.87377 | 1.87924 | 0.000054 | 68.440002 | 22.540001 | 0.000002 | 3.01 | 2.66 | 2.72 | 1,260 | 1,625 | FDTD | 1.33 |
SU-8 | Silicon Dioxide (SiO₂) | 1.555 | 0.223 | -3.9 | 197.5 | 1 | 0.000011 | 0.2 | 1.89885 | 1.37948 | 2.83 | 4.139 | 1.532 | 1.53323 | 0.000006 | 85.449997 | 39.580002 | 0.000004 | 4.68 | 4.58 | 4.23 | 1,260 | 1,625 | FDTD | 3.57 |
Polydimethylsiloxane (PDMS) | Air | 0.701 | 0.677 | -0.9 | 134.899994 | 1 | 0.0003 | 0.17 | 1.71374 | 1.10102 | 0.323 | 1.088 | 1.77727 | 1.78687 | 0.000071 | 71.110001 | 62.23 | 0.000001 | 3.39 | 3.14 | 2.91 | 1,260 | 1,625 | FDTD | 1.51 |
SU-8 | Air | 1.633 | 0.584 | -13.3 | 110.199997 | 10 | 0.00001 | 0.24 | 1.6816 | 1.39896 | 1.162 | 1.646 | 1.45051 | 1.45628 | 0.000047 | 78.550003 | 13.55 | 0.000001 | 0.98 | 0.84 | 0.65 | 1,260 | 1,625 | FDTD | 1.45 |
Polymethyl Methacrylate (PMMA) | Air | 0.726 | 0.248 | 10.7 | 106.300003 | 1 | 0.00001 | 0.19 | 1.60463 | 1.09134 | 2.582 | 2.789 | 1.67156 | 1.67614 | 0.000048 | 84.099998 | 89 | 0.000002 | 7.76 | 7.34 | 7.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.49 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.373 | 0.704 | -41.700001 | 106.199997 | 10 | 0.000001 | 1.39 | 1.61376 | 1.32002 | 1.934 | 3.197 | 1.5932 | 1.59968 | 0.000044 | 71.18 | 60.459999 | 0.000003 | 3.34 | 3.03 | 3.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.06 |
SU-8 | Silicon Dioxide (SiO₂) | 1.793 | 0.708 | -23.299999 | 153 | 10 | 0.000008 | 0.26 | 1.64669 | 1.03477 | 1.947 | 2.245 | 1.50633 | 1.51185 | 0.000031 | 82.379997 | 79.040001 | 0.000001 | 9.74 | 9.27 | 9.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.59 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.53 | 0.981 | -27.200001 | 158.800003 | 5 | 0.000223 | 0.16 | 1.82832 | 1.06409 | 2.047 | 3.52 | 1.96395 | 1.97097 | 0.000038 | 87.800003 | 23.139999 | 0.000004 | 3.05 | 2.88 | 2.63 | 1,260 | 1,625 | FDTD | 0.18 |
Silicon Nitride (Si₃N₄) | Air | 1.187 | 0.657 | -48.599998 | 187.100006 | 5 | 0.000003 | 15.53 | 1.8088 | 1.25543 | 2.155 | 3.305 | 1.81794 | 1.82222 | 0.000018 | 73.260002 | 95.93 | 0.000001 | 1 | 0.67 | 0.51 | 1,260 | 1,625 | FDTD | 4.31 |
SU-8 | Air | 0.501 | 0.999 | 0.7 | 90.400002 | 10 | 0.000011 | 0.22 | 1.94034 | 1.41101 | 1.701 | 2.185 | 1.74891 | 1.7508 | 0.000021 | 84.870003 | 22.9 | 0.000004 | 9.12 | 8.64 | 8.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.08 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.797 | 0.734 | 6.8 | 89.099998 | 1 | 0.000138 | 0.17 | 1.69614 | 1.08877 | 0.72 | 1.287 | 1.52813 | 1.53412 | 0.000073 | 64.760002 | 65.900002 | 0.000001 | 3.83 | 3.54 | 3.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.75 |
Polymethyl Methacrylate (PMMA) | Air | 1.394 | 0.275 | -27.299999 | 196.600006 | 1 | 0.00001 | 0.22 | 1.53901 | 1.49509 | 1.677 | 1.836 | 1.52793 | 1.53662 | 0.000039 | 77.610001 | 72.529999 | 0.000005 | 7.89 | 7.72 | 7.59 | 1,260 | 1,625 | FDTD | 0.76 |
Polydimethylsiloxane (PDMS) | Air | 1.293 | 0.371 | -43.200001 | 197.600006 | 5 | 0.000234 | 0.2 | 1.53942 | 1.42306 | 2.469 | 2.631 | 1.58063 | 1.58673 | 0.000025 | 89.760002 | 27.58 | 0.000003 | 8.07 | 7.8 | 7.93 | 1,260 | 1,625 | FDTD | 4.48 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.701 | 0.888 | -27.799999 | 167.600006 | 5 | 0.000012 | 0.23 | 1.64087 | 1.02125 | 1.192 | 2.337 | 1.92022 | 1.92646 | 0.000032 | 85.559998 | 74.290001 | 0.000002 | 7.1 | 6.98 | 6.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.52 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.67 | 0.505 | 13.9 | 183.899994 | 10 | 0.000147 | 0.18 | 1.45238 | 1.02078 | 2.868 | 3.301 | 1.96383 | 1.9724 | 0.00005 | 77.190002 | 29.18 | 0 | 0.97 | 0.63 | 0.76 | 1,260 | 1,625 | FDTD | 0.15 |
Silicon Nitride (Si₃N₄) | Air | 0.561 | 0.483 | -8.1 | 81.300003 | 10 | 0.000003 | 19.370001 | 1.70485 | 1.33979 | 0.65 | 0.925 | 1.78584 | 1.78798 | 0.000024 | 82.410004 | 78.519997 | 0.000003 | 4.51 | 4.33 | 4.18 | 1,260 | 1,625 | FDTD | 3.33 |
Polydimethylsiloxane (PDMS) | Air | 1.703 | 0.276 | 18.200001 | 130.699997 | 5 | 0.000235 | 0.17 | 1.69694 | 1.09213 | 0.277 | 1.654 | 1.53764 | 1.54574 | 0.000072 | 68.400002 | 72.089996 | 0 | 4.23 | 3.87 | 3.9 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.26 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.504 | 0.665 | -48.299999 | 108.400002 | 1 | 0.000003 | 15.63 | 1.48879 | 1.18924 | 0.601 | 0.852 | 1.77169 | 1.7768 | 0.000033 | 89.800003 | 31.82 | 0.000002 | 4.55 | 4.2 | 4.28 | 1,260 | 1,625 | FDTD | 0.1 |
Polymethyl Methacrylate (PMMA) | Air | 0.549 | 0.853 | -28.200001 | 190.5 | 10 | 0.000008 | 0.2 | 1.88528 | 1.24484 | 2.376 | 3.615 | 1.74074 | 1.74668 | 0.000027 | 88.110001 | 39 | 0.000005 | 9.78 | 9.35 | 9.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.75 |
Silicon Nitride (Si₃N₄) | Air | 1.816 | 0.783 | -24 | 170.399994 | 1 | 0.000003 | 18.02 | 1.75346 | 1.45793 | 0.555 | 0.741 | 1.61154 | 1.61949 | 0.000041 | 83.370003 | 30.6 | 0.000004 | 4.61 | 4.27 | 4.38 | 1,260 | 1,625 | FDTD | 4.57 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.016 | 0.582 | -44.700001 | 184.199997 | 5 | 0.000015 | 0.24 | 1.48007 | 1.34053 | 1.692 | 2.706 | 1.67856 | 1.68636 | 0.000034 | 66.290001 | 35 | 0.000003 | 8.66 | 8.41 | 8.55 | 1,260 | 1,625 | FDTD | 4.76 |
Silicon Dioxide (SiO₂) | Air | 1.256 | 0.533 | -26.9 | 123 | 10 | 0.000001 | 1.39 | 1.84265 | 1.20056 | 2.028 | 3.064 | 1.87979 | 1.88229 | 0.000017 | 79.650002 | 99.129997 | 0.000003 | 1.07 | 0.79 | 0.63 | 1,260 | 1,625 | FDTD | 4.31 |
SU-8 | Silicon Dioxide (SiO₂) | 1.824 | 0.88 | -48.700001 | 185.800003 | 10 | 0.000009 | 0.25 | 1.62106 | 1.34567 | 2.911 | 3.263 | 1.86265 | 1.8714 | 0.000037 | 83.279999 | 94.440002 | 0.000003 | 6.91 | 6.55 | 6.44 | 1,260 | 1,625 | FDTD | 0.99 |
Polydimethylsiloxane (PDMS) | Air | 1.532 | 0.304 | -49.400002 | 92.800003 | 1 | 0.000115 | 0.15 | 1.89464 | 1.46804 | 0.551 | 1.02 | 1.82057 | 1.82344 | 0.00002 | 60.48 | 98.5 | 0.000004 | 7.04 | 6.76 | 6.87 | 1,260 | 1,625 | FDTD | 4.51 |
Silicon Nitride (Si₃N₄) | Air | 1.589 | 0.922 | -31.299999 | 82 | 1 | 0.000003 | 16.68 | 1.80277 | 1.3708 | 1.581 | 2.044 | 1.88676 | 1.8916 | 0.000043 | 85.349998 | 43.639999 | 0.000003 | 4.16 | 3.75 | 4.02 | 1,260 | 1,625 | FDTD | 3.97 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.652 | 0.985 | -24.4 | 156.699997 | 10 | 0.000103 | 0.19 | 1.90201 | 1.19079 | 0.633 | 0.954 | 1.62522 | 1.63062 | 0.00003 | 56.5 | 78.209999 | 0.000003 | 2.69 | 2.3 | 2.51 | 1,260 | 1,625 | FDTD | 0.71 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.952 | 0.355 | 13.2 | 181.699997 | 1 | 0.000003 | 15.03 | 1.5633 | 1.16744 | 1.556 | 2.051 | 1.84755 | 1.8497 | 0.000013 | 54.360001 | 43.650002 | 0.000001 | 8.52 | 8.33 | 8.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.11 |
SU-8 | Air | 1.656 | 0.447 | 18.200001 | 133.699997 | 1 | 0.000012 | 0.26 | 1.58329 | 1.05107 | 2.396 | 3.758 | 1.46748 | 1.47386 | 0.000055 | 60.77 | 82.110001 | 0.000002 | 4.75 | 4.44 | 4.3 | 1,260 | 1,625 | FDTD | 4.08 |
Polymethyl Methacrylate (PMMA) | Air | 1.348 | 0.974 | -44.799999 | 112 | 5 | 0.000014 | 0.22 | 1.92196 | 1.1054 | 2.827 | 3.328 | 1.98427 | 1.98772 | 0.000022 | 89.199997 | 66.620003 | 0.000004 | 6.86 | 6.7 | 6.46 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.32 |
Polymethyl Methacrylate (PMMA) | Air | 0.527 | 0.975 | 0.7 | 192 | 5 | 0.000009 | 0.2 | 1.89916 | 1.14729 | 2.393 | 3.18 | 1.75053 | 1.75432 | 0.00002 | 83.75 | 52.860001 | 0.000003 | 6.22 | 5.89 | 5.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.98 |
Polymethyl Methacrylate (PMMA) | Air | 0.571 | 0.71 | -41.900002 | 151.100006 | 5 | 0.000013 | 0.24 | 1.51338 | 1.19631 | 2.644 | 3.08 | 1.82572 | 1.83261 | 0.000036 | 85.230003 | 53.23 | 0.000001 | 7.1 | 6.75 | 6.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.68 |
Silicon Nitride (Si₃N₄) | Air | 0.596 | 0.421 | -9.7 | 172.100006 | 5 | 0.000003 | 17.440001 | 1.79455 | 1.33952 | 2.988 | 3.352 | 1.44468 | 1.45086 | 0.000034 | 68.43 | 59.189999 | 0.000002 | 2.65 | 2.3 | 2.48 | 1,260 | 1,625 | FDTD | 3.12 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.641 | 0.843 | -28.200001 | 139.399994 | 5 | 0.000013 | 0.21 | 1.68919 | 1.07358 | 0.237 | 1.002 | 1.65406 | 1.66203 | 0.000048 | 54.669998 | 80.400002 | 0.000005 | 8.95 | 8.64 | 8.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.89 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.712 | 0.668 | -11.7 | 125.699997 | 1 | 0.00001 | 0.2 | 1.86796 | 1.09472 | 2.531 | 3.053 | 1.5939 | 1.60379 | 0.000072 | 62.380001 | 76.110001 | 0.000004 | 3.19 | 3 | 2.92 | 1,260 | 1,625 | FDTD | 3.24 |
Polydimethylsiloxane (PDMS) | Air | 1.349 | 0.237 | -27.700001 | 91.599998 | 10 | 0.000111 | 0.19 | 1.8837 | 1.08988 | 2.194 | 2.931 | 1.78859 | 1.79578 | 0.00006 | 69.839996 | 49.91 | 0.000002 | 0.53 | 0.25 | 0.07 | 1,260 | 1,625 | FDTD | 0.17 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.932 | 0.418 | -45.400002 | 151.899994 | 1 | 0.000003 | 19.32 | 1.89413 | 1.26529 | 2.935 | 3.071 | 1.71796 | 1.72121 | 0.000016 | 65.949997 | 34.209999 | 0.000005 | 2.02 | 1.53 | 1.59 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.82 |
Polydimethylsiloxane (PDMS) | Air | 1.543 | 0.418 | -31.9 | 188.899994 | 5 | 0.000147 | 0.16 | 1.52704 | 1.27861 | 2.233 | 2.611 | 1.70642 | 1.71431 | 0.000036 | 89.769997 | 55.689999 | 0.000002 | 7.85 | 7.49 | 7.59 | 1,260 | 1,625 | FDTD | 0.26 |
SU-8 | Silicon Dioxide (SiO₂) | 1.54 | 0.658 | 0.2 | 172.100006 | 1 | 0.000006 | 0.21 | 1.92093 | 1.38437 | 2.872 | 3.562 | 1.84163 | 1.8455 | 0.000023 | 75.050003 | 25.15 | 0.000001 | 5.33 | 5.14 | 5.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.37 |
Polydimethylsiloxane (PDMS) | Air | 1.834 | 0.971 | -46.599998 | 167 | 1 | 0.000201 | 0.18 | 1.66102 | 1.27427 | 2.385 | 3.804 | 1.85011 | 1.85483 | 0.000022 | 50.099998 | 61.580002 | 0.000001 | 6.02 | 5.55 | 5.62 | 1,260 | 1,625 | FDTD | 1.65 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.748 | 0.205 | -5.8 | 146.399994 | 10 | 0.000158 | 0.19 | 1.9653 | 1.23229 | 1.712 | 2.343 | 1.42753 | 1.43234 | 0.000032 | 80.129997 | 30.540001 | 0.000003 | 5.84 | 5.37 | 5.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.05 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.269 | 0.8 | -42 | 178.399994 | 10 | 0.000001 | 1.47 | 1.41628 | 1.44785 | 2.395 | 3.025 | 1.92655 | 1.93185 | 0.000024 | 58.209999 | 51.939999 | 0.000003 | 2.42 | 2.07 | 2.1 | 1,260 | 1,625 | FDTD | 3.74 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.952 | 0.855 | 16.5 | 174.699997 | 5 | 0.000001 | 1.4 | 1.84558 | 1.3308 | 2.982 | 4.381 | 1.60486 | 1.61238 | 0.000048 | 63.900002 | 14.99 | 0.000001 | 0.87 | 0.72 | 0.75 | 1,260 | 1,625 | FDTD | 4.59 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.276 | 0.295 | -34.599998 | 155 | 10 | 0.00001 | 0.21 | 1.47417 | 1.31423 | 1.655 | 2.729 | 1.40897 | 1.41533 | 0.000034 | 72.620003 | 19.49 | 0.000004 | 6.73 | 6.37 | 6.61 | 1,260 | 1,625 | FDTD | 1.78 |
Silicon Dioxide (SiO₂) | Air | 0.802 | 0.932 | -46.700001 | 191.600006 | 10 | 0.000001 | 1.34 | 1.82592 | 1.38442 | 2.141 | 2.694 | 1.70179 | 1.7047 | 0.000012 | 58.209999 | 68.790001 | 0.000001 | 3.22 | 2.75 | 2.99 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.02 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.131 | 0.586 | -33.200001 | 87 | 10 | 0.000251 | 0.19 | 1.89076 | 1.31693 | 2.36 | 3.362 | 1.52264 | 1.5288 | 0.000051 | 73.940002 | 30.67 | 0.000001 | 4.86 | 4.6 | 4.53 | 1,260 | 1,625 | FDTD | 2.43 |
Silicon Nitride (Si₃N₄) | Air | 1.972 | 0.719 | 10.6 | 155.800003 | 10 | 0.000003 | 19.120001 | 1.85768 | 1.34099 | 2.071 | 3.509 | 1.61153 | 1.61663 | 0.000035 | 79.910004 | 68.669998 | 0 | 2.11 | 1.65 | 1.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.11 |
Silicon Dioxide (SiO₂) | Air | 1.761 | 0.952 | -31.799999 | 163.699997 | 1 | 0.000001 | 1.47 | 1.58374 | 1.47167 | 0.247 | 1.408 | 1.81179 | 1.821 | 0.000047 | 87.93 | 41.099998 | 0.000003 | 5.52 | 5.27 | 5.41 | 1,260 | 1,625 | FDTD | 4.68 |
Polydimethylsiloxane (PDMS) | Air | 1.939 | 0.855 | -5.8 | 189.300003 | 1 | 0.000289 | 0.2 | 1.99843 | 1.12174 | 1.149 | 1.74 | 1.54852 | 1.55709 | 0.000044 | 56.049999 | 64.120003 | 0.000004 | 3.44 | 2.97 | 3.09 | 1,260 | 1,625 | FDTD | 0.91 |
Polymethyl Methacrylate (PMMA) | Air | 0.965 | 0.265 | -35.200001 | 184.300003 | 10 | 0.00001 | 0.19 | 1.67696 | 1.43055 | 2.362 | 2.533 | 1.59004 | 1.59623 | 0.000028 | 59.34 | 66.339996 | 0.000003 | 3.63 | 3.38 | 3.32 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.68 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.273 | 0.966 | 1.5 | 146.5 | 5 | 0.000151 | 0.19 | 1.42156 | 1.03628 | 0.791 | 2.226 | 1.47826 | 1.48451 | 0.000043 | 82.010002 | 66.720001 | 0.000002 | 6.55 | 6.14 | 6.41 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.63 |
Polymethyl Methacrylate (PMMA) | Air | 0.575 | 0.291 | 19.9 | 138.399994 | 10 | 0.000011 | 0.22 | 1.76771 | 1.09459 | 0.86 | 1.689 | 1.77163 | 1.77934 | 0.000065 | 89.959999 | 73.989998 | 0.000002 | 1.85 | 1.47 | 1.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.89 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.381 | 0.252 | -8.8 | 118.099998 | 5 | 0.000228 | 0.15 | 1.43953 | 1.19153 | 0.751 | 1.548 | 1.62365 | 1.62643 | 0.000022 | 50.5 | 98.970001 | 0.000002 | 5.47 | 5.2 | 5.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.7 |
SU-8 | Air | 1.218 | 0.201 | -8.3 | 172.5 | 5 | 0.00001 | 0.23 | 1.64463 | 1.15499 | 1.974 | 2.104 | 1.5724 | 1.58207 | 0.000053 | 77.910004 | 30.879999 | 0.000004 | 5.55 | 5.17 | 5.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.43 |
Silicon Dioxide (SiO₂) | Air | 1.809 | 0.7 | -26.700001 | 141.300003 | 1 | 0.000001 | 1.44 | 1.65079 | 1.28822 | 1.036 | 2.252 | 1.43759 | 1.43997 | 0.000014 | 59.25 | 86.110001 | 0.000004 | 7.65 | 7.27 | 7.49 | 1,260 | 1,625 | FDTD | 2.49 |
SU-8 | Air | 0.885 | 0.972 | -45.400002 | 113.800003 | 10 | 0.000007 | 0.24 | 1.63662 | 1.48868 | 0.686 | 1.064 | 1.65352 | 1.65723 | 0.000023 | 65.410004 | 46.240002 | 0.000002 | 8.17 | 8.01 | 7.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.71 |
Subsets and Splits