waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.532 | 0.783 | 13.6 | 105.099998 | 10 | 0.000003 | 19.139999 | 1.75903 | 1.07756 | 1.274 | 1.611 | 1.54657 | 1.55066 | 0.000045 | 76.029999 | 27.469999 | 0.000002 | 5.84 | 5.51 | 5.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.47 |
Silicon Dioxide (SiO₂) | Air | 1.032 | 0.348 | -15.4 | 198.100006 | 1 | 0.000001 | 1.45 | 1.78216 | 1.10042 | 2.913 | 3.341 | 1.60156 | 1.60677 | 0.000024 | 82.730003 | 33.470001 | 0.000004 | 1.12 | 0.87 | 0.68 | 1,260 | 1,625 | FDTD | 4.52 |
Silicon Nitride (Si₃N₄) | Air | 1.707 | 0.961 | 8 | 163.5 | 5 | 0.000003 | 15.31 | 1.56126 | 1.17749 | 2.574 | 3.382 | 1.80524 | 1.81442 | 0.000059 | 51.939999 | 63.669998 | 0 | 3.46 | 2.98 | 3.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.46 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.993 | 0.641 | -39 | 88.099998 | 1 | 0.000001 | 1.37 | 1.58792 | 1.10822 | 1.821 | 2.495 | 1.96839 | 1.9763 | 0.000062 | 76.639999 | 26.629999 | 0.000003 | 3.71 | 3.34 | 3.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.21 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.628 | 0.207 | -16.200001 | 171.300003 | 5 | 0.000001 | 1.45 | 1.42048 | 1.17287 | 0.127 | 1.277 | 1.44149 | 1.45008 | 0.000046 | 73.959999 | 99.629997 | 0.000005 | 8.1 | 7.7 | 7.72 | 1,260 | 1,625 | FDTD | 4.41 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.17 | 0.425 | -12.8 | 149.100006 | 5 | 0.000102 | 0.18 | 1.81523 | 1.45355 | 1.066 | 1.846 | 1.47752 | 1.48654 | 0.000056 | 80.040001 | 43.439999 | 0.000001 | 5.93 | 5.63 | 5.58 | 1,260 | 1,625 | FDTD | 4.55 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.835 | 0.864 | -5.7 | 96.599998 | 5 | 0.000003 | 15.34 | 1.40488 | 1.24983 | 1.005 | 1.565 | 1.63145 | 1.63678 | 0.000052 | 83.519997 | 13.25 | 0.000004 | 6.62 | 6.23 | 6.47 | 1,260 | 1,625 | FDTD | 3.31 |
SU-8 | Air | 1.165 | 0.853 | -33.299999 | 110.199997 | 10 | 0.000008 | 0.23 | 1.44737 | 1.27837 | 2.303 | 3.4 | 1.8976 | 1.90518 | 0.000053 | 53.990002 | 79.029999 | 0.000001 | 9.52 | 9.2 | 9.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.93 |
Polydimethylsiloxane (PDMS) | Air | 0.6 | 0.623 | -38.200001 | 118.5 | 10 | 0.000244 | 0.16 | 1.58312 | 1.27977 | 0.83 | 1.87 | 1.47661 | 1.47853 | 0.000012 | 83.43 | 75.239998 | 0.000002 | 8.2 | 7.7 | 7.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.78 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.156 | 0.509 | -9.3 | 98.800003 | 1 | 0.000009 | 0.19 | 1.94633 | 1.11828 | 2.35 | 3.445 | 1.74013 | 1.74132 | 0.000011 | 65.589996 | 72.900002 | 0 | 1.5 | 1.21 | 1.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.92 |
SU-8 | Air | 1.344 | 0.33 | -25.200001 | 116.599998 | 1 | 0.000012 | 0.29 | 1.4574 | 1.04864 | 1.222 | 2.549 | 1.59572 | 1.60442 | 0.000061 | 61.529999 | 77.5 | 0 | 6.54 | 6.19 | 6.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.41 |
Silicon Dioxide (SiO₂) | Air | 1.823 | 0.362 | -37.200001 | 162.300003 | 10 | 0.000001 | 1.32 | 1.8263 | 1.07819 | 1.092 | 2.075 | 1.83917 | 1.84768 | 0.000043 | 50.580002 | 11.76 | 0 | 3.99 | 3.57 | 3.75 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.41 |
SU-8 | Air | 1.441 | 0.562 | -42.900002 | 93.099998 | 1 | 0.000009 | 0.23 | 1.65747 | 1.25413 | 2.327 | 3.271 | 1.51336 | 1.52329 | 0.000073 | 77.889999 | 41.209999 | 0.000003 | 2.15 | 2 | 1.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.93 |
Polydimethylsiloxane (PDMS) | Air | 1.757 | 0.361 | -34.599998 | 81.900002 | 5 | 0.00019 | 0.17 | 1.83703 | 1.06718 | 1.617 | 2.676 | 1.47493 | 1.48349 | 0.000073 | 68.400002 | 72.849998 | 0.000001 | 7.36 | 7.11 | 6.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.99 |
Polymethyl Methacrylate (PMMA) | Air | 1.831 | 0.295 | -25.1 | 161.199997 | 1 | 0.00001 | 0.23 | 1.60229 | 1.23455 | 1.875 | 2.11 | 1.75056 | 1.7573 | 0.000036 | 71.959999 | 55.09 | 0.000001 | 4.96 | 4.8 | 4.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.25 |
Silicon Dioxide (SiO₂) | Air | 0.876 | 0.842 | 17.1 | 194.699997 | 10 | 0.000001 | 1.37 | 1.79899 | 1.03619 | 1.704 | 2.76 | 1.78691 | 1.79362 | 0.000038 | 69.980003 | 19.129999 | 0.000002 | 1.84 | 1.43 | 1.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.28 |
Silicon Dioxide (SiO₂) | Air | 1.171 | 0.949 | -0.2 | 164.199997 | 10 | 0.000001 | 1.3 | 1.53118 | 1.36692 | 0.518 | 1.436 | 1.59709 | 1.60184 | 0.000029 | 71.209999 | 63.259998 | 0.000002 | 4.94 | 4.45 | 4.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.74 |
Silicon Dioxide (SiO₂) | Air | 1.063 | 0.507 | -22.200001 | 185 | 10 | 0.000001 | 1.45 | 1.72747 | 1.1295 | 0.649 | 1.59 | 1.7908 | 1.79842 | 0.000037 | 65.209999 | 87.370003 | 0.000004 | 2.52 | 2.23 | 2.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.54 |
Polydimethylsiloxane (PDMS) | Air | 1.964 | 0.568 | -43.5 | 197.399994 | 10 | 0.000173 | 0.16 | 1.69118 | 1.0762 | 1.589 | 2.392 | 1.88215 | 1.89204 | 0.000041 | 65.720001 | 25.559999 | 0.000002 | 2.51 | 2.35 | 2.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.43 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.897 | 0.591 | -19.4 | 90.900002 | 5 | 0.000015 | 0.25 | 1.47228 | 1.1506 | 1.336 | 2.362 | 1.59984 | 1.60887 | 0.000082 | 83.790001 | 98.93 | 0.000002 | 9.11 | 8.78 | 8.84 | 1,260 | 1,625 | FDTD | 4.63 |
SU-8 | Air | 0.922 | 0.662 | 8.1 | 94.300003 | 5 | 0.000009 | 0.21 | 1.78987 | 1.35877 | 0.881 | 2.006 | 1.75852 | 1.76426 | 0.000067 | 50.779999 | 25.690001 | 0.000004 | 3.6 | 3.13 | 3.26 | 1,260 | 1,625 | FDTD | 4.27 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.411 | 0.591 | -14.4 | 130.5 | 10 | 0.000001 | 1.46 | 1.40366 | 1.13315 | 0.49 | 0.934 | 1.54536 | 1.54713 | 0.000012 | 67.879997 | 42.77 | 0.000003 | 8.77 | 8.58 | 8.61 | 1,260 | 1,625 | FDTD | 3.51 |
Polydimethylsiloxane (PDMS) | Air | 1.953 | 0.332 | -11.8 | 170.899994 | 5 | 0.000105 | 0.17 | 1.9505 | 1.19883 | 1.699 | 2.544 | 1.87657 | 1.88574 | 0.00005 | 71.699997 | 63.099998 | 0.000003 | 3.33 | 3.06 | 2.9 | 1,260 | 1,625 | FDTD | 0.86 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.705 | 0.721 | -29.9 | 134 | 10 | 0.000003 | 17.24 | 1.75969 | 1.04605 | 0.512 | 0.784 | 1.80771 | 1.81468 | 0.000043 | 52.599998 | 36.830002 | 0.000004 | 9.83 | 9.42 | 9.56 | 1,260 | 1,625 | FDTD | 3.7 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.946 | 0.29 | 15 | 93.300003 | 10 | 0.000001 | 1.44 | 1.80029 | 1.02394 | 1.412 | 2.4 | 1.76485 | 1.77251 | 0.000098 | 62.220001 | 99.68 | 0 | 1.58 | 1.24 | 1.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.76 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.855 | 0.513 | -25.5 | 128.300003 | 10 | 0.000144 | 0.15 | 1.80742 | 1.39748 | 2.77 | 4.068 | 1.50601 | 1.51029 | 0.000028 | 69.279999 | 88.910004 | 0.000002 | 8.31 | 7.9 | 8.07 | 1,260 | 1,625 | FDTD | 4.8 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.133 | 0.582 | -16.799999 | 84.699997 | 10 | 0.000158 | 0.19 | 1.97449 | 1.33991 | 2.042 | 2.979 | 1.48427 | 1.48666 | 0.000024 | 85.080002 | 34.889999 | 0 | 1.88 | 1.4 | 1.39 | 1,260 | 1,625 | FDTD | 0.62 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.364 | 0.415 | 2.8 | 94.400002 | 5 | 0.000012 | 0.24 | 1.92253 | 1.33655 | 0.955 | 2.364 | 1.70304 | 1.70458 | 0.000017 | 88.699997 | 42.490002 | 0.000001 | 7.05 | 6.65 | 6.7 | 1,260 | 1,625 | FDTD | 3.45 |
Polymethyl Methacrylate (PMMA) | Air | 1.687 | 0.266 | -11.9 | 181.800003 | 1 | 0.000008 | 0.19 | 1.7905 | 1.32128 | 1.395 | 2.863 | 1.74353 | 1.75111 | 0.000039 | 79.540001 | 80.169998 | 0.000003 | 1.79 | 1.55 | 1.54 | 1,260 | 1,625 | FDTD | 3.81 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.842 | 0.926 | 15 | 96.099998 | 5 | 0.000244 | 0.17 | 1.69402 | 1.49028 | 0.653 | 1.794 | 1.8941 | 1.90094 | 0.000084 | 80.730003 | 55.09 | 0 | 5.07 | 4.76 | 4.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.12 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.515 | 0.928 | -7 | 113.400002 | 10 | 0.000127 | 0.19 | 1.74411 | 1.06176 | 1.778 | 2.141 | 1.96301 | 1.9669 | 0.000032 | 61.360001 | 14.96 | 0.000004 | 1.72 | 1.47 | 1.45 | 1,260 | 1,625 | FDTD | 4.1 |
Polydimethylsiloxane (PDMS) | Air | 1.849 | 0.466 | -23.1 | 84 | 10 | 0.000265 | 0.17 | 1.51795 | 1.03186 | 0.953 | 1.834 | 1.50704 | 1.51297 | 0.000055 | 63.34 | 23.440001 | 0.000001 | 8.67 | 8.48 | 8.35 | 1,260 | 1,625 | FDTD | 1.84 |
Silicon Nitride (Si₃N₄) | Air | 0.798 | 0.59 | 5.1 | 107.599998 | 1 | 0.000003 | 15.45 | 1.76982 | 1.43165 | 0.273 | 0.75 | 1.57627 | 1.578 | 0.000017 | 64.620003 | 17.42 | 0.000004 | 8.55 | 8.11 | 8.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.81 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.79 | 0.279 | -0.6 | 122.300003 | 5 | 0.000008 | 0.19 | 1.72488 | 1.25385 | 1.061 | 2.492 | 1.56071 | 1.56495 | 0.000035 | 83.279999 | 95.199997 | 0.000004 | 6.82 | 6.59 | 6.45 | 1,260 | 1,625 | FDTD | 1.37 |
SU-8 | Air | 1.479 | 0.224 | -36.200001 | 105.199997 | 1 | 0.000006 | 0.23 | 1.88336 | 1.14141 | 0.716 | 1.426 | 1.66756 | 1.67623 | 0.000061 | 83.879997 | 97.949997 | 0.000003 | 7.86 | 7.65 | 7.55 | 1,260 | 1,625 | FDTD | 0.94 |
Silicon Dioxide (SiO₂) | Air | 0.934 | 0.31 | 3.6 | 181.399994 | 10 | 0.000001 | 1.45 | 1.88701 | 1.12973 | 1.585 | 2.096 | 1.63184 | 1.64116 | 0.000052 | 86.370003 | 77.160004 | 0.000001 | 7.19 | 6.8 | 7.03 | 1,260 | 1,625 | FDTD | 4.91 |
Polymethyl Methacrylate (PMMA) | Air | 0.952 | 0.983 | 19.9 | 193.600006 | 1 | 0.00001 | 0.24 | 1.7054 | 1.04324 | 0.629 | 1.242 | 1.87719 | 1.88266 | 0.000031 | 78.209999 | 92.269997 | 0.000001 | 8.42 | 8.14 | 8.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.05 |
Silicon Nitride (Si₃N₄) | Air | 1.616 | 0.367 | -28.799999 | 199.600006 | 10 | 0.000003 | 17.34 | 1.99826 | 1.44817 | 1.74 | 1.902 | 1.45451 | 1.45897 | 0.00002 | 84.300003 | 13.71 | 0.000002 | 2.39 | 2.03 | 1.91 | 1,260 | 1,625 | FDTD | 3.4 |
Polydimethylsiloxane (PDMS) | Air | 1.023 | 0.97 | 1.6 | 82.400002 | 5 | 0.00017 | 0.19 | 1.78525 | 1.05428 | 2.253 | 3.129 | 1.61073 | 1.61918 | 0.000105 | 69.419998 | 43.34 | 0.000002 | 8.51 | 8.31 | 8.02 | 1,260 | 1,625 | FDTD | 4.97 |
Polymethyl Methacrylate (PMMA) | Air | 1.452 | 0.583 | -15.5 | 158.800003 | 5 | 0.000008 | 0.24 | 1.65326 | 1.06536 | 2.796 | 4.092 | 1.51819 | 1.52384 | 0.000032 | 56.759998 | 37.130001 | 0.000003 | 0.8 | 0.7 | 0.35 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.48 |
Silicon Dioxide (SiO₂) | Air | 0.855 | 0.583 | -22.299999 | 118.400002 | 10 | 0.000001 | 1.37 | 1.98652 | 1.05728 | 1.771 | 2.88 | 1.69872 | 1.707 | 0.000059 | 56.080002 | 77.440002 | 0.000001 | 9.39 | 9.24 | 9.04 | 1,260 | 1,625 | FDTD | 3.39 |
Silicon Dioxide (SiO₂) | Air | 1.239 | 0.795 | -16.299999 | 182.399994 | 10 | 0.000001 | 1.47 | 1.85211 | 1.13809 | 0.71 | 2.108 | 1.65807 | 1.66289 | 0.000024 | 74.580002 | 30.190001 | 0.000001 | 1.08 | 0.66 | 0.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.09 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.96 | 0.251 | -32.099998 | 123.5 | 5 | 0.000183 | 0.18 | 1.62241 | 1.37476 | 1.159 | 2.298 | 1.71107 | 1.71212 | 0.000007 | 61.959999 | 56.169998 | 0.000003 | 5.67 | 5.52 | 5.54 | 1,260 | 1,625 | FDTD | 3.8 |
SU-8 | Silicon Dioxide (SiO₂) | 1.802 | 0.861 | 0.3 | 156.600006 | 1 | 0.000012 | 0.27 | 1.50583 | 1.10273 | 1.601 | 2.353 | 1.7945 | 1.79834 | 0.000025 | 62.029999 | 35.619999 | 0.000001 | 8.45 | 8.01 | 8.25 | 1,260 | 1,625 | FDTD | 2.94 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.548 | 0.749 | -24.4 | 96.300003 | 10 | 0.000257 | 0.2 | 1.94 | 1.37468 | 0.904 | 1.644 | 1.50991 | 1.51794 | 0.000067 | 52.439999 | 44.52 | 0.000002 | 7.42 | 7.31 | 7.17 | 1,260 | 1,625 | FDTD | 1.9 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.196 | 0.522 | -20.9 | 157.399994 | 5 | 0.000249 | 0.18 | 1.55917 | 1.13892 | 2.905 | 3.401 | 1.70996 | 1.71675 | 0.000038 | 83.190002 | 49.52 | 0 | 8.94 | 8.68 | 8.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.03 |
Silicon Nitride (Si₃N₄) | Air | 0.593 | 0.653 | -2.5 | 162.699997 | 5 | 0.000003 | 17.709999 | 1.67033 | 1.06302 | 2.35 | 3.756 | 1.80941 | 1.81868 | 0.000056 | 65.339996 | 87.550003 | 0.000001 | 2.13 | 1.82 | 2.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.24 |
SU-8 | Silicon Dioxide (SiO₂) | 0.686 | 0.557 | -48.099998 | 160.5 | 10 | 0.000011 | 0.22 | 1.65052 | 1.09612 | 0.695 | 1.28 | 1.88853 | 1.89709 | 0.000041 | 64.120003 | 23.58 | 0.000002 | 4.35 | 4.16 | 4.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.93 |
SU-8 | Silicon Dioxide (SiO₂) | 1.542 | 0.844 | 10.2 | 150.199997 | 10 | 0.00001 | 0.25 | 1.80797 | 1.25259 | 1.272 | 2.001 | 1.45811 | 1.46712 | 0.000064 | 50.700001 | 31.9 | 0.000001 | 4.34 | 4.08 | 3.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.27 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.708 | 0.319 | -17.9 | 91.099998 | 1 | 0.000003 | 19.030001 | 1.82177 | 1.00633 | 0.835 | 2.205 | 1.80734 | 1.81381 | 0.000059 | 64.790001 | 94.480003 | 0.000004 | 5.66 | 5.34 | 5.26 | 1,260 | 1,625 | FDTD | 2.33 |
Polydimethylsiloxane (PDMS) | Air | 1.712 | 0.795 | -11.3 | 198.100006 | 10 | 0.00026 | 0.16 | 1.72127 | 1.30961 | 0.153 | 1.496 | 1.9084 | 1.91269 | 0.00002 | 75.699997 | 20.67 | 0.000002 | 7.4 | 7.16 | 7.12 | 1,260 | 1,625 | FDTD | 1.6 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.921 | 0.366 | -13.6 | 146.300003 | 10 | 0.000003 | 15.07 | 1.46954 | 1.44028 | 2.293 | 3.145 | 1.52588 | 1.5333 | 0.000046 | 59.57 | 74.139999 | 0.000002 | 2.71 | 2.56 | 2.57 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.67 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.663 | 0.243 | 9.7 | 126.900002 | 1 | 0.000265 | 0.15 | 1.93645 | 1.24475 | 1.957 | 2.789 | 1.67251 | 1.68033 | 0.000067 | 61.48 | 24.48 | 0.000002 | 7.71 | 7.53 | 7.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.09 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.509 | 0.85 | -35.099998 | 169.100006 | 1 | 0.000232 | 0.16 | 1.85295 | 1.40039 | 2.408 | 2.69 | 1.91655 | 1.92487 | 0.000041 | 56.75 | 46.689999 | 0.000004 | 6 | 5.77 | 5.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.1 |
Silicon Nitride (Si₃N₄) | Air | 1.525 | 0.277 | -47.200001 | 130.100006 | 5 | 0.000003 | 17.610001 | 1.80506 | 1.29977 | 0.304 | 1.454 | 1.66917 | 1.67341 | 0.000024 | 66.230003 | 13.78 | 0.000002 | 4.59 | 4.28 | 4.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.73 |
Silicon Nitride (Si₃N₄) | Air | 1.605 | 0.455 | 10 | 159.100006 | 5 | 0.000003 | 17.76 | 1.50767 | 1.34964 | 1.6 | 2.088 | 1.94149 | 1.94991 | 0.000056 | 89.57 | 48.669998 | 0.000003 | 5.56 | 5.34 | 5.16 | 1,260 | 1,625 | FDTD | 2.81 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.299 | 0.454 | -38.299999 | 181 | 1 | 0.000101 | 0.19 | 1.48628 | 1.34024 | 2.401 | 3.493 | 1.8705 | 1.87372 | 0.000015 | 78.5 | 18.309999 | 0 | 8.26 | 7.93 | 8.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.06 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.457 | 0.82 | 11.9 | 174.100006 | 1 | 0.000193 | 0.18 | 1.89545 | 1.05905 | 2.638 | 3.705 | 1.90004 | 1.90246 | 0.000015 | 64.040001 | 45.919998 | 0.000003 | 6.12 | 5.87 | 5.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.57 |
Polydimethylsiloxane (PDMS) | Air | 0.798 | 0.863 | -7.3 | 80.800003 | 5 | 0.000146 | 0.2 | 1.99874 | 1.48273 | 2.865 | 4.134 | 1.50091 | 1.51067 | 0.000111 | 54.810001 | 68.779999 | 0.000003 | 8.72 | 8.48 | 8.43 | 1,260 | 1,625 | FDTD | 3.33 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.359 | 0.815 | 15.5 | 118.900002 | 10 | 0.000001 | 1.44 | 1.59917 | 1.3162 | 2.689 | 3.369 | 1.43601 | 1.44372 | 0.000075 | 52.599998 | 13.53 | 0 | 2.4 | 2.15 | 2.26 | 1,260 | 1,625 | FDTD | 3.88 |
Polymethyl Methacrylate (PMMA) | Air | 1.482 | 0.628 | -14.5 | 175.5 | 10 | 0.00001 | 0.24 | 1.67158 | 1.33508 | 0.472 | 1.006 | 1.94693 | 1.95497 | 0.000042 | 64.629997 | 27.459999 | 0.000001 | 7.68 | 7.42 | 7.32 | 1,260 | 1,625 | FDTD | 0.5 |
Polymethyl Methacrylate (PMMA) | Air | 1.956 | 0.285 | -27.9 | 118.199997 | 10 | 0.000011 | 0.23 | 1.40857 | 1.23179 | 2.472 | 2.684 | 1.53833 | 1.54336 | 0.000034 | 84.459999 | 88.089996 | 0.000001 | 9.67 | 9.31 | 9.47 | 1,260 | 1,625 | FDTD | 2.65 |
Polymethyl Methacrylate (PMMA) | Air | 1.875 | 0.267 | -25.5 | 87.099998 | 5 | 0.000011 | 0.24 | 1.50105 | 1.00073 | 2.918 | 3.549 | 1.58779 | 1.59744 | 0.000086 | 80.370003 | 48.049999 | 0.000004 | 2.71 | 2.45 | 2.38 | 1,260 | 1,625 | FDTD | 0.33 |
Silicon Nitride (Si₃N₄) | Air | 0.641 | 0.536 | -22.4 | 104.099998 | 1 | 0.000003 | 19.51 | 1.90878 | 1.1135 | 1.585 | 2.559 | 1.67626 | 1.68087 | 0.000036 | 68.150002 | 21.15 | 0 | 9.5 | 9.18 | 9.22 | 1,260 | 1,625 | FDTD | 1.19 |
SU-8 | Air | 0.861 | 0.4 | -5.2 | 190 | 5 | 0.000011 | 0.24 | 1.8849 | 1.09469 | 1.647 | 1.839 | 1.62807 | 1.62908 | 0.000005 | 72.989998 | 86.370003 | 0.000002 | 4.8 | 4.45 | 4.51 | 1,260 | 1,625 | FDTD | 0.81 |
Polydimethylsiloxane (PDMS) | Air | 0.686 | 0.259 | -38.200001 | 171.300003 | 5 | 0.000204 | 0.18 | 1.51223 | 1.4607 | 1.309 | 2.304 | 1.72049 | 1.72572 | 0.000025 | 74.099998 | 26.48 | 0.000003 | 4.12 | 3.62 | 3.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.69 |
Silicon Dioxide (SiO₂) | Air | 1.619 | 0.727 | 7.9 | 111.300003 | 5 | 0.000001 | 1.35 | 1.89545 | 1.04515 | 2.982 | 4.151 | 1.61431 | 1.62391 | 0.000093 | 74.080002 | 43.82 | 0.000001 | 9.03 | 8.77 | 8.9 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.57 |
Polymethyl Methacrylate (PMMA) | Air | 1.2 | 0.456 | 18.700001 | 119.099998 | 5 | 0.000015 | 0.23 | 1.48004 | 1.3736 | 1.414 | 1.863 | 1.46054 | 1.46377 | 0.000032 | 65.900002 | 74.260002 | 0.000001 | 3.49 | 3.26 | 3.21 | 1,260 | 1,625 | FDTD | 1.11 |
SU-8 | Silicon Dioxide (SiO₂) | 1.837 | 0.436 | -40.5 | 115 | 10 | 0.000009 | 0.29 | 1.78533 | 1.38041 | 0.35 | 1.796 | 1.82468 | 1.83326 | 0.000055 | 80.650002 | 31.629999 | 0.000001 | 6.62 | 6.48 | 6.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.21 |
SU-8 | Air | 1.387 | 0.948 | -15.4 | 130.699997 | 5 | 0.000009 | 0.25 | 1.87729 | 1.47934 | 1.064 | 2.533 | 1.88715 | 1.89608 | 0.000061 | 52.59 | 41.549999 | 0.000001 | 6.68 | 6.56 | 6.23 | 1,260 | 1,625 | FDTD | 3.05 |
Polymethyl Methacrylate (PMMA) | Air | 1.221 | 0.804 | 12.1 | 103.599998 | 10 | 0.000014 | 0.24 | 1.5135 | 1.48014 | 2.239 | 2.396 | 1.90303 | 1.90667 | 0.00004 | 77.800003 | 48.16 | 0.000004 | 7.92 | 7.43 | 7.43 | 1,260 | 1,625 | FDTD | 4.01 |
Polydimethylsiloxane (PDMS) | Air | 1.853 | 0.636 | 3.2 | 108.900002 | 5 | 0.000142 | 0.15 | 1.91982 | 1.21325 | 0.724 | 2.13 | 1.63601 | 1.63716 | 0.000011 | 71.300003 | 52.860001 | 0.000001 | 1.76 | 1.29 | 1.27 | 1,260 | 1,625 | FDTD | 4.13 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.14 | 0.669 | -17.9 | 184 | 1 | 0.000001 | 1.31 | 1.89609 | 1.12994 | 0.149 | 1.225 | 1.72213 | 1.72629 | 0.000021 | 79.459999 | 68.07 | 0.000003 | 6.75 | 6.56 | 6.51 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.05 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.031 | 0.315 | -8.8 | 154.399994 | 10 | 0.000013 | 0.25 | 1.53039 | 1.0008 | 1.874 | 2.564 | 1.51678 | 1.52004 | 0.00002 | 65.970001 | 24.309999 | 0 | 8.48 | 8.06 | 8.1 | 1,260 | 1,625 | FDTD | 2.82 |
Silicon Nitride (Si₃N₄) | Air | 1.046 | 0.7 | -18.5 | 177.100006 | 1 | 0.000003 | 16.68 | 1.63056 | 1.01383 | 2.67 | 3.052 | 1.56481 | 1.57013 | 0.000027 | 85.989998 | 10.26 | 0.000002 | 0.77 | 0.52 | 0.54 | 1,260 | 1,625 | FDTD | 2.75 |
SU-8 | Air | 1.996 | 0.85 | 17.799999 | 134.899994 | 5 | 0.000006 | 0.28 | 1.75187 | 1.42746 | 0.601 | 1.709 | 1.55525 | 1.56424 | 0.000077 | 74.419998 | 92.5 | 0.000004 | 4 | 3.55 | 3.84 | 1,260 | 1,625 | FDTD | 3.13 |
Silicon Nitride (Si₃N₄) | Air | 1.364 | 0.802 | -6.6 | 81.800003 | 5 | 0.000003 | 16.969999 | 1.93718 | 1.11228 | 2.528 | 3.618 | 1.54784 | 1.55206 | 0.000048 | 74.989998 | 83.599998 | 0.000002 | 9.42 | 9.14 | 9.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.59 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.587 | 0.421 | -33.799999 | 163.699997 | 10 | 0.000012 | 0.23 | 1.62447 | 1.24725 | 2.193 | 3.376 | 1.87363 | 1.88016 | 0.000033 | 87.440002 | 42.310001 | 0.000001 | 7.45 | 6.98 | 7.22 | 1,260 | 1,625 | FDTD | 0.48 |
Polymethyl Methacrylate (PMMA) | Air | 1.46 | 0.303 | -4.6 | 199.800003 | 1 | 0.000012 | 0.21 | 1.82256 | 1.01058 | 1.273 | 2.669 | 1.44329 | 1.4457 | 0.000012 | 83.110001 | 37.580002 | 0.000004 | 7.72 | 7.33 | 7.49 | 1,260 | 1,625 | FDTD | 2.38 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.521 | 0.313 | 16.799999 | 181.100006 | 10 | 0.000009 | 0.2 | 1.84529 | 1.3625 | 1.817 | 3.165 | 1.78236 | 1.79208 | 0.000059 | 81.949997 | 96.260002 | 0.000003 | 1.37 | 0.96 | 1.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.85 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.299 | 0.717 | -41.299999 | 93 | 5 | 0.000299 | 0.19 | 1.67994 | 1.11145 | 1.609 | 2.457 | 1.51642 | 1.51773 | 0.00001 | 65.980003 | 71.419998 | 0.000002 | 4.94 | 4.54 | 4.49 | 1,260 | 1,625 | FDTD | 1.19 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.126 | 0.303 | -8.7 | 94.800003 | 1 | 0.000001 | 1.45 | 1.61893 | 1.01372 | 2.122 | 2.554 | 1.9577 | 1.9658 | 0.000078 | 55.700001 | 86.910004 | 0.000005 | 9.64 | 9.18 | 9.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.78 |
Polydimethylsiloxane (PDMS) | Air | 0.601 | 0.23 | 8.6 | 126.900002 | 5 | 0.000219 | 0.19 | 1.57533 | 1.31833 | 1.983 | 2.983 | 1.59902 | 1.6049 | 0.00005 | 53.349998 | 70.510002 | 0 | 7.64 | 7.31 | 7.22 | 1,260 | 1,625 | FDTD | 2.97 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.938 | 0.787 | 2.9 | 163.600006 | 5 | 0.000169 | 0.17 | 1.55257 | 1.22559 | 0.194 | 1.654 | 1.7008 | 1.71043 | 0.00006 | 64.419998 | 35.360001 | 0.000002 | 6.07 | 5.75 | 5.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.62 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.939 | 0.92 | 18.1 | 115.199997 | 1 | 0.000001 | 1.5 | 1.79705 | 1.03918 | 0.388 | 0.598 | 1.99833 | 1.9994 | 0.000011 | 89.690002 | 40.82 | 0.000005 | 9.49 | 9.07 | 9.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.59 |
Silicon Dioxide (SiO₂) | Air | 1.438 | 0.233 | -39.5 | 170.699997 | 5 | 0.000001 | 1.43 | 1.90669 | 1.12729 | 1.184 | 2.248 | 1.45924 | 1.46102 | 0.000008 | 60.709999 | 97.879997 | 0.000005 | 0.56 | 0.44 | 0.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.55 |
Polydimethylsiloxane (PDMS) | Air | 1.401 | 0.263 | -14.2 | 140.300003 | 10 | 0.000178 | 0.2 | 1.96364 | 1.20748 | 0.646 | 1.047 | 1.47956 | 1.48167 | 0.000014 | 61 | 19.26 | 0.000002 | 2.3 | 1.92 | 2.06 | 1,260 | 1,625 | FDTD | 1.41 |
SU-8 | Air | 1.487 | 0.642 | -14.9 | 107.900002 | 5 | 0.000012 | 0.24 | 1.84292 | 1.42344 | 2.333 | 3.341 | 1.56337 | 1.57207 | 0.000071 | 89.830002 | 11.99 | 0.000004 | 6.55 | 6.27 | 6.17 | 1,260 | 1,625 | FDTD | 4.65 |
Silicon Nitride (Si₃N₄) | Air | 1.703 | 0.991 | -18 | 172.899994 | 10 | 0.000003 | 16.68 | 1.52827 | 1.45207 | 1.478 | 2.723 | 1.72988 | 1.7382 | 0.000044 | 51.349998 | 93.940002 | 0.000004 | 9.89 | 9.66 | 9.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.54 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.116 | 0.818 | 7 | 122 | 1 | 0.000001 | 1.38 | 1.78162 | 1.44379 | 2.833 | 3.297 | 1.40966 | 1.4161 | 0.000056 | 63.040001 | 40.369999 | 0.000003 | 1.86 | 1.46 | 1.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.45 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.977 | 0.249 | -36.200001 | 152.300003 | 5 | 0.000008 | 0.21 | 1.48763 | 1.0105 | 0.821 | 1.364 | 1.7359 | 1.7394 | 0.000019 | 73.379997 | 55.360001 | 0.000002 | 1.33 | 0.86 | 1.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.74 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.555 | 0.391 | 12.5 | 115.800003 | 10 | 0.000013 | 0.2 | 1.54248 | 1.40216 | 0.873 | 1.119 | 1.40035 | 1.40499 | 0.000045 | 78.25 | 91.029999 | 0.000001 | 4.51 | 4.12 | 4.26 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.19 |
SU-8 | Silicon Dioxide (SiO₂) | 1.979 | 0.336 | 12.9 | 101.400002 | 10 | 0.000009 | 0.28 | 1.93129 | 1.2619 | 2.308 | 2.877 | 1.47997 | 1.48341 | 0.000039 | 66.550003 | 91.410004 | 0.000005 | 8.21 | 7.76 | 7.96 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.1 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.759 | 0.433 | -25.6 | 92 | 1 | 0.000001 | 1.33 | 1.60581 | 1.42899 | 1.199 | 1.346 | 1.54482 | 1.55023 | 0.000046 | 50.040001 | 21.25 | 0.000002 | 1.11 | 0.65 | 0.93 | 1,260 | 1,625 | FDTD | 0.51 |
Silicon Nitride (Si₃N₄) | Air | 1.051 | 0.616 | -6.7 | 157.199997 | 10 | 0.000003 | 18.870001 | 1.67071 | 1.40717 | 1.722 | 2.71 | 1.97592 | 1.98193 | 0.000037 | 85.400002 | 82.139999 | 0.000002 | 5.75 | 5.5 | 5.61 | 1,260 | 1,625 | FDTD | 0.87 |
Silicon Dioxide (SiO₂) | Air | 0.956 | 0.381 | 7.6 | 110.699997 | 1 | 0.000001 | 1.49 | 1.66545 | 1.3756 | 0.975 | 1.364 | 1.78717 | 1.79579 | 0.000084 | 64.709999 | 19.99 | 0.000001 | 4.05 | 3.65 | 3.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.99 |
SU-8 | Air | 0.842 | 0.257 | -20.4 | 87.699997 | 5 | 0.000011 | 0.29 | 1.62584 | 1.46457 | 1.451 | 2.772 | 1.9223 | 1.92482 | 0.000023 | 61.52 | 63.759998 | 0.000003 | 8.76 | 8.64 | 8.65 | 1,260 | 1,625 | FDTD | 3.99 |
Silicon Nitride (Si₃N₄) | Air | 0.826 | 0.581 | 20 | 172.800003 | 5 | 0.000003 | 19.809999 | 1.41133 | 1.00659 | 1.022 | 1.247 | 1.53622 | 1.54547 | 0.000061 | 60.490002 | 73.440002 | 0.000003 | 6.73 | 6.36 | 6.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.82 |
Polydimethylsiloxane (PDMS) | Air | 0.647 | 0.839 | -33.299999 | 195.300003 | 10 | 0.000287 | 0.17 | 1.88577 | 1.06027 | 1.6 | 1.913 | 1.72986 | 1.73871 | 0.000039 | 56.209999 | 48.369999 | 0.000002 | 7.71 | 7.5 | 7.29 | 1,260 | 1,625 | FDTD | 1.63 |
Silicon Nitride (Si₃N₄) | Air | 1.125 | 0.784 | -13.6 | 154 | 10 | 0.000003 | 18.530001 | 1.67876 | 1.38285 | 1.538 | 2.945 | 1.49924 | 1.50215 | 0.000017 | 53.799999 | 58.860001 | 0.000003 | 8.48 | 8.33 | 8.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.23 |
Subsets and Splits