waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.9 | 0.243 | -20.200001 | 171.199997 | 10 | 0.000003 | 18.799999 | 1.71876 | 1.06886 | 1.772 | 2.897 | 1.96231 | 1.96622 | 0.00002 | 83.660004 | 85.82 | 0.000003 | 4.16 | 4.02 | 4.04 | 1,260 | 1,625 | FDTD | 1.65 |
Silicon Nitride (Si₃N₄) | Air | 1.929 | 0.681 | -19.1 | 152.199997 | 1 | 0.000003 | 19.280001 | 1.40591 | 1.01934 | 0.644 | 1.434 | 1.66519 | 1.66927 | 0.000024 | 61.07 | 72.779999 | 0.000003 | 7.37 | 7.03 | 7.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.93 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.567 | 0.979 | -15.9 | 176.800003 | 1 | 0.000236 | 0.17 | 1.64456 | 1.32672 | 2.335 | 3.403 | 1.42798 | 1.43776 | 0.000051 | 67.970001 | 33.150002 | 0.000002 | 8.76 | 8.32 | 8.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.13 |
Polydimethylsiloxane (PDMS) | Air | 1.597 | 0.587 | -39.700001 | 91.800003 | 5 | 0.000192 | 0.16 | 1.78898 | 1.42626 | 0.564 | 1.238 | 1.71331 | 1.72062 | 0.000056 | 66.470001 | 95.839996 | 0.000004 | 7.84 | 7.4 | 7.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.5 |
Silicon Nitride (Si₃N₄) | Air | 1.168 | 0.304 | -24.4 | 92.900002 | 1 | 0.000003 | 15.84 | 1.93086 | 1.29335 | 0.989 | 1.271 | 1.51116 | 1.51466 | 0.00003 | 79.110001 | 17.99 | 0.000005 | 5.69 | 5.41 | 5.22 | 1,260 | 1,625 | FDTD | 3.89 |
Silicon Dioxide (SiO₂) | Air | 0.79 | 0.22 | -11.8 | 86 | 5 | 0.000001 | 1.5 | 1.71935 | 1.25979 | 1.486 | 2.954 | 1.62643 | 1.63562 | 0.000094 | 73.650002 | 19.08 | 0.000003 | 3.52 | 3.27 | 3.37 | 1,260 | 1,625 | FDTD | 2.25 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.684 | 0.791 | -22.799999 | 120.900002 | 10 | 0.00025 | 0.18 | 1.54455 | 1.17457 | 0.882 | 1.78 | 1.95219 | 1.96153 | 0.000065 | 86.199997 | 76.07 | 0.000001 | 3.34 | 3.17 | 2.98 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.4 |
Polydimethylsiloxane (PDMS) | Air | 1.161 | 0.711 | -30 | 104.900002 | 1 | 0.000249 | 0.15 | 1.66255 | 1.03139 | 0.899 | 1.553 | 1.73959 | 1.74758 | 0.000059 | 67.330002 | 38.939999 | 0.000005 | 9.89 | 9.62 | 9.73 | 1,260 | 1,625 | FDTD | 0.72 |
SU-8 | Silicon Dioxide (SiO₂) | 1.219 | 0.772 | -6.8 | 143.100006 | 10 | 0.000007 | 0.27 | 1.73905 | 1.03694 | 1.077 | 1.251 | 1.43298 | 1.44188 | 0.000059 | 84.050003 | 74.660004 | 0.000003 | 2.01 | 1.74 | 1.68 | 1,260 | 1,625 | FDTD | 4.22 |
Polymethyl Methacrylate (PMMA) | Air | 1.337 | 0.212 | -11.9 | 167.800003 | 1 | 0.000011 | 0.25 | 1.44262 | 1.43558 | 0.86 | 1.729 | 1.63937 | 1.64577 | 0.000036 | 73.550003 | 90.129997 | 0.000002 | 8.93 | 8.65 | 8.74 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.63 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.783 | 0.675 | -33.900002 | 173.600006 | 10 | 0.000003 | 18.59 | 1.57958 | 1.49924 | 2.547 | 3.375 | 1.44185 | 1.44365 | 0.000009 | 76.050003 | 15.37 | 0.000002 | 0.97 | 0.51 | 0.86 | 1,260 | 1,625 | FDTD | 0.79 |
Polymethyl Methacrylate (PMMA) | Air | 0.538 | 0.286 | -32 | 81 | 10 | 0.000014 | 0.24 | 1.92131 | 1.21146 | 2.232 | 2.885 | 1.8052 | 1.81211 | 0.000061 | 50.139999 | 41.459999 | 0.000003 | 7.39 | 7.23 | 6.96 | 1,260 | 1,625 | FDTD | 1.14 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.39 | 0.836 | -22.9 | 97.199997 | 10 | 0.000003 | 18.07 | 1.64781 | 1.44211 | 2.178 | 3.326 | 1.81008 | 1.81742 | 0.000061 | 89.690002 | 92.629997 | 0.000001 | 8.83 | 8.69 | 8.58 | 1,260 | 1,625 | FDTD | 1.66 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.273 | 0.48 | -13.1 | 93.099998 | 5 | 0.000001 | 1.41 | 1.41988 | 1.02744 | 0.32 | 1.528 | 1.47758 | 1.48126 | 0.000035 | 67.849998 | 87 | 0.000003 | 4.28 | 3.85 | 4.15 | 1,260 | 1,625 | FDTD | 0.4 |
SU-8 | Silicon Dioxide (SiO₂) | 1.978 | 0.688 | 6.4 | 176 | 1 | 0.000011 | 0.24 | 1.88852 | 1.20927 | 2.162 | 3.633 | 1.41012 | 1.4148 | 0.000028 | 60.110001 | 35.610001 | 0.000001 | 8.04 | 7.93 | 7.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.68 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.684 | 0.706 | -47.400002 | 170.100006 | 10 | 0.000155 | 0.19 | 1.53784 | 1.39071 | 1.848 | 2.675 | 1.50635 | 1.51353 | 0.000033 | 54.939999 | 95.779999 | 0.000004 | 8.25 | 8.01 | 8.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.76 |
Polymethyl Methacrylate (PMMA) | Air | 0.678 | 0.289 | -24.700001 | 106.699997 | 1 | 0.000008 | 0.23 | 1.58053 | 1.00404 | 0.762 | 0.962 | 1.94316 | 1.95219 | 0.000069 | 84.629997 | 84.269997 | 0.000003 | 4.63 | 4.34 | 4.34 | 1,260 | 1,625 | FDTD | 4.47 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.93 | 0.488 | -8.4 | 124.599998 | 1 | 0.000141 | 0.15 | 1.71477 | 1.15563 | 0.317 | 1.166 | 1.70165 | 1.70477 | 0.000023 | 85.529999 | 95.889999 | 0.000003 | 3.95 | 3.83 | 3.76 | 1,260 | 1,625 | FDTD | 2.98 |
Polydimethylsiloxane (PDMS) | Air | 0.55 | 0.674 | -14.9 | 125.599998 | 1 | 0.000128 | 0.19 | 1.45341 | 1.4679 | 0.702 | 1.471 | 1.58312 | 1.58496 | 0.000013 | 58.209999 | 68.699997 | 0.000004 | 7.35 | 6.89 | 7.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.96 |
SU-8 | Silicon Dioxide (SiO₂) | 1.595 | 0.243 | -38.200001 | 198.100006 | 5 | 0.000009 | 0.26 | 1.55019 | 1.36285 | 1.078 | 1.582 | 1.97317 | 1.97624 | 0.000013 | 78.32 | 15.68 | 0.000003 | 6.82 | 6.34 | 6.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.98 |
Polydimethylsiloxane (PDMS) | Air | 0.933 | 0.829 | -15.4 | 198.300003 | 5 | 0.000141 | 0.17 | 1.7865 | 1.01833 | 2.523 | 3.069 | 1.45837 | 1.46776 | 0.000044 | 87.739998 | 69.040001 | 0.000005 | 0.92 | 0.52 | 0.78 | 1,260 | 1,625 | FDTD | 2.86 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.826 | 0.201 | -0.9 | 194 | 5 | 0.000003 | 16.92 | 1.93129 | 1.32431 | 1.836 | 2.79 | 1.56811 | 1.57183 | 0.000019 | 52.279999 | 51.310001 | 0.000003 | 3.72 | 3.41 | 3.25 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.07 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.691 | 0.918 | -25.6 | 122 | 10 | 0.000003 | 18.41 | 1.56806 | 1.25219 | 0.233 | 0.497 | 1.92867 | 1.93134 | 0.000018 | 56.43 | 78.660004 | 0.000002 | 6.99 | 6.62 | 6.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.58 |
Polymethyl Methacrylate (PMMA) | Air | 0.645 | 0.862 | 0.1 | 159.5 | 10 | 0.000014 | 0.22 | 1.4782 | 1.12058 | 0.652 | 1.835 | 1.84674 | 1.85013 | 0.000021 | 83.970001 | 84.709999 | 0.000001 | 9.69 | 9.25 | 9.3 | 1,260 | 1,625 | FDTD | 0.28 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.574 | 0.346 | 16 | 182.899994 | 5 | 0.000007 | 0.24 | 1.80682 | 1.0086 | 2.436 | 3.364 | 1.47323 | 1.48142 | 0.000049 | 57.900002 | 71.910004 | 0.000001 | 5.85 | 5.58 | 5.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 2 |
SU-8 | Silicon Dioxide (SiO₂) | 1.536 | 0.245 | -40.200001 | 102.199997 | 1 | 0.000007 | 0.25 | 1.91796 | 1.24158 | 0.453 | 0.813 | 1.57589 | 1.58117 | 0.000037 | 51.48 | 95.910004 | 0.000003 | 9.77 | 9.53 | 9.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.11 |
SU-8 | Air | 1.399 | 0.671 | 6.1 | 121.599998 | 1 | 0.000011 | 0.24 | 1.8659 | 1.33471 | 0.839 | 1.334 | 1.8666 | 1.87033 | 0.000032 | 74.900002 | 15.52 | 0.000004 | 7.55 | 7.1 | 7.26 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.4 |
Polymethyl Methacrylate (PMMA) | Air | 1.676 | 0.851 | -35 | 123 | 1 | 0.000013 | 0.22 | 1.94457 | 1.34917 | 0.291 | 0.572 | 1.95486 | 1.95887 | 0.000025 | 70.209999 | 85.169998 | 0.000001 | 1.37 | 0.89 | 0.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.59 |
SU-8 | Air | 1.219 | 0.975 | -21.700001 | 130 | 5 | 0.000009 | 0.24 | 1.74083 | 1.46383 | 2.646 | 2.955 | 1.93737 | 1.93973 | 0.000016 | 69.529999 | 41.439999 | 0 | 6.74 | 6.29 | 6.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.69 |
Silicon Nitride (Si₃N₄) | Air | 0.873 | 0.669 | -18.6 | 92 | 1 | 0.000003 | 19.4 | 1.90129 | 1.26679 | 0.577 | 1.656 | 1.53023 | 1.5328 | 0.000023 | 89.040001 | 79.580002 | 0.000001 | 2.18 | 1.83 | 1.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.73 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.628 | 0.474 | 18.200001 | 188.100006 | 5 | 0.000003 | 17.83 | 1.63983 | 1.47981 | 0.369 | 1.217 | 1.94304 | 1.949 | 0.000035 | 57.98 | 63.200001 | 0.000004 | 4.55 | 4.26 | 4.13 | 1,260 | 1,625 | FDTD | 1.09 |
Polymethyl Methacrylate (PMMA) | Air | 0.524 | 0.972 | -24.5 | 102.599998 | 10 | 0.000013 | 0.2 | 1.44687 | 1.08369 | 2.324 | 3.552 | 1.51118 | 1.52114 | 0.000078 | 80.870003 | 79.699997 | 0.000003 | 1.97 | 1.75 | 1.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.51 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.282 | 0.568 | -37.900002 | 149.600006 | 1 | 0.000001 | 1.35 | 1.56497 | 1.0252 | 1.344 | 2.497 | 1.80553 | 1.81422 | 0.000046 | 70.300003 | 21.84 | 0.000005 | 7.43 | 6.97 | 7.1 | 1,260 | 1,625 | FDTD | 0.85 |
Silicon Nitride (Si₃N₄) | Air | 1.841 | 0.746 | -22.799999 | 155.899994 | 1 | 0.000003 | 16.700001 | 1.9968 | 1.24463 | 1.995 | 2.463 | 1.96048 | 1.96793 | 0.000042 | 51.07 | 60.34 | 0.000003 | 4.81 | 4.67 | 4.61 | 1,260 | 1,625 | FDTD | 2.06 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.633 | 0.491 | -6.8 | 148.699997 | 10 | 0.000233 | 0.19 | 1.57352 | 1.01218 | 1.961 | 2.076 | 1.80087 | 1.80368 | 0.000018 | 73.309998 | 61.669998 | 0.000005 | 9.2 | 8.73 | 8.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
Polydimethylsiloxane (PDMS) | Air | 1.764 | 0.679 | 16.700001 | 113.900002 | 1 | 0.000139 | 0.16 | 1.80798 | 1.47737 | 2.725 | 3.572 | 1.98123 | 1.98472 | 0.000036 | 55.02 | 74.580002 | 0.000002 | 9.13 | 8.69 | 8.77 | 1,260 | 1,625 | FDTD | 2.5 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.686 | 0.497 | -45 | 145 | 10 | 0.000001 | 1.42 | 1.89036 | 1.22703 | 0.18 | 0.487 | 1.62189 | 1.62593 | 0.000021 | 68.830002 | 85.529999 | 0.000001 | 0.7 | 0.34 | 0.39 | 1,260 | 1,625 | FDTD | 4.44 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.521 | 0.567 | -42.900002 | 181.800003 | 10 | 0.000001 | 1.31 | 1.57702 | 1.24336 | 1.085 | 1.228 | 1.98081 | 1.98202 | 0.000005 | 71.919998 | 65.959999 | 0.000005 | 5.76 | 5.38 | 5.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.71 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.57 | 0.532 | 9.4 | 190.699997 | 5 | 0.0003 | 0.19 | 1.56517 | 1.25895 | 1.505 | 2.544 | 1.48762 | 1.49417 | 0.000036 | 73.290001 | 33.599998 | 0.000002 | 8.07 | 7.71 | 7.88 | 1,260 | 1,625 | FDTD | 4.64 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.888 | 0.894 | -34.299999 | 129.199997 | 1 | 0.000001 | 1.48 | 1.50817 | 1.02301 | 1.722 | 2.51 | 1.94458 | 1.95315 | 0.000052 | 65.650002 | 64.839996 | 0.000003 | 7.51 | 7.07 | 7.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.5 |
SU-8 | Silicon Dioxide (SiO₂) | 1.461 | 0.251 | -25.9 | 186.100006 | 5 | 0.000008 | 0.26 | 1.89073 | 1.29706 | 0.842 | 1.011 | 1.92809 | 1.9363 | 0.000039 | 70.059998 | 32.900002 | 0.000001 | 1.27 | 1.02 | 1.04 | 1,260 | 1,625 | FDTD | 1.01 |
SU-8 | Air | 1.497 | 0.622 | 15.7 | 112.300003 | 1 | 0.000012 | 0.21 | 1.51407 | 1.04531 | 2.791 | 2.991 | 1.50075 | 1.50615 | 0.000056 | 51.75 | 60.299999 | 0.000001 | 2.55 | 2.43 | 2.07 | 1,260 | 1,625 | FDTD | 3.2 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.56 | 0.264 | -47.099998 | 184.699997 | 10 | 0.000001 | 1.32 | 1.75041 | 1.20377 | 2.768 | 4.071 | 1.74092 | 1.74776 | 0.00003 | 84.879997 | 90.230003 | 0.000003 | 2.43 | 2.02 | 2.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.17 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.867 | 0.533 | -37 | 118.699997 | 1 | 0.000008 | 0.25 | 1.45987 | 1.46463 | 0.235 | 1.335 | 1.60924 | 1.61175 | 0.000016 | 77.190002 | 33.299999 | 0.000004 | 8.29 | 7.79 | 8.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.76 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.563 | 0.247 | 16.1 | 148.399994 | 10 | 0.000003 | 15.76 | 1.94379 | 1.16978 | 1.29 | 1.85 | 1.91898 | 1.92853 | 0.000072 | 70.839996 | 22.190001 | 0.000004 | 8.85 | 8.64 | 8.57 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.39 |
SU-8 | Silicon Dioxide (SiO₂) | 0.695 | 0.731 | 1.4 | 170.100006 | 1 | 0.000007 | 0.3 | 1.96106 | 1.19613 | 1.669 | 2.095 | 1.58303 | 1.5876 | 0.000027 | 51.52 | 93.889999 | 0.000004 | 8.29 | 7.85 | 7.92 | 1,260 | 1,625 | FDTD | 1.25 |
SU-8 | Air | 1.312 | 0.704 | 1.3 | 120.300003 | 1 | 0.000006 | 0.23 | 1.99052 | 1.33045 | 1.634 | 2.338 | 1.99708 | 2.00244 | 0.000045 | 86.550003 | 22.09 | 0.000001 | 6.41 | 5.93 | 6.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.53 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.742 | 0.403 | -11.7 | 133.199997 | 1 | 0.000003 | 18.26 | 1.4927 | 1.12376 | 2.575 | 2.757 | 1.87632 | 1.87977 | 0.000024 | 81.059998 | 38.34 | 0.000002 | 1.34 | 1.2 | 1.24 | 1,260 | 1,625 | FDTD | 0.9 |
Silicon Dioxide (SiO₂) | Air | 1.607 | 0.378 | -27.299999 | 90.5 | 1 | 0.000001 | 1.49 | 1.49707 | 1.33581 | 2.726 | 3.928 | 1.80097 | 1.80979 | 0.000075 | 62.139999 | 21.120001 | 0.000002 | 9.27 | 8.93 | 9.04 | 1,260 | 1,625 | FDTD | 3.03 |
SU-8 | Air | 1.981 | 0.486 | -22.6 | 123.800003 | 10 | 0.000007 | 0.23 | 1.77605 | 1.20207 | 1.544 | 1.742 | 1.55471 | 1.55905 | 0.00003 | 61.52 | 40.57 | 0.000002 | 9.25 | 8.98 | 8.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.87 |
Polydimethylsiloxane (PDMS) | Air | 1.221 | 0.687 | -41 | 164.300003 | 10 | 0.000191 | 0.16 | 1.63799 | 1.39431 | 1.239 | 1.967 | 1.57312 | 1.58078 | 0.000037 | 61.450001 | 68.050003 | 0.000001 | 9.05 | 8.9 | 8.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.97 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.894 | 0.329 | -20.799999 | 164.600006 | 10 | 0.000209 | 0.17 | 1.82053 | 1.35234 | 2.363 | 3.696 | 1.92232 | 1.93145 | 0.000049 | 71.139999 | 11.73 | 0.000002 | 4.4 | 4 | 3.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
Silicon Nitride (Si₃N₄) | Air | 1.052 | 0.308 | -2.5 | 99.800003 | 10 | 0.000003 | 19.290001 | 1.71174 | 1.4308 | 1.393 | 1.998 | 1.92766 | 1.92997 | 0.000023 | 82.25 | 22.190001 | 0.000001 | 1.98 | 1.84 | 1.52 | 1,260 | 1,625 | FDTD | 0.57 |
Polydimethylsiloxane (PDMS) | Air | 0.835 | 0.938 | -29.799999 | 122 | 10 | 0.000249 | 0.17 | 1.66828 | 1.19578 | 1.111 | 1.913 | 1.82298 | 1.83041 | 0.000049 | 86.32 | 98.209999 | 0.000001 | 0.57 | 0.38 | 0.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.66 |
Silicon Dioxide (SiO₂) | Air | 1.946 | 0.635 | -36.900002 | 114 | 5 | 0.000001 | 1.31 | 1.77671 | 1.48193 | 0.703 | 1.461 | 1.97327 | 1.9773 | 0.000027 | 54.759998 | 10.84 | 0.000002 | 5 | 4.78 | 4.54 | 1,260 | 1,625 | FDTD | 0.4 |
Silicon Nitride (Si₃N₄) | Air | 1.762 | 0.821 | -46 | 124 | 10 | 0.000003 | 17.860001 | 1.82343 | 1.11642 | 1.801 | 2.494 | 1.80425 | 1.80917 | 0.000029 | 62.27 | 36.310001 | 0.000003 | 7.65 | 7.17 | 7.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.9 |
Polydimethylsiloxane (PDMS) | Air | 1.035 | 0.368 | -44.900002 | 139.5 | 5 | 0.000148 | 0.16 | 1.72865 | 1.05165 | 1.322 | 1.493 | 1.41061 | 1.42027 | 0.000052 | 50.830002 | 54.099998 | 0.000002 | 5.81 | 5.51 | 5.4 | 1,260 | 1,625 | FDTD | 3.71 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.451 | 0.964 | -47.900002 | 98.699997 | 10 | 0.000158 | 0.17 | 1.85799 | 1.48064 | 2.116 | 3.051 | 1.46924 | 1.47876 | 0.000065 | 81.32 | 63.439999 | 0.000001 | 0.79 | 0.59 | 0.46 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.59 |
Silicon Dioxide (SiO₂) | Air | 1.648 | 0.521 | 10.4 | 150.300003 | 10 | 0.000001 | 1.45 | 1.71102 | 1.43825 | 2.534 | 2.966 | 1.53693 | 1.54203 | 0.000036 | 82.330002 | 53.259998 | 0.000003 | 8.46 | 8.15 | 8.07 | 1,260 | 1,625 | FDTD | 4.58 |
Polydimethylsiloxane (PDMS) | Air | 1.559 | 0.793 | -29.1 | 91.300003 | 1 | 0.000193 | 0.19 | 1.6931 | 1.18278 | 1.361 | 2.576 | 1.8156 | 1.81945 | 0.000032 | 61.470001 | 21.26 | 0.000001 | 9.17 | 8.97 | 9.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.22 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.017 | 0.543 | 5.6 | 181 | 5 | 0.000014 | 0.21 | 1.77584 | 1.2105 | 1.223 | 2.183 | 1.95631 | 1.96226 | 0.000034 | 59.18 | 48.549999 | 0.000002 | 5.58 | 5.1 | 5.43 | 1,260 | 1,625 | FDTD | 2.26 |
SU-8 | Air | 1.599 | 0.873 | -0.8 | 92.5 | 1 | 0.000008 | 0.26 | 1.73561 | 1.34738 | 0.28 | 0.517 | 1.52527 | 1.52647 | 0.000013 | 78.970001 | 83.389999 | 0.000003 | 6.41 | 6.1 | 6.02 | 1,260 | 1,625 | FDTD | 0.41 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.243 | 0.817 | -4.4 | 162.600006 | 1 | 0.000001 | 1.44 | 1.74589 | 1.0281 | 0.891 | 1.88 | 1.54859 | 1.55178 | 0.000019 | 76.459999 | 83.449997 | 0.000002 | 2.21 | 1.72 | 1.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.08 |
Silicon Nitride (Si₃N₄) | Air | 1.237 | 0.906 | -38.5 | 199.399994 | 1 | 0.000003 | 16.219999 | 1.55613 | 1.38982 | 2.831 | 3.265 | 1.88855 | 1.89822 | 0.000041 | 58.759998 | 17.15 | 0.000005 | 8.32 | 7.94 | 8.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.57 |
Silicon Nitride (Si₃N₄) | Air | 1.173 | 0.529 | -8.9 | 157.5 | 5 | 0.000003 | 15.49 | 1.95046 | 1.4538 | 2.85 | 4.078 | 1.97037 | 1.97978 | 0.000057 | 79.029999 | 17.23 | 0.000003 | 8.6 | 8.45 | 8.31 | 1,260 | 1,625 | FDTD | 3.81 |
SU-8 | Air | 1.446 | 0.768 | -40.400002 | 134.800003 | 5 | 0.000006 | 0.23 | 1.72306 | 1.14242 | 2.912 | 3.383 | 1.46009 | 1.46237 | 0.000013 | 65.550003 | 16.540001 | 0 | 9.21 | 8.71 | 8.94 | 1,260 | 1,625 | FDTD | 1.02 |
SU-8 | Air | 1.936 | 0.575 | -20.5 | 193 | 10 | 0.000006 | 0.26 | 1.5115 | 1.4776 | 2.33 | 3.604 | 1.63705 | 1.63904 | 0.000009 | 78.529999 | 76.919998 | 0.000003 | 3.36 | 3.13 | 3.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.76 | 0.23 | -38 | 110.900002 | 1 | 0.000155 | 0.18 | 1.45425 | 1.06759 | 0.917 | 2.14 | 1.45229 | 1.45476 | 0.000017 | 53.110001 | 76.93 | 0.000001 | 9.59 | 9.33 | 9.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.9 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.452 | 0.323 | -21.299999 | 156.699997 | 5 | 0.000001 | 1.48 | 1.53079 | 1.13572 | 2.713 | 3.278 | 1.48513 | 1.4932 | 0.000045 | 86.910004 | 23.25 | 0.000005 | 7.78 | 7.53 | 7.64 | 1,260 | 1,625 | FDTD | 0.99 |
SU-8 | Silicon Dioxide (SiO₂) | 1.528 | 0.392 | -35.700001 | 198.300003 | 1 | 0.000007 | 0.24 | 1.42081 | 1.44333 | 2.748 | 4.081 | 1.51036 | 1.51237 | 0.000009 | 88.620003 | 78.610001 | 0.000004 | 1.14 | 0.85 | 0.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.64 |
SU-8 | Silicon Dioxide (SiO₂) | 0.796 | 0.857 | -35.099998 | 98.699997 | 10 | 0.000007 | 0.25 | 1.74902 | 1.22545 | 0.382 | 1.416 | 1.8478 | 1.85741 | 0.000072 | 87.580002 | 26.01 | 0.000004 | 3.12 | 2.79 | 3.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.62 |
SU-8 | Silicon Dioxide (SiO₂) | 1.989 | 0.297 | -9 | 173.100006 | 10 | 0.000007 | 0.21 | 1.95345 | 1.15262 | 0.797 | 1.371 | 1.46045 | 1.46955 | 0.00005 | 88.419998 | 34.040001 | 0.000001 | 3.26 | 3.08 | 3.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.08 |
SU-8 | Silicon Dioxide (SiO₂) | 1.924 | 0.754 | -17.799999 | 191.5 | 5 | 0.000011 | 0.22 | 1.49401 | 1.05174 | 0.106 | 0.489 | 1.68738 | 1.69083 | 0.000016 | 75.18 | 92.050003 | 0.000003 | 1.36 | 1.04 | 0.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.45 |
Silicon Dioxide (SiO₂) | Air | 1.462 | 0.408 | 3.3 | 85.300003 | 10 | 0.000001 | 1.36 | 1.56344 | 1.13978 | 0.505 | 1.908 | 1.77709 | 1.78428 | 0.000088 | 51.23 | 33.32 | 0.000005 | 1.72 | 1.31 | 1.57 | 1,260 | 1,625 | FDTD | 1.88 |
Polydimethylsiloxane (PDMS) | Air | 0.63 | 0.259 | -32 | 121 | 10 | 0.00023 | 0.15 | 1.54754 | 1.01709 | 2.062 | 3.078 | 1.91871 | 1.9262 | 0.000049 | 77.879997 | 39.02 | 0.000002 | 4.79 | 4.38 | 4.56 | 1,260 | 1,625 | FDTD | 4.73 |
SU-8 | Silicon Dioxide (SiO₂) | 1.037 | 0.721 | -37.099998 | 86.800003 | 1 | 0.000012 | 0.29 | 1.53128 | 1.21537 | 2.658 | 3.838 | 1.71538 | 1.71835 | 0.000024 | 68.639999 | 69.029999 | 0.000005 | 1.59 | 1.19 | 1.1 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.89 |
SU-8 | Silicon Dioxide (SiO₂) | 0.837 | 0.307 | -0.6 | 113.300003 | 1 | 0.00001 | 0.25 | 1.76902 | 1.1398 | 1.852 | 2.691 | 1.6433 | 1.64772 | 0.000039 | 70.120003 | 34.779999 | 0.000003 | 1.2 | 1.08 | 0.81 | 1,260 | 1,625 | FDTD | 4.25 |
Silicon Dioxide (SiO₂) | Air | 0.563 | 0.864 | 9.6 | 135.300003 | 1 | 0.000001 | 1.35 | 1.82785 | 1.04752 | 2.239 | 3.253 | 1.62877 | 1.63743 | 0.000069 | 55.09 | 13.61 | 0.000005 | 0.61 | 0.29 | 0.24 | 1,260 | 1,625 | FDTD | 4.41 |
Polymethyl Methacrylate (PMMA) | Air | 1.772 | 0.964 | -15.5 | 186.100006 | 10 | 0.000013 | 0.22 | 1.48607 | 1.29752 | 2.908 | 3.162 | 1.52783 | 1.53694 | 0.000045 | 85.040001 | 57.59 | 0.000004 | 6.29 | 6.09 | 5.96 | 1,260 | 1,625 | FDTD | 4.85 |
Silicon Dioxide (SiO₂) | Air | 1.45 | 0.47 | -29.200001 | 152.600006 | 10 | 0.000001 | 1.39 | 1.77974 | 1.08437 | 2.838 | 4.145 | 1.97628 | 1.9841 | 0.000043 | 60.27 | 35.93 | 0.000004 | 6.02 | 5.75 | 5.61 | 1,260 | 1,625 | FDTD | 0.66 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.732 | 0.342 | -37.299999 | 107.199997 | 10 | 0.000001 | 1.41 | 1.79072 | 1.48493 | 0.232 | 0.838 | 1.44291 | 1.45249 | 0.000066 | 87.769997 | 57.82 | 0.000002 | 3.5 | 3.03 | 3.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.7 |
Silicon Dioxide (SiO₂) | Air | 0.972 | 0.41 | -5.9 | 106.900002 | 1 | 0.000001 | 1.47 | 1.87783 | 1.18884 | 1.365 | 1.759 | 1.56075 | 1.56502 | 0.000038 | 59.91 | 20.49 | 0.000004 | 7.64 | 7.3 | 7.17 | 1,260 | 1,625 | FDTD | 4.53 |
SU-8 | Air | 1.061 | 0.991 | -30.299999 | 164.100006 | 10 | 0.000008 | 0.28 | 1.55664 | 1.23825 | 0.429 | 1.542 | 1.89228 | 1.8935 | 0.000006 | 69.459999 | 92.18 | 0.000003 | 2.17 | 1.9 | 2.06 | 1,260 | 1,625 | FDTD | 1.59 |
Polydimethylsiloxane (PDMS) | Air | 1.95 | 0.682 | -3.9 | 170.800003 | 5 | 0.000297 | 0.18 | 1.98798 | 1.36306 | 1.338 | 2.127 | 1.41258 | 1.41921 | 0.000038 | 72.239998 | 63.52 | 0.000004 | 4.67 | 4.39 | 4.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.11 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.896 | 0.233 | -4.9 | 198.600006 | 5 | 0.000003 | 15.92 | 1.91762 | 1.09659 | 2.744 | 3.648 | 1.50557 | 1.5128 | 0.000036 | 58.23 | 50.57 | 0.000004 | 1.4 | 1.13 | 1.18 | 1,260 | 1,625 | FDTD | 0.7 |
SU-8 | Air | 1.063 | 0.83 | 7.4 | 109.400002 | 1 | 0.00001 | 0.25 | 1.78321 | 1.45916 | 0.597 | 1.413 | 1.67884 | 1.6803 | 0.000014 | 53.459999 | 20.92 | 0.000002 | 2.41 | 2.17 | 2.12 | 1,260 | 1,625 | FDTD | 0.53 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.822 | 0.358 | -23.5 | 169.5 | 5 | 0.000009 | 0.23 | 1.70967 | 1.29212 | 1.736 | 2.577 | 1.8527 | 1.85827 | 0.000029 | 61.349998 | 92.550003 | 0.000002 | 4.79 | 4.61 | 4.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.54 |
Polymethyl Methacrylate (PMMA) | Air | 0.629 | 0.651 | 12.7 | 158.899994 | 5 | 0.000007 | 0.21 | 1.98904 | 1.19267 | 1.562 | 3.051 | 1.88307 | 1.89148 | 0.000058 | 66.760002 | 80.110001 | 0 | 7.27 | 7.13 | 7.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.1 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.199 | 0.95 | -16.5 | 166.199997 | 10 | 0.000001 | 1.38 | 1.89474 | 1.3337 | 0.379 | 0.587 | 1.74337 | 1.74872 | 0.000029 | 64.190002 | 67.510002 | 0.000005 | 8.03 | 7.82 | 7.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.22 |
Polymethyl Methacrylate (PMMA) | Air | 1.533 | 0.324 | -25.5 | 173.899994 | 1 | 0.000014 | 0.2 | 1.42093 | 1.34938 | 1.461 | 2.047 | 1.61632 | 1.62366 | 0.000037 | 62.009998 | 17.950001 | 0.000003 | 6.83 | 6.42 | 6.46 | 1,260 | 1,625 | FDTD | 2.24 |
Polymethyl Methacrylate (PMMA) | Air | 1.695 | 0.427 | 15.2 | 111.900002 | 5 | 0.00001 | 0.2 | 1.71029 | 1.3322 | 2.305 | 2.415 | 1.47526 | 1.48085 | 0.000058 | 52.48 | 45.310001 | 0.000003 | 7.13 | 6.74 | 6.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.9 |
Polymethyl Methacrylate (PMMA) | Air | 1.355 | 0.838 | -37.400002 | 147.399994 | 1 | 0.000014 | 0.21 | 1.84942 | 1.1069 | 2.287 | 3.167 | 1.85319 | 1.85726 | 0.000022 | 58.470001 | 66.209999 | 0.000002 | 1.74 | 1.34 | 1.61 | 1,260 | 1,625 | FDTD | 2.98 |
Polymethyl Methacrylate (PMMA) | Air | 1.019 | 0.93 | -0.2 | 151.199997 | 10 | 0.000012 | 0.22 | 1.4626 | 1.03327 | 0.244 | 1.174 | 1.84322 | 1.8513 | 0.000053 | 51.639999 | 71.529999 | 0.000003 | 4.79 | 4.55 | 4.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.56 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.22 | 0.273 | 11.3 | 166.600006 | 10 | 0.000179 | 0.16 | 1.79889 | 1.29299 | 2.595 | 3.34 | 1.49096 | 1.49906 | 0.000052 | 60.619999 | 60.41 | 0.000002 | 2.78 | 2.56 | 2.38 | 1,260 | 1,625 | FDTD | 0.45 |
Polydimethylsiloxane (PDMS) | Air | 1.355 | 0.795 | 11.8 | 93 | 5 | 0.000202 | 0.19 | 1.55446 | 1.33525 | 0.178 | 1.627 | 1.99186 | 1.99423 | 0.000029 | 52.25 | 48.439999 | 0 | 6.77 | 6.66 | 6.54 | 1,260 | 1,625 | FDTD | 1.08 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.565 | 0.353 | -15.2 | 124.099998 | 10 | 0.000013 | 0.24 | 1.6774 | 1.18852 | 2.246 | 3.722 | 1.43584 | 1.44385 | 0.000058 | 75.139999 | 16.049999 | 0.000002 | 5.76 | 5.52 | 5.53 | 1,260 | 1,625 | FDTD | 0.35 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.798 | 0.703 | -25.9 | 140.5 | 1 | 0.000009 | 0.21 | 1.54918 | 1.43202 | 2.976 | 3.176 | 1.93793 | 1.94378 | 0.000035 | 56.639999 | 43.619999 | 0.000002 | 4.16 | 3.78 | 3.8 | 1,260 | 1,625 | FDTD | 4.23 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.352 | 0.73 | -49.599998 | 89.800003 | 5 | 0.000012 | 0.22 | 1.44096 | 1.14956 | 2.29 | 3.345 | 1.90846 | 1.91705 | 0.000062 | 76.370003 | 59.060001 | 0.000002 | 5.79 | 5.45 | 5.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.16 |
Polydimethylsiloxane (PDMS) | Air | 1.693 | 0.695 | -1.5 | 81.099998 | 10 | 0.000281 | 0.2 | 1.89063 | 1.36637 | 0.53 | 1.974 | 1.84004 | 1.84468 | 0.000056 | 78.720001 | 60.91 | 0.000004 | 5.5 | 5.2 | 5.03 | 1,260 | 1,625 | FDTD | 2.61 |
Polydimethylsiloxane (PDMS) | Air | 1.482 | 0.612 | -33.700001 | 187.5 | 10 | 0.000233 | 0.16 | 1.47538 | 1.12349 | 1.344 | 2.298 | 1.95367 | 1.95864 | 0.000022 | 61.040001 | 26.370001 | 0 | 2.3 | 2.08 | 2.18 | 1,260 | 1,625 | FDTD | 4.95 |
Subsets and Splits